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    • 11. 发明申请
    • System and method for producing and delivering vapor
    • 用于生产和输送蒸汽的系统和方法
    • US20070181703A1
    • 2007-08-09
    • US11349068
    • 2006-02-07
    • Daryl BuchananFaisal TariqHai MeiStuart Tison
    • Daryl BuchananFaisal TariqHai MeiStuart Tison
    • F24D3/00
    • F22B35/005F22B35/00
    • Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially maintaining the saturated vapor condition within the vaporizer tank the pressure of vapor at the mass flow controller can be substantially maintained and a stable and consistent flow rate of vapor achieved.
    • 公开了用于生产和输送蒸气的系统和方法。 容纳液体的蒸发器罐可以被加热,使得罐内的液体被加热并产生蒸气。 然后可以调节该蒸气到目的地的流动。 本发明的实施例可以控制该液体的温度,使得蒸发器罐中基本上保持饱和蒸气条件。 蒸发器罐耦合到质量流量控制器,其调节蒸汽向下游部件的输送。 通过基本上保持蒸发器罐内的饱和蒸汽状态,可以基本上保持质量流量控制器处的蒸汽压力,并且获得稳定且一致的蒸汽流量。
    • 12. 发明授权
    • Pressure sensor device and method
    • 压力传感器装置及方法
    • US07131334B2
    • 2006-11-07
    • US10827026
    • 2004-04-19
    • Hai Mei
    • Hai Mei
    • H01L29/84
    • G01L19/0061G01L19/148
    • Embodiments of the present invention provide a diaphragm pressure gauge with an interface printed circuit board (“PCB”) contained in a reference pressure chamber of the diaphragm pressure gauge for receiving signals from one or more sensing elements in the reference pressure chamber. The sensing elements can comprise, for example, piezoelectric strain gauges, piezoresistive strain gauges, capacitor elements or other elements used in determining the deflection in the diaphragm. The interface PCB can be configured to connect the sensing elements to pass-through electrical connections in the housing of the reference pressure chamber. Thus, signals can be communicated from the sensing elements, through the interface board and out of the reference pressure chamber via the pass-through electrical connections.
    • 本发明的实施例提供了一种隔膜压力表,其具有包含在隔膜压力计的参考压力室中的接口印刷电路板(“PCB”),用于接收来自参考压力室中的一个或多个感测元件的信号。 感测元件可以包括例如用于确定隔膜中的偏转的压电应变仪,压阻应变仪,电容器元件或其他元件。 接口PCB可以被配置为将感测元件连接到参考压力室的壳体中的直通电连接。 因此,信号可以从感测元件通过接口板通过传递电连接而从参考压力室传出。