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    • 13. 发明授权
    • Semiconductor device including uniform contact plugs and a method of manufacturing the same
    • 包括均匀接触塞的半导体器件及其制造方法
    • US08203135B2
    • 2012-06-19
    • US12697620
    • 2010-02-01
    • Kyu-Rie SimJung-Hoon ParkYoon-Jong SongJae-Min ShinShin-Hee Han
    • Kyu-Rie SimJung-Hoon ParkYoon-Jong SongJae-Min ShinShin-Hee Han
    • H01L29/41
    • H01L27/24H01L27/222
    • A semiconductor device, a semiconductor module, an electronic apparatus and methods of fabricating and manufacturing the same are provided. The semiconductor device includes a lower interconnection formed on a substrate, a plurality of control patterns formed on the lower interconnection, a plurality of lower contact plug patterns formed on the control patterns, a plurality of storage patterns formed on the lower contact plug patterns, a plurality of upper electrodes formed on the storage patterns, and a plurality of upper interconnections formed on the upper electrodes. The lower contact plug patterns each include at least two contact holes having different sizes, a plurality of sidewall patterns formed on inner sidewalls of the two contact holes and wherein the sidewall patterns have different thicknesses from one another. The semiconductor device further includes a plurality of electrode patterns conformably formed on the inside of the sidewall patterns and having size errors less than 10%, and a plurality of filling patterns formed inside the electrode patterns and completely filling the inside of the contact holes.
    • 提供半导体器件,半导体模块,电子设备及其制造和制造方法。 半导体器件包括形成在衬底上的下互连,形成在下互连上的多个控制图案,形成在控制图案上的多个下接触插塞图案,形成在下接触插塞图案上的多个存储图案, 形成在存储图案上的多个上电极和形成在上电极上的多个上互连。 下接触插头图案各自包括具有不同尺寸的至少两个接触孔,多个侧壁图案形成在两个接触孔的内侧壁上,并且其中侧壁图案具有彼此不同的厚度。 半导体器件还包括多个沿着侧壁图案的内侧形成并且具有小于10%的尺寸误差的电极图案,以及形成在电极图案内并且完全填充接触孔内部的多个填充图案。