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11. 发明申请

US20110291680A1 CHUCK FOR SUPPORTING AND RETAINING A TEST SUBSTRATE AND A CALIBRATION SUBSTRATE 有权
标题翻译：支持和保留测试基板和校准基板
公开(公告)号：US20110291680A1
公开(公告)日：2011-12-01
申请号：US13209171
申请日：2011-08-12
申请人： Andrej Rumiantsev , Stojan Kanev , Steffen Schott , Karsten Stoll
发明人： Andrej Rumiantsev , Stojan Kanev , Steffen Schott , Karsten Stoll
IPC分类号： G01R31/00 , B23Q3/00
CPC分类号： G01R31/2886
摘要： A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate. The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.
摘要翻译：用于支撑和保持测试基板的卡盘包括用于支撑和保持校准基板的装置。卡盘包括用于支撑测试基板的第一支撑表面和横向偏移到第一支撑表面的用于支撑校准基板的第二支撑表面。校准基板具有用于校准探测器的测量单元的平面校准标准，以及至少在校准标准区域中位于校准基板下方的介电材料或空气。为了能够在测试基板上获取实际的热条件，特别是在已知和未知的校准标准上，因此考虑到所使用的校准标准的电气行为的热影响，第二支撑表面装备有温度校准基板的控制。

12. 发明授权

US07768271B2 Method for calibration of a vectorial network analyzer having more than two ports 失效
标题翻译：校准具有两个以上端口的矢量网络分析仪的方法
公开(公告)号：US07768271B2
公开(公告)日：2010-08-03
申请号：US11942095
申请日：2007-11-19
申请人： Andrej Rumiantsev , Steffen Schott , Stojan Kanev
发明人： Andrej Rumiantsev , Steffen Schott , Stojan Kanev
IPC分类号： G01R35/00
CPC分类号： G01R35/005 , G01R27/28
摘要： Method for calibrating a vectorial network analyzer, with n measurement ports (n>2) and at least m measurement sites, where m>n+1 includes measurement of three different n-port reflection standards, connected between measurement ports in any desired order, and successive measurement of reflection and transmission parameters at different transmission standards, connected between two respective measurement ports, and computational determination of error coefficients and error-corrected scattering matrices [Sx] of the n-port standards. Reflection standards, Short and Open, are unknown, but physically identical at each n-fold one-port. Reflection standard, realized by wave terminations, is known, but can be different at each n-fold one-port. Transmission standards are measured at a transmission standard, having known length and attenuation at a two-port, and at unknown transmission standards, identical for incident and reflected waves at remaining two-ports, which can be connected. Unknown reflection and transmission values are determined computationally by the measurements.
摘要翻译：用于校准具有n个测量端口（n> 2）和至少m个测量位置的矢量网络分析仪的方法，其中m> n + 1包括以任何所需顺序连接在测量端口之间的三个不同的n端口反射标准的测量，连续测量两个相应测量端口之间的不同传输标准的反射和传输参数，以及n端口标准的误差系数和误差校正散射矩阵[Sx]的计算确定。反射标准，短路和开放是未知的，但在每个n-fold单端口物理上相同。反射标准通过波形终端实现，是已知的，但在每个n-fold单端口可以是不同的。传输标准以传输标准测量，在双端口具有已知长度和衰减，并且在未知传输标准下，对于可连接的剩余两端口处的入射波和反射波是相同的。通过测量计算地确定未知的反射和透射值。

13. 发明授权

US07652491B2 Probe support with shield for the examination of test substrates under use of probe supports 有权
标题翻译：使用探头支架检测测试基板的探头支架
公开(公告)号：US07652491B2
公开(公告)日：2010-01-26
申请号：US11940354
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G10R31/28
CPC分类号： G01R31/2889 , G01R1/07342
摘要： A probe support for holding probes which serve for electrical contacting of test substrates in a prober for testing purposes comprises a probe card holder, a probe card, and a probe card adapter, The probe card and probe card adapter are electrically connected to one another as well as to a shield of electrically conductive material and are disposed such that the probe card lies in a passageway of a shield. The shield is disposed between the test substrates and the probe card holder and is electrically insulated from the holder. For testing test substrates their positioning with respect to the probes held in this manner is done by angular alignment of the contact surfaces of the test substrates to the sensor tips and the movement of the test substrates along a path which starts from a first reference position and is composed up to the first, and each additional, contact position of an x-component and a y-component.
摘要翻译：用于保持探头的探针支架用于探测器中的测试基板的电接触以用于测试目的包括探针卡夹，探针卡和探针卡适配器。探针卡和探针卡适配器彼此电连接为以及导电材料的屏蔽件，并且被布置成使得探针卡位于屏蔽件的通道中。屏蔽件设置在测试基板和探针卡座之间并且与保持器电绝缘。为了测试测试基板，它们相对于以这种方式保持的探针的定位是通过将测试基板的接触表面与传感器尖端角度对准并沿着从第一参考位置开始的路径移动测试基板来进行的，由x分量和y分量组成直到第一个和每个附加的接触位置。

14. 发明授权

US07579849B2 Probe holder for a probe for testing semiconductor components 有权
标题翻译：用于测试半导体元件的探头的探头支架
公开(公告)号：US07579849B2
公开(公告)日：2009-08-25
申请号：US11674430
申请日：2007-02-13
申请人： Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
发明人： Jorg Kiesewetter , Stefan Kreissig , Stojan Kanev
IPC分类号： G01R31/02
CPC分类号： G01R1/06705 , G01R1/0675
摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.
摘要翻译：探针支架，其中探针在垂直力的作用下具有轻微的水平偏移，包括用于探针的探针支架，其中该支架适于紧固和电接触连接在载体装置上测试装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将探针保持器连接到载体装置的紧固臂。保持臂和紧固臂通过铰接接头彼此连接，由此可以通过增加探针的屈服运动的半径来减小或甚至防止由于外力引起的针尖的水平偏移。

15. 发明申请

US20090049944A1 MICROMANIPULATOR FOR MOVING A PROBE 审中-公开
标题翻译：用于移动探头的微型计算机
公开(公告)号：US20090049944A1
公开(公告)日：2009-02-26
申请号：US12022261
申请日：2008-01-30
申请人： Jorg Kiesewetter , Stojan Kanev , Lutz Junker , Stefan Kreissig
发明人： Jorg Kiesewetter , Stojan Kanev , Lutz Junker , Stefan Kreissig
IPC分类号： B25J7/00
CPC分类号： B25J7/00 , B25J9/144 , G01R1/06705 , Y10T74/20207
摘要： A micromanipulator for moving a probe comprises two elements which are mechanically connected to one another in such a way that one element can be moved relative to other element. The movement of the element occurs as a result of the pressure change of a fluid which acts upon an actuator which is in mechanical contact to a mobile element or to an element moving on a surface segment.
摘要翻译：用于移动探针的显微操纵器包括两个元件，这两个元件以相对于其它元件移动一个元件的方式彼此机械连接。元件的运动是由于作用在致动器上的流体的压力变化的结果，该致动器机械地接触到移动元件或者在表面段上移动的元件。

16. 发明授权

US08922229B2 Method for measurement of a power device 有权
标题翻译：功率器件测量方法
公开(公告)号：US08922229B2
公开(公告)日：2014-12-30
申请号：US13380484
申请日：2010-06-16
申请人： Botho Hirschfeld , Stojan Kanev
发明人： Botho Hirschfeld , Stojan Kanev
IPC分类号： G01R31/26 , G01R31/40 , G01R31/28 , G01R31/20
CPC分类号： G01R31/2891
摘要： A method is disclosed for the measurement of a power device in a prober, which serves the examination and testing of such components. In the process, a power device is held by a chuck, and at least one electric probe is held by a probe holder, and optionally, the power device or the probe is positioned each relative to the other using a positioning device with an electrical drive, and contacts the power device. At the same time, an electrical connection remains between the probe to a signal unit with which a power signal is sent out or received, is blocked and only unblocked when it is determined that the contact between probe 26 and contact area is established.
摘要翻译：公开了用于测量探测器中的功率器件的方法，其用于检测和测试这些部件。在该过程中，功率器件由卡盘保持，并且至少一个电探针由探针保持器保持，并且可选地，功率器件或探针通过具有电驱动器的定位装置相对于另一个定位并接触电源设备。同时，当确定探测器26和接触区域之间的接触被建立时，探针之间的电气连接保持在与发送或接收功率信号的信号单元之间被阻挡并且仅被解除阻塞。

17. 发明申请

US20090021275A1 METHOD AND ARRANGEMENT FOR POSITIONING A PROBE CARD 审中-公开
标题翻译：定位探针卡的方法和布置
公开(公告)号：US20090021275A1
公开(公告)日：2009-01-22
申请号：US11947129
申请日：2007-11-29
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Jorg Kiesewetter
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Jorg Kiesewetter
IPC分类号： G01R1/067 , G01R31/02
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.
摘要翻译：一种用于相对于测试基板垂直定位探针卡的方法，包括将在第一定位步骤中接近的分离位置存储为探针卡的针尖与基底之间的距离，存储在第二定位中接近的接触位置一直到探针卡接触基板，并显示针尖的图像。为了避免在探针卡改变之后的错误操作，当成像针尖时，存储的接触位置成像并改变，直到该接触位置的呈现对应于适合于相应探针卡的尖端的实际高度，并且该设置为然后存储为新的联系人位置。显示装置呈现针尖和存储的接触位置，并且连接到存储器，记录装置和改变接触位置的输入装置。

18. 发明授权

US07332923B2 Test probe for high-frequency measurement 失效
标题翻译：测试探头进行高频测量
公开(公告)号：US07332923B2
公开(公告)日：2008-02-19
申请号：US11368748
申请日：2006-03-06
申请人： Steffen Schott , Stojan Kanev
发明人： Steffen Schott , Stojan Kanev
IPC分类号： G01R1/067 , G01R31/02 , H01R11/00
CPC分类号： G01R1/06772
摘要： A test probe for executing high-frequency measurements comprises: a coaxial high-frequency wave guide containing an inner conductor and an outer conductor for delivering a primary electrical potential and a secondary electrical potential, respectively, a supporting structure conductively connected to at least the outer conductor and to at least two contact elements for creating a contact with an electronic circuit to be tested. The support structure is provided with conductive paths for the transmission respectively of a high-frequency signal from the inner conductor and a high-frequency ground potential from the outer conductor to at least one contact element and each conductive path is conductively connected to the inner or outer conductor. The support structure has at least one U-shaped cut-out with a width essentially equivalent to an outer diameter of the wave guide and sides of the U-shaped cut-out are connected to the outer conductor.
摘要翻译：用于执行高频测量的测试探针包括：同轴高频波导，其包含分别用于传送初级电位和次级电位的内部导体和外部导体，分别与至少外部导电连接的支撑结构导体和至少两个接触元件，用于与待测试的电子电路产生接触。支撑结构设置有用于将来自内部导体的高频信号和来自外部导体的高频接地电位分别传输到至少一个接触元件的导电路径，并且每个导电路径导电连接到内部或外导体。支撑结构具有至少一个U形切口，其宽度基本上等于波导管的外径，并且U形切口的侧面连接到外导体。

19. 发明授权

US08692567B2 Method for verifying a test substrate in a prober under defined thermal conditions 有权
标题翻译：用于在确定的热条件下验证探测器中的测试基板的方法
公开(公告)号：US08692567B2
公开(公告)日：2014-04-08
申请号：US13119145
申请日：2009-07-31
申请人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
发明人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
IPC分类号： G01R31/00 , G01R31/28
CPC分类号： G01R1/0408 , G01R31/2855 , G01R31/2874 , G01R31/2875 , G01R31/2886
摘要： A method and an apparatus for verifying or testing test substrates, i.e. wafers and other electronic semiconductor components, in a prober under defined thermal conditions. Such a verifying apparatus, known to the person skilled in the art as a prober, has a housing having at least two housing sections, in one housing section of which, designated hereinafter as test chamber, the test substrate to be verified is held by a chuck and is set to a defined temperature, and in the other housing section of which, designated hereinafter as probe chamber, probes are held. For verification purposes, the test substrate and the probes are positioned relative to one another by means of at least one positioning device and the probes subsequently make contact with the test substrate.
摘要翻译：一种用于在确定的热条件下在探测器中验证或测试测试基板，即晶片和其它电子半导体部件的方法和装置。这种本领域技术人员已知的探测器的验证装置具有壳体，该壳体具有至少两个壳体部分，在其一个壳体部分中，下文称为测试室，待验证的测试基板由卡盘并设定在限定的温度，并且在其另一个壳体部分中，下文称为探针室，探针被保持。为了验证目的，测试基板和探针通过至少一个定位装置相对于彼此定位，并且探头随后与测试基板接触。

20. 发明授权

US08278951B2 Probe station for testing semiconductor substrates and comprising EMI shielding 有权
标题翻译：用于测试半导体衬底并包含EMI屏蔽的探头站
公开(公告)号：US08278951B2
公开(公告)日：2012-10-02
申请号：US11940355
申请日：2007-11-15
申请人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
发明人： Stojan Kanev , Hans-Jurgen Fleischer , Stefan Kreissig , Karsten Stoll , Axel Schmidt , Andreas Kittlaus
IPC分类号： G01R31/00
CPC分类号： G01R31/2886 , G01R1/18
摘要： A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.
摘要翻译：适用于进行低电流和低电压测量的半导体衬底（即晶片和其他电子半导体元件）的探测台包括屏蔽，半导体衬底测量的电磁影响（EMI）可以是最小化，并且还包括用于准备测试信号的装置。此外，探针台的外壳可以提供探针台的各个组件或组件组的可访问性的不同可能性。

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