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    • 11. 发明申请
    • Valve for Vacuum Exhaustion System
    • 真空耗尽阀系统
    • US20090020721A1
    • 2009-01-22
    • US12208949
    • 2008-09-11
    • Tadahiro OhmiNobukazu IkedaMichio YamajiMasafumi KitanoAkihiro Morimoto
    • Tadahiro OhmiNobukazu IkedaMichio YamajiMasafumi KitanoAkihiro Morimoto
    • F16K1/00
    • F16K7/14F16K27/003F16K51/02
    • The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented.
    • 本发明提供了一种操作阀门的阀门和方法,其可以减小真空排气管道的直径,使得真空耗尽系统的设备变小,这导致降低成本并缩短真空耗尽时间,以及哪些 可以防止由流经管道的气体分解产生的物质积聚引起的管道系统内的腐蚀,堵塞和密封泄漏。 特别地,根据本发明,在真空耗尽系统中使用的管道部件即阀等上施加铝钝化,以便抑制由于烘烤时由温度升高引起的气体分解 提供了用于减小真空排气系统中的直径尺寸的部件。 因此,防止由气体分解引起的腐蚀,堵塞和座椅泄漏。