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11. 发明授权

US07773216B2 Composite sheet material selection method for use in ultra-fast laser patterning 有权
标题翻译：用于超快速激光图案化的复合片材选择方法
公开(公告)号：US07773216B2
公开(公告)日：2010-08-10
申请号：US11579521
申请日：2005-05-10
申请人： Chen-Hsiung Cheng , Xinbing Liu
发明人： Chen-Hsiung Cheng , Xinbing Liu
IPC分类号： G01J3/00
CPC分类号： B23K26/032 , B23K26/03 , B23K2103/30 , B23K2103/50 , B32B38/10 , B32B2310/0843
摘要： The present invention is a method of selecting composite sheet materials for use in ultra-fast laser patterning of layers of organic thin film material such as OLEDs. The material is selected to accomplish patterning of upper layers without damaging underlying layers by using an ultra-fast laser programmed with the appropriate laser processing parameters. These parameters are derived by examining each layer's absorption spectra, thermal, and chemical characteristics. The method of the present invention includes measuring each layer's absorption spectrum, examining each layer's thermal and chemical characteristics, determining if the layer is ablatable, determining the laser setup, patterning the layer through laser ablation processing, and determining if more layers need to be ablated. Further, the method includes a sub-method of selecting an alternate material if a layer's material characteristics are not favorable for ablation without damaging underlying layers.
摘要翻译：本发明是选择用于有机薄膜材料如OLED的超快速激光图案化的复合片材的方法。选择材料以通过使用用适当的激光加工参数编程的超快速激光来实现上层的图案化而不损坏下层。这些参数是通过检查每层的吸收光谱，热和化学特性得出的。本发明的方法包括测量每层的吸收光谱，检查每层的热和化学特性，确定层是否可消融，确定激光设置，通过激光烧蚀处理对层进行图案化，以及确定是否需要消除更多的层。此外，该方法包括如果层的材料特性不利于消融而不损坏下层，则选择替代材料的子方法。

12. 发明授权

US07198961B2 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope 失效
标题翻译：使用近场扫描光学显微镜修改现有微结构和纳米结构的方法
公开(公告)号：US07198961B2
公开(公告)日：2007-04-03
申请号：US10813372
申请日：2004-03-30
申请人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
发明人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
IPC分类号： H01L21/00
CPC分类号： B81C1/00492 , B81C99/0065 , G01Q60/22 , G01Q80/00 , Y10S977/851
摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.
摘要翻译：一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。提供微结构器件预制件。其顶表面的一部分与NSOM成型以形成地形图像。该分析部分被选择为包括现有特征。基于地形图像为顶面的成型部分定义图像坐标系。使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。

13. 发明申请

US20060285796A1 Coupling method for coupling high power optical beams into an optical waveguide 失效
标题翻译：将高功率光束耦合到光波导中的耦合方法
公开(公告)号：US20060285796A1
公开(公告)日：2006-12-21
申请号：US11154316
申请日：2005-06-16
申请人： Chen-Hsiung Cheng
发明人： Chen-Hsiung Cheng
IPC分类号： G02B6/26
CPC分类号： G02B6/4296 , G02B6/4206 , G02B6/4225 , G02B6/4227
摘要： A method for determining an improved alignment to couple a beam having a high power level into a waveguide. The power of the beam is reduced to a minimum test power level. The reduced-power beam is aligned in a test alignment such that it forms a beam spot on the coupling surface of the waveguide. The coupled power level of the coupled portion of the beam is measured. The power level of the reduced-power beam is increased in steps to a maximum test power level. Corresponding coupled power levels for each power level are measured. If the coupled power level does not saturate and the corresponding coupling efficiency is greater than or equal to the desired coupling efficiency, the current test alignment is determined to be the improved alignment. Otherwise, the test alignment is changed and the new test alignment is tested to see whether it meets the desired standards.
摘要翻译：一种用于确定改进的对准以将具有高功率水平的束耦合到波导中的方法。光束的功率降低到最小测试功率水平。减小光束在测试对准中对准，使得其在波导的耦合表面上形成光束点。测量光束的耦合部分的耦合功率电平。减小功率光束的功率电平逐步增加到最大测试功率电平。测量每个功率电平的相应的耦合功率电平。如果耦合功率电平不饱和，并且相应的耦合效率大于或等于期望的耦合效率，则将当前测试对准确定为改进的对准。否则，更改测试对齐方式，并测试新的测试对准，以查看其是否符合所需的标准。

14. 发明授权

US07151244B2 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining 失效
公开(公告)号：US07151244B2
公开(公告)日：2006-12-19
申请号：US10932617
申请日：2004-09-02
申请人： Chen-Hsiung Cheng , Ming Li
发明人： Chen-Hsiung Cheng , Ming Li
IPC分类号： G02B7/04
CPC分类号： B23K26/04 , B23K26/0624 , G01Q40/00 , G01Q60/22
摘要： A system for measuring radiation at a peak wavelength that is radiated from a probe tip of a near-field scanning optical microscope (NSOM) probe used for laser machining, including: a laser source; the NSOM probe; a coupling substrate that is substantially transmissive to the peak wavelength; an NSOM mount to controllably hold the probe and the coupling substrate; an NSOM probe monitor coupled to the mount; an NSOM controller; and a photodetector optically coupled to the substrate. Light is coupled into the probe. The mount includes a Z motion stage. The probe monitor determines the distance between the probe tip and the coupling substrate. The controller is coupled to the probe monitor and the motion stage. It controls the distance between the probe tip and the coupling substrate such that radiation is coupled from the probe tip into the coupling substrate. The photodetector measures the power of this radiation.

15. 发明申请

US20050230369A1 System for and method of manufacturing gravure printing plates 审中-公开
公开(公告)号：US20050230369A1
公开(公告)日：2005-10-20
申请号：US11071755
申请日：2005-03-03
申请人： Chen-Hsiung Cheng , Xinbing Liu
发明人： Chen-Hsiung Cheng , Xinbing Liu
IPC分类号： B23K26/00 , B23K26/38 , B41C1/05 , B41N1/06 , B41N6/00 , G03F7/00
CPC分类号： B41C1/05
摘要： A method of operating a laser drilling system to manufacture gravure printing plates without etching or the use of hazardous chemicals includes activating a laser drilling system, including a picosecond laser, light valves, and a mechanism adapted to rotate a gravure cylinder blank. Operation of the light valves, includes setting the light valves to block and/or allow pulses of laser energy propagating from the laser drilling system that can ablate a linear pattern of cells along a substantially entire length of the gravure cylinder blank. Drilling of cells includes targeting the laser drilling system on the gravure cylinder blank, such that ablation of materials occurs as sub-beams propagate along an optical path to the target area and impinge upon the gravure cylinder blank, wherein specific cells within the target area of the gravure cylinder blank are drilled or not drilled according to settings of the light valves.

16. 发明申请

US20050221577A1 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope 失效
标题翻译：使用近场扫描光学显微镜修改现有微结构和纳米结构的方法
公开(公告)号：US20050221577A1
公开(公告)日：2005-10-06
申请号：US10813372
申请日：2004-03-30
申请人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
发明人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
IPC分类号： B23K26/06 , B81C1/00 , B81C99/00 , G01Q10/04 , G01Q40/00 , G01Q60/18 , G01Q60/22 , G01Q80/00 , H01L21/76
CPC分类号： B81C1/00492 , B81C99/0065 , G01Q60/22 , G01Q80/00 , Y10S977/851
摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.
摘要翻译：一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。提供微结构器件预制件。其顶表面的一部分与NSOM成型以形成地形图像。该分析部分被选择为包括现有特征。基于地形图像为顶面的成型部分定义图像坐标系。使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。

17. 发明授权

US06829517B2 Computer system for use with laser drilling system 失效
公开(公告)号：US06829517B2
公开(公告)日：2004-12-07
申请号：US10267035
申请日：2002-10-08
申请人： Chen-Hsiung Cheng , Xinbing Liu
发明人： Chen-Hsiung Cheng , Xinbing Liu
IPC分类号： G06F1900
CPC分类号： B41J2/1634 , B23K26/0624 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2103/05 , B23K2103/42 , B23K2103/50 , B41J2/161
摘要： A computer interface system for automated control of a laser drilling system has workpiece geometry template data defining a shape formed in a laser-milled workpiece. A user interface is receptive of a user selection characterizing a desired laser drilling operation. An expert system is adapted to receive the template data and the user selection, and is operable to adapt the template data to the user selection.

18. 发明授权

US06621045B1 Workpiece stabilization with gas flow 失效
标题翻译：工件稳定与气流
公开(公告)号：US06621045B1
公开(公告)日：2003-09-16
申请号：US10266936
申请日：2002-10-08
申请人： Xinbing Liu , Ming Li , Chen-Hsiung Cheng
发明人： Xinbing Liu , Ming Li , Chen-Hsiung Cheng
IPC分类号： B23K2638
CPC分类号： B23K26/38 , B23K26/0624 , B23K26/142 , B23K26/1435 , B23K26/1436 , B23K26/1437 , B23K26/1438 , B23K26/147
摘要： A method is provided for maintaining a workpiece in a focal plane of a laser drilling system. The method includes: providing a workpiece holder that is adapted to releasably retain a workpiece on a planar surface thereof, the planar surface having a recess extending therein; positioning the workpiece onto a planar surface of a workpiece holder, such that the workpiece extends across the recess formed in the workpiece holder and an exposed surface of the workpiece aligns with a focal plane of a laser drilling system; projecting a laser beam from the laser drilling system onto the exposed surface of the workpiece, thereby forming an ablation on the exposed surface of the workpiece; and directing a flow of gas onto the exposed surface of the workpiece substantially concurrent with the step of projecting a laser beam, such that the flow of gas substantially impinges on an area of the exposed surface that extends across the recess formed in the workpiece holder, thereby maintaining the exposed surface of the workpiece in the focal plane of the laser drilling system during the laser drilling operation.
摘要翻译：提供了一种用于将工件保持在激光钻孔系统的焦平面中的方法。该方法包括：提供适于将工件可释放地保持在其平坦表面上的工件保持器，该平坦表面具有在其中延伸的凹部; 将工件定位在工件保持器的平坦表面上，使得工件延伸穿过形成在工件保持器中的凹部，并且工件的暴露表面与激光钻孔系统的焦平面对齐; 将来自激光钻孔系统的激光束投射到工件的暴露表面上，从而在工件的暴露表面上形成消融; 并且在投射激光束的步骤的基础上同时将气体流引导到工件的暴露表面上，使得气体流基本上撞击暴露表面的延伸穿过形成在工件保持器中的凹部的区域，从而在激光钻孔操作期间将工件的暴露表面保持在激光钻孔系统的焦平面内。

19. 发明授权

US07209858B1 Precision position determining method 失效
标题翻译：精确位置确定方法
公开(公告)号：US07209858B1
公开(公告)日：2007-04-24
申请号：US11240756
申请日：2005-09-30
申请人： Chen-Hsiung Cheng
发明人： Chen-Hsiung Cheng
IPC分类号： G01B3/22 , G01B5/20 , G01B7/28
CPC分类号： B23K26/04 , B81C1/00626 , B81C2201/0143
摘要： A method for generating a surface profile of a microstructure. The profile is processed to determine positions of at least two edges and an approximate center point of the profiled surface. Segments of points on the determined profile are fit to a straight line centered at the approximate center point. A standard deviation of the fitted points is measured. The length and position of the segment are varied until a minimum standard deviation is determined and the process is repeated for segments having different lengths. The point is determined from the longest segment having a standard deviation approximately equal to the minimum standard deviation of all of the segment lengths.
摘要翻译：一种用于产生微结构的表面轮廓的方法。处理轮廓以确定至少两个边缘的位置和成型表面的近似中心点。所确定的轮廓上的点的分段适合以大致中心点为中心的直线。测量拟合点的标准偏差。片段的长度和位置是变化的，直到确定最小标准偏差，并且对具有不同长度的片段重复该过程。该点由具有大致等于所有段长度的最小标准偏差的标准偏差的最长段确定。

20. 发明授权

US07122489B2 Manufacturing method of composite sheet material using ultrafast laser pulses 有权
公开(公告)号：US07122489B2
公开(公告)日：2006-10-17
申请号：US10844608
申请日：2004-05-12
申请人： Chen-Hsiung Cheng , Xinbing Liu , Atsushi Sogami , Kazuo Nishimura
发明人： Chen-Hsiung Cheng , Xinbing Liu , Atsushi Sogami , Kazuo Nishimura
IPC分类号： H01L21/00
CPC分类号： H01L51/0017 , H01L51/0009 , H01L51/56 , Y10S438/94
摘要： A patterned, multi-layered thin film structure is patterned using ultra-fast lasers and absorption spectroscopy without damaging underlying layers of the layered structure. The structure is made by selecting ablatable layers based on their thermal, strength and absorption spectra and by using an ultra-fast laser programmed with the appropriate wavelength (λ), pulse width (τ), spectral width (Δλ), spot size, bite size and fluence. The end structure may have features (such as vias, insulating areas, or inkjet printed areas) patterned in the last (top) layer applied or at deeper layers within the layered structure, and can be used as components of organic light emitting didoes (OLEDs) and organic thin film transistors (OTFTs). The method of the present invention includes determining the product's specifications, providing a substrate, selecting a layer, applying the layer, patterning the layer and determining if more layers need to be added to the multi-layered thin film structure.

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