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    • 20. 发明申请
    • Pyroelectric sensor
    • 热电传感器
    • US20070108385A1
    • 2007-05-17
    • US10546613
    • 2004-02-20
    • Joseph ManteseNorman SchubringAdolph MicheliCarlos De AraujoLarry McMillanJolanta Celinska
    • Joseph ManteseNorman SchubringAdolph MicheliCarlos De AraujoLarry McMillanJolanta Celinska
    • G01J5/00
    • G01J5/34
    • A ferroelectric/pyroelectric sensor employs a technique for determining a charge output of a ferroelectric scene element of the sensor by measuring the hysteresis loop output of the scene element several times during a particular time frame for the same temperature. An external AC signal is applied to the ferroelectric scene element to cause the hysteresis loop output from the element to switch polarization. Charge integration circuitry, such as a combination output capacitor and operational amplifier, is employed to measure the charge from the scene element. Preferably, the ferroelectric of the scene element is made of an economical and responsive strontium bismuth tantalate, SBT, or derivative thereof, disposed directly between top and bottom electrodes. Because of the frequency characteristics of the sensor, created by the external AC signal, the element need not be thermally isolated from the silicon substrate by a traditional air bridge, which is difficult to manufacture, and instead is preferably thermally isolated by spin-on-glass, SOG. To prevent saturation of an output signal voltage of the sensor by excessive charge accumulation in an output capacitor, the sensor preferably has a reference element configured electrically in parallel with the scene element. When the voltage of the AC signal is negative the output capacitor is discharged by flowing current through the reference element thus interrogating the polarization of the reference element which is compared to and subtracted from the polarization of the scene element for each cycle. The polarization difference measured for each cycle over a set time period are summed by an integrating amplifier to produce a signal output voltage.
    • 铁电/热电传感器采用用于通过在相同温度的特定时间段内多次测量场景元件的磁滞回线输出来确定传感器的铁电场景元件的电荷输出的技术。 外部交流信号被施加到铁电场景元件以使得从元件输出的磁滞回线转换偏振。 采用诸如组合输出电容器和运算放大器的电荷积分电路来测量场景元件中的电荷。 优选地,场景元件的铁电体由直接设置在顶部和底部电极之间的经济且响应的钽酸铋铋钡,或其衍生物制成。 由于由外部AC信号产生的传感器的频率特性,该元件不需要通过难以制造的传统空气桥与硅衬底热隔离,而是优选地通过旋转隔离热隔离, 玻璃,SOG。 为了通过输出电容器中的过度电荷积累来防止传感器的输出信号电压的饱和,传感器优选地具有与场景元件电并联配置的参考元件。 当AC信号的电压为负时,输出电容器通过流过参考元件的电流而被放电,从而询问参考元件的偏振,该参考元件的偏振与每个周期的场景元素的偏振相比较和减去。 在设定的时间周期内对每个周期测量的偏振差由积分放大器相加以产生信号输出电压。