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    • 12. 发明申请
    • Method and apparatus for trans-zone sputtering
    • 用于跨区溅射的方法和装置
    • US20080029386A1
    • 2008-02-07
    • US11497088
    • 2006-08-01
    • Benjamin F. Dorfman
    • Benjamin F. Dorfman
    • C23C14/00
    • C23C14/3407C23C14/022C23C14/562H01J37/3277H01J37/3408
    • A new method of surface engineering of materials employs ion sputtering from a limited area, or sputter zone, of the surface of said materials, and the deposition of the sputtered matter upon a separate or other limited area, or deposition zone, of the surface of the same or simultaneously surface engineered second material, while the sputter and deposition zones are moving synchronously and simultaneously relative to the surface subjected to surface engineering. When the surfaces of two materials are simultaneously engineered, the flux of particles ejected from the sputter zone of the first material are directed to and deposited upon the surface of the deposition zone of the second material, and vice versa; hence, two different materials each possessing both sputter and deposition zones are subjected to surface engineering at the same time resulting in an exchange of surface layers. The new method is named Trans-Zone Sputtering. Where it is applicable, especially in precise surface engineering and ultra-thin film deposition technologies, Trans-Zone Sputtering is characterized by exceptionally high productivity; it does not require expensive consumable targets, and in some instances it avoids the necessity of water cooling, thus simplifying the process and reducing the weight, while simultaneously allowing a thinner magnetron and increasing the effectiveness of the magnetron cathode assembly; it also simplifies the maintenance of the equipment, reduces labor requirements and virtually avoids harmful emissions often occuring with this technology during the equipment maintenance.
    • 材料的表面工程的新方法采用离子溅射从所述材料表面的有限区域或溅射区域,以及溅射物质沉积在单独的或其它有限的区域或沉积区域上 相同或同时表面工程化的第二材料,同时溅射和沉积区域相对于经过表面工程的表面同步且同时移动。 当两种材料的表面被同时工程化时,从第一材料的溅射区喷出的颗粒的通量被引导并沉积在第二材料的沉积区的表面上,反之亦然; 因此,同时具有溅射和沉积区的两种不同的材料在同一时间进行表面工程,导致表面层的交换。 新方法被称为跨区域溅射。 特别适用于精密表面工程和超薄膜沉积技术,跨区域溅射的特点是生产率极高; 它不需要昂贵的消耗品目标,并且在某些情况下,它避免了水冷却的必要性,从而简化了工艺并减轻了重量,同时允许更薄的磁控管并增加了磁控管阴极组件的有效性; 它还简化了设备的维护,减少了劳动力需求,几乎避免了在设备维护期间经常发生的有害排放物。
    • 13. 发明授权
    • Method and apparatus for strain-stress sensors and smart skin for aircraft and space vehicles
    • 应变应变传感器和飞机和航天器智能皮肤的方法和装置
    • US06986287B1
    • 2006-01-17
    • US10669435
    • 2003-09-25
    • Benjamin F. Dorfman
    • Benjamin F. Dorfman
    • G01B7/16
    • G01L1/2287G01B7/18G01L1/2293
    • A new family of multifunctional smart coatings based on of stabilized diamond-like metal-carbon atomic scale composites and diamond-like atomic-scale composite (DL ASC) materials. Based on a unique combination of the coating fine structure, properties of the coating/substrate interface, and the mechanical and electrical properties of the coating, the disclosed smart coatings would integrate various high resolution sensors and interconnections, and the sensor would diagnose dangerous stress distribution in the coated subject with no distortion in real time, while these diamond-like coatings would simultaneously provide environmental protection of the coated surface and improve its aerodynamic quality.
    • 基于稳定的类金刚石金属碳原子尺度复合材料和类金刚石原子级复合材料(DL ASC)材料的新型多功能智能涂层系列。 基于涂层精细结构,涂层/基底界面的性质以及涂层的机械和电学性质的独特组合,所公开的智能涂层将集成各种高分辨率传感器和互连,并且传感器将诊断危险应力分布 在涂层对象中实时没有变形,而这些类金刚石涂层将同时提供涂层表面的环境保护,并提高其空气动力学质量。