专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US07320224B2 Method and apparatus for detecting and measuring state of fullness in cryopumps 有权
标题翻译：用于检测和测量低温泵充满状态的方法和装置
公开(公告)号：US07320224B2
公开(公告)日：2008-01-22
申请号：US10763056
申请日：2004-01-21
申请人： Gary S. Ash , Allen J. Bartlett , James A. O'Neil , Bruce R. Andeen
发明人： Gary S. Ash , Allen J. Bartlett , James A. O'Neil , Bruce R. Andeen
IPC分类号： B01D8/00
CPC分类号： F04B37/08
摘要： The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.
摘要翻译：本系统和方法提供了通过测量低温泵吸附能力来监测低温泵的饱和度的机制。离子计或其他总压力表与泵的冷凝或吸附面板接触。例如，量规传感器可以连接到通向吸附木炭所在的泵的中心芯的管或管道。在泵的这个位置，仪表暴露于低沸点气体，如氢气，氖气和氦气，同时基本上与其他气体如氮气，氩气，氧气或水蒸气相隔离。通过将量规连接到泵的该位置，该量规可用于监测泵的吸收能力。

12. 发明授权

US5782096A Cryopump with improved shielding 失效
标题翻译：冷冻库具有改进的屏蔽
公开(公告)号：US5782096A
公开(公告)日：1998-07-21
申请号：US795981
申请日：1997-02-05
申请人： Allen J. Bartlett , John J. Casello
发明人： Allen J. Bartlett , John J. Casello
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： A cryopump includes a two-stage refrigerator, a primary pumping surface, and a radiation shield. The radiation shield is in thermal contact with the first stage of the refrigerator. The primary pumping surface is surrounded by the radiation shield and is in thermal contact, through a direct conductive link, with the second stage of the refrigerator. The refrigerator, however, is external to the radiation shield.
摘要翻译：低温泵包括两级冰箱，初级泵送表面和辐射屏蔽。辐射屏蔽与冰箱的第一级热接触。初级泵送表面被辐射屏蔽包围，并通过直接导电连接与冰箱的第二级热接触。然而，冰箱在辐射屏蔽外部。

13. 发明授权

US5060481A Method and apparatus for controlling a cryogenic refrigeration system 失效
标题翻译：控制低温制冷系统的方法和装置
公开(公告)号：US5060481A
公开(公告)日：1991-10-29
申请号：US383170
申请日：1989-07-20
申请人： Allen J. Bartlett , Maureen C. Buonpane , Paul E. Amundsen
发明人： Allen J. Bartlett , Maureen C. Buonpane , Paul E. Amundsen
IPC分类号： F17C13/02 , F17C13/12 , F25B9/02
CPC分类号： F17C13/026 , F17C13/12 , F25B9/02 , F17C2203/0631 , F17C2221/017 , F17C2223/0161 , F17C2223/033 , F17C2227/0304 , F17C2227/0325 , F17C2227/0353 , F17C2250/032 , F17C2250/036 , F17C2250/0439 , F17C2250/0631 , F17C2260/032 , F17C2270/0536 , Y10T137/1189 , Y10T137/6606
摘要： A cryogenic refrigeration system has a control system that controls the operation of the refrigeration system and provides status information to the operator of the refrigeration system. The cryogenic refrigeration system includes one or more heater and at least one Joule-Thomson valve. The heaters are used to control the recondensing capacity of the refrigeration system and to heat the at least one Joule-Thomson valve and other points to melt away contaminants that may freeze at such points. The control system controls operation of the heaters. The control system also automates an initialization routine that utilizes the heaters to prevent blockage of the valves, and cools the refrigeration system down to a desired temperature. In addition, the control system shuts down the refrigeration system if the status information it monitors exceed a safe range.
摘要翻译：低温制冷系统具有控制制冷系统的操作的控制系统，并向制冷系统的操作人员提供状态信息。低温制冷系统包括一个或多个加热器和至少一个焦耳汤姆森阀。加热器用于控制制冷系统的再冷凝能力，并加热至少一个焦耳汤姆斯阀和其他点以熔化可能在这些点冻结的污染物。控制系统控制加热器的运行。控制系统还使利用加热器的初始化程序自动化，以防止阀的堵塞，并将制冷系统冷却到期望的温度。此外，如果控制系统监视的状态信息超过安全范围，则控制系统将关闭制冷系统。

14. 发明授权

US09266038B2 Cryopump 有权
公开(公告)号：US09266038B2
公开(公告)日：2016-02-23
申请号：US13983973
申请日：2012-02-08
申请人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
发明人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

15. 发明授权

US08869552B2 Helium management control system 有权
标题翻译：氦管理控制系统
公开(公告)号：US08869552B2
公开(公告)日：2014-10-28
申请号：US13605738
申请日：2012-09-06
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
IPC分类号： F25J1/00 , F25B7/00 , B60H1/00 , F25B9/14 , F24F11/00 , B01D8/00 , F25B9/00 , F25B45/00
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译：用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。该系统采用传感器来监测和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。通过感应过多的稀疏氦和相应地重新分配制冷剂，向每个低温泵分配适当的氦气供应。如果总制冷供应超过需求或消耗，则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应减少，从而基于当前的冷却功能使有害或减速效果最小化。

16. 发明申请

US20120038120A1 SYSTEM AND METHOD FOR CRYOGENIC COOLING 审中-公开
标题翻译：冷冻冷却系统及方法
公开(公告)号：US20120038120A1
公开(公告)日：2012-02-16
申请号：US13106180
申请日：2011-05-12
申请人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
发明人： Allen J. Bartlett , William Johnson , Mark Collins , Sergei Syssoev , James A. O'Neil , Michael J. Eacobacci
IPC分类号： B23B31/02 , F25D5/00 , F25B43/02 , F25B9/00 , F25B9/04 , F25B7/00 , F25B49/00
CPC分类号： F25B7/00 , F25B9/002 , F25B9/006 , F25B9/02 , F25B9/14 , F25B2400/01 , F25B2400/06 , F25B2600/0251 , F25B2600/0253 , F25B2700/21 , Y02B30/741 , Y10T279/34
摘要： In accordance with an embodiment of the invention, there is provided a system for cooling a load. The system comprises a closed loop primary refrigeration system comprising: a primary compressor taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure; an insulated enclosure comprising an inlet receiving the primary refrigerant at the high pressure from the primary compressor and an outlet returning the primary refrigerant at the low pressure to the primary compressor; at least one heat exchanger within the insulated enclosure receiving the primary refrigerant at the high pressure and cooling the primary refrigerant using a secondary refrigerant from a secondary refrigeration system, the secondary refrigerant being in heat exchange relationship with the primary refrigerant in the at least one heat exchanger; an expansion unit within the insulated enclosure receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure; and a supply line delivering the primary refrigerant at the low pressure to the load and a return line returning the primary refrigerant from the load to the primary refrigeration system. The system further comprises the secondary refrigeration system, wherein the secondary refrigeration system comprises at least one secondary cryogenic refrigerator. A system control unit controls operation of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load based on at least one of: a pressure of the primary refrigerant delivered to the load, and at least one temperature of the load.
摘要翻译：根据本发明的实施例，提供了一种用于冷却负载的系统。该系统包括闭环主要制冷系统，其包括：初级压缩机，其在低压下接收初级制冷剂并在高压下排出初级制冷剂; 绝缘外壳，其包括接收来自主压缩机的高压下的初级制冷剂的入口和将低压下的初级制冷剂返回到主压缩机的出口; 所述绝热壳体内的至少一个热交换器接收高压下的初级制冷剂并且使用来自二次制冷系统的二次制冷剂冷却所述初级制冷剂，所述二次制冷剂在所述至少一个热量中与所述初级制冷剂处于热交换关系交换器所述绝缘壳体内的膨胀单元接收来自所述至少一个热交换器的高压下的所述初级制冷剂，并且在所述低压下排出所述初级制冷剂; 以及将低压下的一次制冷剂输送到负载的供给管线和将一次制冷剂从负载返回到主制冷系统的返回管路。该系统还包括二次制冷系统，其中次级制冷系统包括至少一个二次低温冰箱。系统控制单元控制主要制冷系统和次级制冷系统中的至少一个的操作，以向负载提供可变制冷能力，其基于以下至少一个：输送到负载的一次制冷剂的压力，并且至少一个温度的负载。

17. 发明授权

US08082741B2 Integral facet cryopump, water vapor pump, or high vacuum pump 有权
标题翻译：积分小面积低温泵，水蒸气泵或高真空泵
公开(公告)号：US08082741B2
公开(公告)日：2011-12-27
申请号：US11803420
申请日：2007-05-15
申请人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, Jr.
发明人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, Jr.
IPC分类号： F17C13/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

18. 发明申请

US20110126554A1 Linear Drive Cryogenic Refrigerator 有权
标题翻译：线性驱动低温冰箱
公开(公告)号：US20110126554A1
公开(公告)日：2011-06-02
申请号：US12950080
申请日：2010-11-19
申请人： Ronald N. Morris , Bruce R. Andeen , Allen J. Bartlett
发明人： Ronald N. Morris , Bruce R. Andeen , Allen J. Bartlett
IPC分类号： F25B9/00
CPC分类号： F04B37/08 , F25B9/10 , F25B9/14 , F25B2400/073
摘要： A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
摘要翻译：低温冰箱具有制冷缸和至少两个置换器。每个置换器在制冷气瓶中往复运动，并使制冷气体通过制冷气瓶。再生器冷却制冷气体，气体控制阀将制冷气瓶内的高压气体和来自制冷气瓶的废气进入。冰箱还具有可操作地连接到置换器的线性电动机，并且线性电动机以往复运动驱动置换器。提供位置传感器以在往复运动期间确定置换器的参数。控制器可操作地连接到线性电动机以控制线性电动机。控制器在往复运动期间控制两个置换器的参数。该参数可以是用于低温冰箱的温度控制的置换器的行程长度，行程速度，冲程相位或另一参数。低温冰箱还可以包括消除振动的装置。

19. 发明授权

US5242277A Ultra high vacuum cryopump relief valve assembly 失效
标题翻译：超高真空低温泵安全阀总成
公开(公告)号：US5242277A
公开(公告)日：1993-09-07
申请号：US795783
申请日：1991-11-21
申请人： Allen J. Bartlett
发明人： Allen J. Bartlett
IPC分类号： F04B37/08
CPC分类号： F04B37/08 , Y10T137/7931
摘要： A secondary pressure relief valve assembly is coupled to a cryopump relief valve for reducing the gas load on the cryopump. The pressure relief valve assembly comprises a main housing mounted to a cryopump exhaust conduit enclosing that portion of the cryopump valve typically exposed to the external environment. A second relief valve is mounted to the main housing and operates in series with the cryopump valve to exhaust pressurized gases from the cryopump during regeneration. A pump is coupled to a port on the main housing and maintains a pressure within the main housing which is less than the pressure of the external environment. As such, the pressure differential across the cyropump valve is reduced. Since the leakage and permeation gas loads are linearly related to the pressure differential, they are correspondingly reduced.
摘要翻译：次级减压阀组件连接到低温泵安全阀，以减少低温泵上的气体负荷。减压阀组件包括安装到低温泵排出管道的主壳体，该低温泵排出管道封闭通常暴露于外部环境的低温泵阀门的该部分。第二安全阀安装在主壳体上并与低温泵串联运行，以在再生期间排出来自低温泵的加压气体。泵耦合到主壳体上的端口并且保持主壳体内的压力小于外部环境的压力。因此，减少了节流阀的压力差。由于泄漏和渗透气体负载与压力差线性相关，因此它们相应地减小。

20. 发明授权

US4949546A Compact heat exchanger for a cryogenic refrigerator 失效
标题翻译：用于低温冰箱的紧凑型热交换器
公开(公告)号：US4949546A
公开(公告)日：1990-08-21
申请号：US270660
申请日：1988-11-14
申请人： Lawrence A. Klusmier , Allen J. Bartlett , Dale A. Dopson
发明人： Lawrence A. Klusmier , Allen J. Bartlett , Dale A. Dopson
IPC分类号： F25B9/14 , F25B43/02 , F28F13/06
CPC分类号： F25B43/02 , F25B9/14 , F28F13/06
摘要： A heat exchanger has a set of tubes through which fluid pass. In thermal communication with these tubes are fins of high thermal conductivity material which disperse the heat contained within the fluid. Also useful in dispersing the heat contained within the passing fluid are rods inserted within the tubes to substantially decrease the hydraulic diameter of the tubes. This heat exchanger may be used in a cryogenic refrigeration system which also includes a compressor for compressing refrigerant gas, a separator for separating refrigerant gas and oil used by the compressor, and a cryogenic refrigerator for expanding the refrigerant gas.
摘要翻译：热交换器具有一组管，液体通过该管。与这些管道的热连通是散热包含在流体中的热量的高导热性材料的翅片。也可用于分散包含在通过的流体中的热量是插入管内的棒以大大降低管的水力直径。该热交换器可以用于还包括用于压缩制冷剂气体的压缩机，用于分离制冷剂气体的分离器和由压缩机使用的油的低温制冷系统，以及用于膨胀制冷剂气体的低温冷冻机。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式