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    • 15. 发明授权
    • Micromachined electrical cauterizer
    • 微加工电烧灼器
    • US5944717A
    • 1999-08-31
    • US854342
    • 1997-05-12
    • Abraham P. LeePeter A. KrulevitchM. Allen Northrup
    • Abraham P. LeePeter A. KrulevitchM. Allen Northrup
    • A61B18/14A61B17/39
    • A61B18/14A61B17/32A61B18/1492A61B2018/00351A61B2018/00386A61B2018/126A61B2218/007A61B2562/028A61B5/0538
    • A micromachined electrical cauterizer. Microstructures are combined with microelectrodes for highly localized electro cauterization. Using boron etch stops and surface micromachining, microneedles with very smooth surfaces are made. Micromachining also allows for precision placement of electrodes by photolithography with micron sized gaps to allow for concentrated electric fields. A microcauterizer is fabricated by bulk etching silicon to form knife edges, then parallelly placed microelectrodes with gaps as small as 5 .mu.m are patterned and aligned adjacent the knife edges to provide homeostasis while cutting tissue. While most of the microelectrode lines are electrically insulated from the atmosphere by depositing and patterning silicon dioxide on the electric feedthrough portions, a window is opened in the silicon dioxide to expose the parallel microelectrode portion. This helps reduce power loss and assist in focusing the power locally for more efficient and safer procedures.
    • 微加工电灼烧器。 微结构与微电极组合用于高度局部电烧烧。 使用硼蚀刻停止和表面微加工,制成具有非常光滑表面的微针。 微加工还允许通过具有微米尺寸间隙的光刻来精确放置电极以允许集中的电场。 通过大量蚀刻硅来形成微电烧机以形成刀刃,然后平行放置微电极,其间隔小至5μm的间隙被图案化并且邻近刀刃对准以在切割组织的同时提供稳态。 虽然大多数微电极线通过在电馈通部分上沉积和图案化二氧化硅而与大气电绝缘,但是在二氧化硅中打开窗口以露出平行的微电极部分。 这有助于减少功率损耗,并有助于将电力集中在本地以实现更高效和更安全的程序。
    • 16. 发明授权
    • Micromachined electrostatic vertical actuator
    • 微机械静电垂直执行器
    • US5969848A
    • 1999-10-19
    • US888000
    • 1997-07-03
    • Abraham P. LeeGary E. SommargrenCharles F. McConaghyPeter A. Krulevitch
    • Abraham P. LeeGary E. SommargrenCharles F. McConaghyPeter A. Krulevitch
    • G01Q60/00G02B26/06G02B26/08
    • G02B26/06
    • A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The micromachined electrostatic vertical actuator provides accurate movement in the sub-micron to micron ranges which is desirable in the phase modulation instrument, such as optical phase shifting. For example, compact, inexpensive, and position controllable micromirrors utilizing an electrostatic vertical actuator can replace the large, expensive, and difficult-to-maintain piezoelectric actuators. A thirty pound piezoelectric actuator with corner cube reflectors, as utilized in a phase shifting diffraction interferometer can be replaced with a micromirror and a lens. For any very precise and small amplitudes of motion` micromachined electrostatic actuation may be used because it is the most compact in size, with low power consumption and has more straightforward sensing and control options.
    • 利用悬浮力的微机械垂直致动器,例如在静电梳状驱动器中,提供垂直致动,其在用于控制的致动中相对线性,并且可以容易地与用于位置控制的平行板电容位置感测组合。 微机械静电垂直致动器在相位调制仪器中所需的亚微米到微米范围内的精确移动,例如光学相移。 例如,使用静电垂直致动器的紧凑的,便宜的和位置可控的微镜可取代大型,昂贵且难以维持的压电致动器。 如在相移衍射干涉仪中使用的具有角立方反射器的三十磅压电致动器可以用微镜和透镜代替。 对于任何非常精确和小幅度的运动,可以使用微加工静电致动,因为它是尺寸最小,功耗最小,并且具有更直接的感测和控制选项。
    • 18. 发明授权
    • Polymer micromold and fabrication process
    • 聚合物微胶粒和制造工艺
    • US5658515A
    • 1997-08-19
    • US533425
    • 1995-09-25
    • Abraham P. LeeM. Allen NorthrupPaul E. AhrePeter C. Dupuy
    • Abraham P. LeeM. Allen NorthrupPaul E. AhrePeter C. Dupuy
    • B29C33/42B29C33/40
    • B29C33/42Y10T29/49995
    • A mold assembly with micro-sized features in which the hollow portion thereof is fabricated from a sacrificial mandrel which is surface treated and then coated to form an outer shell. The sacrificial mandrel is then selectively etched away leaving the outer shell as the final product. The sacrificial mandrel is fabricated by a precision lathe, for example, so that when removed by etching the inner or hollow area has diameters as small as 10's of micros (.mu.m). Varying the inside diameter contours of the mold can be accomplished with specified ramping slopes formed on the outer surface of the sacrificial mandrel, with the inside or hollow section being, for example, 275 .mu.m in length up to 150 .mu.m in diameter within a 6 mm outside diameter (o.d.) mold assembly. The mold assembly itself can serve as a micronozzle or microneedle, and plastic parts, such as microballoons for angioplasty, polymer microparts, and microactuators, etc., may be formed within the mold assembly.
    • 具有微尺寸特征的模具组件,其中的中空部分由牺牲心轴制成,所述牺牲心轴经表面处理然后涂覆以形成外壳。 然后选择性地蚀刻牺牲心轴,离开外壳作为最终产品。 例如,通过精密车床制造牺牲心轴,使得当通过蚀刻去除时,内部或中空区域具有小至10微米(μm)的直径。 改变模具的内径轮廓可以通过形成在牺牲心轴的外表面上的规定的斜坡来实现,其中内部或中空部分的长度例如为275μm,直径在150μm以内 6 mm外径(od)模具总成。 模具组件本身可以用作微型喷嘴或微针,并且可以在模具组件内形成塑料部件,例如用于血管成形术的微球,聚合物微型部件和微型致动器等。