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    • 12. 发明申请
    • ATOMIC LAYER DEPOSITION APPARATUS
    • 原子层沉积装置
    • US20090136665A1
    • 2009-05-28
    • US12324178
    • 2008-11-26
    • Seung Woo ChoiGwang Lae ParkChun Soo LeeJeong Ho LeeYoung Seok Choi
    • Seung Woo ChoiGwang Lae ParkChun Soo LeeJeong Ho LeeYoung Seok Choi
    • C23C16/44C23C16/54
    • C23C16/45591C23C16/45504C23C16/45527H01L21/68742H01L21/68792
    • A reactor configured to subject a substrate to alternately repeated surface reactions of vapor-phase reactants is disclosed. In one embodiment, the reactor includes a reaction chamber that defines a reaction space; one or more inlets; an exhaust outlet; a gas flow control guide structure; and a substrate holder. The gas flow control guide includes one or more channels, each of which extends from a respective one of the one or more inlets to a first portion of a periphery of the reaction space. Each of the channels widens as the channel extends from the inlet to the reaction space. At least one of the channels is configured to generate a non-uniform laminar flow at the first portion of the periphery of the reaction space such that the laminar flow includes a plurality of flow paths that provide different amounts of a fluid. The reaction chamber may include a reactor base and a reactor cover detachable from each other; and a driver configured to independently adjust at least three portions of the reactor base to provide a substantially perfect seal to the reactor space.
    • 公开了一种被配置成使基板交替重复表面反应的反应器的反应器。 在一个实施方案中,反应器包括限定反应空间的反应室; 一个或多个入口; 排气口 气流控制引导结构; 和基板支架。 气体流量控制引导件包括一个或多个通道,每个通道从一个或多个入口中的相应一个入口延伸到反应空间的外围的第一部分。 当通道从入口延伸到反应空间时,每个通道变宽。 至少一个通道构造成在反应空间的周边的第一部分处产生不均匀的层流,使得层流包括提供不同量的流体的多个流动路径。 反应室可以包括可以彼此分离的反应器基座和反应器盖; 以及被配置为独立地调整反应器基座的至少三个部分以向反应器空间提供基本上完美的密封的驱动器。
    • 14. 发明申请
    • Liquid crystal display device and method for fabricating the same
    • 液晶显示装置及其制造方法
    • US20090015780A1
    • 2009-01-15
    • US12003586
    • 2007-12-28
    • Young Seok ChoiYu Ho JungSang Yong Lee
    • Young Seok ChoiYu Ho JungSang Yong Lee
    • G02F1/1339G02F1/1333
    • G02F1/13394G02F1/133371G02F1/134363G02F1/136286
    • A liquid crystal display device includes first and second substrates facing each other; gate lines and data lines formed on the first substrate such that the gate lines and the data lines intersect each other to define pixel regions; thin film transistors formed at respective intersections of the gate lines and the data lines; a black matrix layer formed on the second substrate such that the black matrix layer corresponds to a region other than the pixel regions; color filter layers extending in an extension direction of the data lines in respective pixel regions; a liquid crystal layer interposed between the first and second substrates; first column spacers formed on one of the first and second substrates such that each first column spacer corresponds to an associated one of the gate lines or to a channel region of an associated one of the thin film transistors to maintain a cell gap between the first-and second substrate; and spacer patterns formed on one of the first and second substrates such that each spacer pattern corresponds to at least one of an associated one of the gate lines and an associated one of the data lines, thereby forming a first gap between the spacer pattern and the other substrate facing the spacer pattern, and reducing an amount of liquid crystals filled between the first and second substrates.
    • 液晶显示装置包括彼此面对的第一和第二基板; 栅极线和数据线形成在第一基板上,使得栅极线和数据线彼此相交以限定像素区域; 形成在栅极线和数据线的各交叉处的薄膜晶体管; 形成在所述第二基板上的黑矩阵层,使得所述黑矩阵层对应于除所述像素区域之外的区域; 彩色滤光片层,沿各个像素区域中的数据线的延伸方向延伸; 介于所述第一和第二基板之间的液晶层; 第一列间隔物形成在第一和第二基板中的一个上,使得每个第一列间隔物对应于相关联的一条栅极线或相关联的一个薄膜晶体管的沟道区,以保持第一 - 和第二衬底; 以及形成在所述第一和第二基板中的一个上的间隔图案,使得每个间隔图案对应于相关联的一条栅极线和相关联的一条数据线中的至少一个,从而在间隔物图案与第二基板之间形成第一间隙 面对间隔图案的其它基板,以及减少填充在第一和第二基板之间的液晶的量。