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11. 发明申请

US20110267676A1 METHOD AND SYSTEM FOR HYBRID INTEGRATION OF AN OPTO-ELECTRONIC INTEGRATED CIRCUIT 有权
标题翻译：用于电子集成电路的混合集成的方法和系统
公开(公告)号：US20110267676A1
公开(公告)日：2011-11-03
申请号：US13076205
申请日：2011-03-30
申请人： John Dallesasse , Stephen B. Krasulick , William Kozlovsky
发明人： John Dallesasse , Stephen B. Krasulick , William Kozlovsky
IPC分类号： G02F1/01 , G02F1/29
CPC分类号： H01S5/141 , H01S5/021 , H01S5/02248 , H01S5/02272 , H01S5/0261 , H01S5/06246 , H01S5/1032
摘要： An opto-electronic integrated circuit (OEIC) includes an SOI substrate, a set of composite optical transmitters, a set of composite optical receivers, and control electronics disposed in the substrate and electrically coupled to the set of composite optical transmitters and receivers. Each of the composite optical transmitters includes a gain medium including a compound semiconductor material and an optical modulator. Each of the composite optical receivers includes a waveguide disposed in the SOI substrate, an optical detector bonded to the SOI substrate, and a bonding region disposed between the SOI substrate and the optical detector. The bonding region includes a metal-assisted bond at a first portion of the bonding region and a direct semiconductor-semiconductor bond at a second portion of the bonding region. The OEIC also includes control electronics disposed in the SOI substrate and electrically coupled to the set of composite optical transmitters and the set of composite optical receivers.
摘要翻译：光电集成电路（OEIC）包括SOI衬底，一组复合光发射器，一组复合光接收器和设置在衬底中的电耦合到该组合的光发射器和接收器的控制电子器件。每个复合光发射机包括包括化合物半导体材料和光调制器的增益介质。每个复合光接收机包括布置在SOI衬底中的波导，接合到SOI衬底的光学检测器和设置在SOI衬底和光学检测器之间的接合区域。接合区域包括在接合区域的第一部分处的金属辅助键和在接合区域的第二部分处的直接半导体 - 半导体结合。 OEIC还包括设置在SOI衬底中并且电耦合到该组复合光发射器和该组复合光接收器的控制电子装置。

12. 发明申请

US20110085572A1 METHOD AND SYSTEM FOR HYBRID INTEGRATION OF A TUNABLE LASER 有权
标题翻译：用于混合激光的混合积分的方法和系统
公开(公告)号：US20110085572A1
公开(公告)日：2011-04-14
申请号：US12903025
申请日：2010-10-12
申请人： John Dallesasse , Stephen B. Krasulick , William Kozlovsky
发明人： John Dallesasse , Stephen B. Krasulick , William Kozlovsky
IPC分类号： H01S5/06 , H01S5/026
CPC分类号： H01S5/021 , H01S3/10053 , H01S5/02248 , H01S5/02272 , H01S5/1003 , H01S5/1007 , H01S5/1032 , H01S5/141
摘要： A tunable laser includes a substrate comprising a silicon material and a gain medium coupled to the substrate. The gain medium includes a compound semiconductor material. The tunable laser also includes a waveguide disposed in the substrate and optically coupled to the gain medium, a first wavelength selective element characterized by a first reflectance spectrum and disposed in the substrate, and a second wavelength selective element characterized by a second reflectance spectrum and disposed in the substrate. The tunable laser further includes an optical coupler disposed in the substrate and joining the first wavelength selective element, the second wavelength selective element, and the waveguide and an output mirror.
摘要翻译：可调谐激光器包括包括硅材料的基板和与基板耦合的增益介质。增益介质包括化合物半导体材料。可调谐激光器还包括布置在衬底中并光学耦合到增益介质的波导，第一波长选择元件，其特征在于第一反射光谱并且设置在衬底中，以及第二波长选择元件，其特征在于第二反射光谱并且被布置在基材中。可调激光器还包括设置在基板中并连接第一波长选择元件，第二波长选择元件和波导的光耦合器和输出镜。

13. 发明申请

US20050213618A1 Semi-integrated designs for external cavity tunable lasers 有权
标题翻译：外部可调谐激光器的半集成设计
公开(公告)号：US20050213618A1
公开(公告)日：2005-09-29
申请号：US10811712
申请日：2004-03-29
申请人： Sergei Sochava , William Chapman , William Kozlovsky
发明人： Sergei Sochava , William Chapman , William Kozlovsky
IPC分类号： H01S5/026 , H01S5/0625 , H01S5/068 , H01S5/0687 , H01S5/14 , H01S3/10
CPC分类号： H01S5/06255 , H01S5/0265 , H01S5/06256 , H01S5/06804 , H01S5/0687 , H01S5/141 , H01S5/142
摘要： Semi-integrated external cavity diode laser (ECDL) designs including integrated structures comprising a gain section, phase control section, and optional modulator section. Each integrated structure includes a waveguide that passes through each of the sections. A mirror is defined in the structure to define one end of a laser cavity. A reflective element is disposed generally opposite a rear facet of the gain section, forming an external cavity therebetween. A tunable filter is disposed in the external cavity to effectuate tuning of the laser. During operation, a modulated drive signal is provided to the phase control section. This modulates an optical path length of the laser cavity, which produces an intensity (amplitude) modulation in the laser output. A detector is employed to produce a feedback signal indicative of the intensity modulation that is used for tuning the laser in accordance with a wavelength locking servo loop. Upon passing through the modulator section, an optical signal is modulated with data.
摘要翻译：半集成外腔二极管激光器（ECDL）设计包括包括增益部分，相位控制部分和可选调制器部分的集成结构。每个集成结构包括通过每个部分的波导。在该结构中限定了一个镜子来定义激光腔的一端。反射元件大致相对于增益部分的后面设置，在它们之间形成一个外部空腔。可调滤波器设置在外腔中以实现激光的调谐。在操作期间，向相位控制部分提供调制驱动信号。这调制激光腔的光程长度，其在激光输出中产生强度（幅度）调制。使用检测器产生指示根据波长锁定伺服环路来调谐激光器的强度调制的反馈信号。经过调制器部分后，用数据调制光信号。

14. 发明申请

US20050088716A1 Tunable laser modules incorporating micromachined pellicle splitters 失效
标题翻译：可调谐激光模块结合微加工防护薄膜分离器
公开(公告)号：US20050088716A1
公开(公告)日：2005-04-28
申请号：US10980057
申请日：2004-11-03
申请人： William Kozlovsky , Mark McDonald
发明人： William Kozlovsky , Mark McDonald
IPC分类号： G02B27/14 , G02F1/00
CPC分类号： G02B27/1073 , G02B27/108 , G02B27/142
摘要： A micromachined pellicle beam splitter and method of manufacture thereof are disclosed. In one embodiment, the beam splitter includes a silicon frame with a silicon nitride membrane attached to the frame and covering an opening through the frame. Other materials may be utilized, however, the coefficient of thermal expansion (CTE) of the membrane should be greater than that of the frame. The beam splitter may be manufactured by coating a silicon substrate with a layer of silicon nitride, patterning an opposite side of the silicon substrate with a photoresist or a metallic layer to define an opening an etching an opening through the substrate to the silicon nitride with either a dry etch or wet etch technique. An improved tunable laser module incorporating the micromachined pellicle beam splitter and a method of tuning a laser diode are also disclosed.
摘要翻译：公开了一种微加工防护薄膜分束器及其制造方法。在一个实施例中，分束器包括硅框架，其具有附接到框架并覆盖通过框架的开口的氮化硅膜。可以使用其它材料，然而，膜的热膨胀系数（CTE）应该大于框架的热膨胀系数（CTE）。分束器可以通过用氮化硅层涂覆硅衬底来制造，用光致抗蚀剂或金属层构图硅衬底的相对侧，以限定开口，通过衬底蚀刻通过衬底到氮化硅的开口，或者干蚀刻或湿蚀刻技术。还公开了一种结合有微加工防护薄膜分束器的改进的可调激光器模块和调谐激光二极管的方法。

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