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    • 11. 发明申请
    • Exposure apparatus and device manufacturing method
    • 曝光装置和装置制造方法
    • US20070109517A1
    • 2007-05-17
    • US11651551
    • 2007-01-10
    • Hiroaki TakaiwaTakashi Horiuchi
    • Hiroaki TakaiwaTakashi Horiuchi
    • G03B27/42
    • G03F7/70341G03B27/42G03F7/7085G03F7/70916
    • A lithographic projection apparatus includes a substrate table configured to hold a substrate, a projection system arranged to project a patterned beam of radiation onto the substrate, a liquid supply system configured to supply liquid to a space between the projection system and the substrate, and a residual liquid detector configured to detect liquid remaining on the substrate and/or the substrate table after an exposure is completed. A device manufacturing method includes projecting, using a projection system of a lithographic apparatus, a patterned beam of radiation through a liquid onto a substrate, the substrate being held by a substrate table, and, after the projecting is complete, detecting residual liquid on the substrate and/or the substrate table.
    • 光刻投影装置包括:被配置为保持基板的基板台;布置成将图案化的辐射束投射到基板上的投影系统;配置成将液体供应到投影系统和基板之间的空间的液体供应系统;以及 剩余液体检测器被配置为在曝光完成之后检测残留在基板和/或基板台上的液体。 一种器件制造方法包括使用光刻设备的投影系统将图案化的辐射束通过液体投影到衬底上,衬底由衬底台保持,并且在突出完成之后,检测残留液体 衬底和/或衬底台。
    • 14. 发明授权
    • Disc drive suspension whose extending portion and flexure can be regulated
    • 圆盘驱动悬架,其延伸部分和弯曲部分可以调节
    • US06813119B2
    • 2004-11-02
    • US10179869
    • 2002-06-25
    • Hiroshi OkamotoHideki KashimaChihiro KonoTakashi Horiuchi
    • Hiroshi OkamotoHideki KashimaChihiro KonoTakashi Horiuchi
    • G11B2124
    • G11B5/486
    • An extending portion of a hinge member is formed having a first hole in which a first positioning pin can be inserted and a second hole in which a second positioning pin can be inserted. The first hole has an elongated shape that allows the extending portion of the hinge member to move relatively to the first positioning pin in a width direction. The second hole is a circular large hole that allows the extending portion to move relatively to the second positioning pin in the width direction and an axial direction. A third hole and a fourth hole are formed in a flexure. The third hole has an elongated shape that allows the flexure to move relatively to the first positioning pin in the axial direction. The fourth hole has an elongated shape that allows the flexure to move relatively to the second positioning pin.
    • 铰链部件的延伸部分形成有第一孔,第一定位销可插入第一孔中,第二孔可插入第二定位销。 第一孔具有细长形状,其允许铰链构件的延伸部分在宽度方向上相对于第一定位销移动。 第二孔是圆形大孔,允许延伸部在宽度方向和轴向上相对于第二定位销移动。 弯曲部形成有第三孔和第四孔。 第三孔具有细长形状,允许挠曲件沿轴向相对于第一定位销移动。 第四孔具有允许挠曲件相对于第二定位销移动的细长形状。
    • 17. 发明授权
    • Electronic document circulating system
    • 电子文件循环系统
    • US06279031B1
    • 2001-08-21
    • US09124235
    • 1998-07-29
    • Ariko KawasakiHiroshi MajimaHisashi OnoKazuhiro SugaTakashi HoriuchiTetsuji Toge
    • Ariko KawasakiHiroshi MajimaHisashi OnoKazuhiro SugaTakashi HoriuchiTetsuji Toge
    • G06F1314
    • G06Q10/10
    • In an electronic document circulating system utilizing a network, in order to attain simplification of the operation procedure by a transmitting person and facilitation of the temporary circulation of a document, a circulation control unit circulates the circular document indicated by document management information stored in a document management information store unit on the basis of circulation control information indicative of a circular route of the circular document stored in a circulation control information store unit and role definition information for relating a plurality of users to a role shared among equal users stored in a role definition information store unit. In the circulation, the circular document is transmitted to a user selected by the system on the basis of a predetermined criterion, of users in the role designated by the transmitting person. When the document is transmitted temporarily for consultation, temporary circulation control information is set and the document is returned to a consulting user exactly.
    • 在利用网络的电子文件循环系统中,为了简化发送人的操作程序和简化文件的临时流通,循环控制单元循环由存储在文档中的文档管理信息指示的循环文档 管理信息存储单元,其基于指示循环控制信息存储单元中存储的循环文档的循环路径的循环控制信息和用于将多个用户与存储在角色定义中的相同用户之间共享的角色相关联的角色定义信息 信息存储单元。 在循环中,循环文件按照预定标准由系统选择的使用者发送给发送人指定的角色。 当文件临时传送用于咨询时,设置临时流通控制信息,并将文件正确地返回给咨询用户。
    • 18. 发明授权
    • Film forming apparatus and method
    • 成膜装置及方法
    • US6149729A
    • 2000-11-21
    • US80718
    • 1998-05-19
    • Teruo IwataKazuichi HayashiYuichiro FujikawaTakashi Horiuchi
    • Teruo IwataKazuichi HayashiYuichiro FujikawaTakashi Horiuchi
    • B01D53/04C23C16/44C23C16/00
    • C23C16/4412C23C16/4405
    • A film forming apparatus includes a chamber in which a thin film is formed on a semiconductor wafer by supplying a process gas, the interior of which is then cleaned by a cleaning gas, while the gas in the chamber is exhausted by a vacuum system. The vacuum system includes a main vacuum line connected to a vacuum port of the chamber, a high-vacuum pump arranged on an upstream side of the main vacuum line, a coarse control vacuum pump arranged on a downstream side of the main vacuum line, a bypass line which is connected to the main vacuum line so as to bypass the high-vacuum pump and has a first connection portion connected between the vacuum port and the high-vacuum pump and a second connection portion connected between the high-vacuum pump and the coarse control vacuum pump, a trap arranged on the bypass line, heater arranged between the first connection portion and the trap for heating gas flowing from the first connection portion to the trap, and valves for selectively opening/closing the main vacuum line and the bypass line to allow the gas in the chamber to flow through one of the lines.
    • 成膜装置包括:室,其中通过提供处理气体在半导体晶片上形成薄膜,然后通过真空系统排出室内的气体,其内部被清洁气体清洁。 真空系统包括连接到腔室的真空口的主真空管线,配置在主真空管线的上游侧的高真空泵,设置在主真空管线下游侧的粗调控制真空泵, 旁通管线,其与主真空管线连接以绕过高真空泵,并且具有连接在真空口和高真空泵之间的第一连接部分和连接在高真空泵和高真空泵之间的第二连接部分 布置在旁路管路上的疏水阀,布置在第一连接部分和捕集器之间的加热器,用于加热从第一连接部分流到捕集器的气体,以及用于选择性地打开/关闭主真空管线和旁路的阀 以允许室中的气体流过其中一条线。
    • 19. 发明授权
    • Electronic document circulating system
    • 电子文件循环系统
    • US5848248A
    • 1998-12-08
    • US978140
    • 1997-11-25
    • Ariko KawasakiHiroshi MajimaHisashi OnoKazuhiro SugaTakashi HoriuchiTetsuji Toge
    • Ariko KawasakiHiroshi MajimaHisashi OnoKazuhiro SugaTakashi HoriuchiTetsuji Toge
    • G06F13/00G06Q10/10H04L12/54H04L12/58
    • G06Q10/10
    • In an electronic document circulating system utilizing a network, in order to attain simplification of the operation procedure by a transmitting person and facilitation of the temporary circulation of a document, a circulation control unit circulates the circular document indicated by document management information stored in a document management information store unit on the basis of circulation control information indicative of a circular route of the circular document stored in a circulation control information store unit and role definition information for relating a plurality of users to a role shared among equal users stored in a role definition information store unit. In the circulation, the circular document is transmitted to a user selected by the system on the basis of a predetermined criterion, of users in the role designated by the transmitting person. When the document is transmitted temporarily for consultation, temporary circulation control information is set and the document is returned to a consulting user exactly.
    • 在利用网络的电子文件循环系统中,为了简化发送人的操作程序和简化文件的临时流通,循环控制单元循环由存储在文档中的文档管理信息指示的循环文档 管理信息存储单元,其基于指示循环控制信息存储单元中存储的循环文档的循环路径的循环控制信息和用于将多个用户与存储在角色定义中的相同用户之间共享的角色相关联的角色定义信息 信息存储单元。 在循环中,循环文件按照预定标准由系统选择的使用者发送给发送人指定的角色。 当文件临时传送用于咨询时,设置临时流通控制信息,并将文件正确地返回给咨询用户。