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    • 11. 发明申请
    • Apparatus and method of non-sampling-based Q-factor measuring
    • 基于非抽样的Q因子测量装置和方法
    • US20070109533A1
    • 2007-05-17
    • US11323676
    • 2005-12-30
    • San-Liang LeeChun-Liang YangDar-Zu Hsu
    • San-Liang LeeChun-Liang YangDar-Zu Hsu
    • G01N21/00
    • H04L1/20
    • A non-sampling-based Q-factor measuring apparatus and method use a power conversion module to transform the power variation of inputted optical signals in time domain into the variation in other domains, such as optical wavelength, optical polarization and different output ports of optical elements. Taking optical wavelength as an example, different levels of power variation respond different outputs of wavelength variation through the use of a power-to-wavelength conversion module. An optical filter then separates the inputted optical signals with different wavelengths. The power average of a wavelength for its corresponding optical signals is further calculated by a photo detector. Thereby, the information of the power variation for the inputted optical signals at levels 1 and 0 can be obtained, and the Q-factor for the inputted optical signals is easily measured.
    • 基于非采样的Q因子测量装置和方法使用功率转换模块来将时域中输入的光信号的功率变化变换成其他领域的变化,例如光学波长,光学偏振和光学不同的输出端口 元素。 以光波长为例,不同级别的功率变化通过使用功率到波长转换模块来响应波长变化的不同输出。 然后,滤光器将输入的不同波长的光信号分离。 通过光电检测器进一步计算其相应光信号的波长的功率平均值。 因此,可以获得在等级1和0的输入光信号的功率变化的信息,并且容易地测量输入的光信号的Q因子。
    • 12. 发明申请
    • Structure and manufacturing method for single-wavelength and multi-wavelength distributed feedback lasers
    • 单波长和多波长分布反馈激光器的结构和制造方法
    • US20050031009A1
    • 2005-02-10
    • US10636103
    • 2003-08-07
    • San-Liang LeeIng-Fa Jang
    • San-Liang LeeIng-Fa Jang
    • H01S5/00H01S5/12H01S5/40
    • H01S5/12H01S5/0654H01S5/1203H01S5/1209H01S5/4087H01S2301/173H01S2304/00
    • A single-wavelength distributed feedback (DFB) laser structure is provided. The laser structure having two sections includes an active-material layer for generating a laser having a wavelength in a specific range, two cladding layers respectively covering an upper and a bottom sides of the active-material layer for forming a waveguide structure, a phase shift layer having a specific thickness for controlling a difference between Bragg wavelengths of the two sections, a wet-etching stop layer positioned between the active-material layer and the phase shift layer, and a grating layer having a specific period for determining an illuminating wavelength, wherein a difference between the two sections is an existence of the phase shift layer thereon, and the existence of the phase shift layer causes a difference of the effective refractive indices between the two sections so as to generate a fixed difference between Bragg wavelengths of the two sections.
    • 提供单波长分布反馈(DFB)激光器结构。 具有两个部分的激光器结构包括用于产生具有特定范围波长的激光的活性材料层,分别覆盖用于形成波导结构的活性材料层的上侧和下侧的两个包覆层,相移 具有用于控制两个部分的布拉格波长之间的差异的特定厚度的层,位于活性材料层和相移层之间的湿蚀刻停止层以及具有用于确定照明波长的特定周期的光栅层, 其中两部分之间的差异是其上的相移层的存在,并且相移层的存在导致两部分之间的有效折射率差异,以便产生两个部分的布拉格波长之间的固定差异 部分。
    • 14. 发明申请
    • METHOD FOR ETCHING HIGH-ASPECT-RATIO FEATURES
    • 用于蚀刻高比特征特征的方法
    • US20120083128A1
    • 2012-04-05
    • US13079790
    • 2011-04-04
    • Yung-jr HungSan-liang Lee
    • Yung-jr HungSan-liang Lee
    • H01L21/3065
    • H01L21/3065
    • A method for etching high-aspect-ratio features is disclosed. The method is applicable in forming a nanoscale deep trench having a smooth and angle-adjustable sidewall. The method includes: forming a patterned photoresist layer on a surface of a silicon substrate for exposing a part of the silicon substrate; and supplying a process gas simultaneously containing sulfur hexafluoride (SF6) and fluorinated carbon composition into a chamber in which the substrate in positioned for carrying out a deep reactive ion etching operation to etch the part of the silicon substrate for forming the deep trench. The method forms a nanoscale deep trench with a high silicon-to-photoresist etching selectivity.
    • 公开了一种用于蚀刻高纵横比特征的方法。 该方法可用于形成具有光滑和角度可调侧壁的纳米级深沟槽。 该方法包括:在硅衬底的表面上形成图案化的光致抗蚀剂层,用于暴露一部分硅衬底; 以及将同时含有六氟化硫(SF 6)和氟化碳组合物的工艺气体供应到其中定位用于进行深反应离子蚀刻操作的衬底以蚀刻用于形成深沟槽的硅衬底的一部分的室中。 该方法形成具有高硅到光致抗蚀剂蚀刻选择性的纳米级深沟槽。
    • 17. 发明授权
    • Apparatus and method of non-sampling-based Q-factor measuring
    • 基于非抽样的Q因子测量装置和方法
    • US07576846B2
    • 2009-08-18
    • US11323676
    • 2005-12-30
    • San-Liang LeeChun-Liang YangDar-Zu Hsu
    • San-Liang LeeChun-Liang YangDar-Zu Hsu
    • G01N21/00
    • H04L1/20
    • A non-sampling-based Q-factor measuring apparatus and method use a power conversion module to transform the power variation of inputted optical signals in time domain into the variation in other domains, such as optical wavelength, optical polarization and different output ports of optical elements. Taking optical wavelength as an example, different levels of power variation respond different outputs of wavelength variation through the use of a power-to-wavelength conversion module. An optical filter then separates the inputted optical signals with different wavelengths. The power average of a wavelength for its corresponding optical signals is further calculated by a photo detector. Thereby, the information of the power variation for the inputted optical signals at levels 1 and 0 can be obtained, and the Q-factor for the inputted optical signals is easily measured.
    • 基于非采样的Q因子测量装置和方法使用功率转换模块来将时域中输入的光信号的功率变化变换成其他领域的变化,例如光学波长,光学偏振和光学不同的输出端口 元素。 以光波长为例,不同级别的功率变化通过使用功率到波长转换模块来响应波长变化的不同输出。 然后,滤光器将输入的不同波长的光信号分离。 通过光电检测器进一步计算其相应光信号的波长的功率平均值。 因此,可以获得在等级1和0的输入光信号的功率变化的信息,并且容易地测量输入的光信号的Q因子。
    • 19. 发明授权
    • Constructing method for an optical passive component
    • 光无源元件的构造方法
    • US06842253B2
    • 2005-01-11
    • US10442082
    • 2003-05-21
    • San-Liang LeeYen-Juei Lin
    • San-Liang LeeYen-Juei Lin
    • G02B6/12G01B9/02G02B6/26
    • G02B6/12007G02B2006/12097G02B2006/12107G02B2006/1215
    • The present invention relates to a constructing method and device for an optical passive component by using an improved structure of a Mach-Zehnder interferometer. This improved structure of the Mach-Zehnder interferometer is composed of two MMI beam splitters, a curved channel waveguide and a periodic segment waveguide for being separately used as the beam-splitting components, the curved arm and the straight arm of the Mach-Zehnder interferometer. In the inventive MMI beam splitter, a sub-area in the MMI waveguide is a periodic segment waveguide having a plurality of segments. By adjusting the number of the segments of the periodic segment waveguide in the MMI waveguide, the beam-splitting ratio of the MMI beam splitter can be arbitrarily adjusted. By adjusting the segment period and the duty cycle of the straight arm of the Mach-Zehnder interferometer, the required length of the straight arm can be efficiently shortened.
    • 本发明涉及通过使用马赫 - 曾德干涉仪的改进结构的光学无源部件的构造方法和装置。 马赫曾德尔干涉仪的这种改进的结构由两个MMI分束器,一个弯曲通道波导和一个周期性波导组成,分别用作分束分量,马赫 - 曾德干涉仪的弯臂和直臂 。 在本发明的MMI分束器中,MMI波导中的子区域是具有多个段的周期性段波导。 通过调整MMI波导中的周期性波导段的数量,可以任意调整MMI分束器的分束比。 通过调整马赫曾德尔干涉仪的直臂的段周期和占空比,可以有效地缩短直臂所需的长度。
    • 20. 发明授权
    • Methods and apparatus for wavelength measurement and tracking using a semiconductor laser amplifier
    • 使用半导体激光放大器进行波长测量和跟踪的方法和装置
    • US06243401B1
    • 2001-06-05
    • US09248198
    • 1999-02-10
    • San-Liang Lee
    • San-Liang Lee
    • H01S310
    • H01S5/0687H01S5/026H01S5/0264H01S5/50
    • This invention demonstrates the methods that use semiconductor laser amplifier (SLA) as a wavelength discriminator, as well as several apparatus designed using these methods. The functions of the invented apparatus include wavelength measurement, wavelength tracking, wavelength comparison, and wavelength stabilization and control of lasers. The key concept for which these methods and apparatus work is the variation of the transparent current of a SLA with the wavelength of an incident light. The transparent current of a SLA can be easily detected from the induced voltage across the diode junction when the incident light is intensity-modulated. The incident wavelength can be accurately determined by measuring the transparent current. These methods and apparatus are expected to be very useful in wavelength display for photonic instruments, wavelength control and wavelength registration for photonic networks, and wavelength stabilization for laser diodes. Since the SLA can be monolithically integrated with semiconductor lasers.
    • 本发明展示了使用半导体激光放大器(SLA)作为波长鉴别器的方法,以及使用这些方法设计的几种装置。 本发明的装置的功能包括波长测量,波长跟踪,波长比较,以及激光器的波长稳定和控制。 这些方法和装置工作的关键概念是SLA的透明电流与入射光的波长的变化。 当入射光被强度调制时,可以容易地从二极管结上的感应电压检测SLA的透明电流。 可以通过测量透明电流来准确地确定入射波长。 预计这些方法和装置在光子仪器的波长显示,光子网络的波长控制和波长配准以及激光二极管的波长稳定方面是非常有用的。 由于SLA可以与半导体激光器单片集成。