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11. 发明授权

US07754609B1 Cleaning processes for silicon carbide materials 有权
标题翻译：碳化硅材料清洗工艺
公开(公告)号：US07754609B1
公开(公告)日：2010-07-13
申请号：US10696394
申请日：2003-10-28
申请人： Samantha S. H. Tan
发明人： Samantha S. H. Tan
IPC分类号： B08B7/04
CPC分类号： B08B3/12 , B08B3/08 , B08B9/00 , B08B11/02 , C04B41/009 , C04B41/5353 , C04B41/91 , C11D11/007 , Y10S438/905 , Y10S438/906 , C04B35/565
摘要： The cleaning of silicon carbide materials on a large-scale is described. Certain silicon carbide materials in the form of wafer-lift pins, wafer-rings and/or wafer-showerheads are cleaned by using a combination of two of more of the following steps, comprising: high temperature oxidation, scrubbing, ultrasonic assisted etching in an aqueous acid solution, ultrasonication in deionized water, immersion in an aqueous acid solution, and high temperature baking. The silicon carbide materials may either be sintered or formed by chemical vapor deposition.
摘要翻译：描述了大量碳化硅材料的清洗。通过使用以下两个以上步骤的组合来清洁晶片升降销，晶圆环和/或晶片花洒形式的某些碳化硅材料，其包括：高温氧化，洗涤，超声波辅助蚀刻酸性水溶液，去离子水中超声波处理，浸渍在酸性水溶液中，并进行高温烘烤。碳化硅材料可以通过化学气相沉积来烧结或形成。

12. 发明授权

US5193404A Liquids sampler 失效
标题翻译：液体取样器
公开(公告)号：US5193404A
公开(公告)日：1993-03-16
申请号：US654316
申请日：1991-02-12
申请人： Samantha S. H. Tan
发明人： Samantha S. H. Tan
IPC分类号： B01L3/02 , G01N1/14
CPC分类号： B01L3/0203 , G01N1/14
摘要： An apparatus is set forth for removing a sample of a liquid for chemical analysis from a vessel containing the liquid and for delivering the sample into a sample bottle. The apparatus comprises a hollow member defining an enclosed plenum. A sample bottle attachment structure defines a passage communicating with the plenum and being adapted for attachment to a top portion of the sample bottle. A first partition structure blocks off the passage other than where it communicates with the plenum. A longitudinally extending sample transport tube extends through the passage and into the bottle. The transport tube passes through the first partition in substantially air-tight relation to it. The other end of the transport tube is positionable in the liquid being sampled.
摘要翻译：提出了一种装置，用于从容纳液体的容器中取出用于化学分析的液体样品，并将样品输送到样品瓶中。该装置包括限定封闭的通风室的中空构件。样品瓶附接结构限定与通气室连通的通道并适于附接到样品瓶的顶部。第一分隔结构阻止通道，而不是与通风室连通的通道。纵向延伸的样品输送管延伸穿过通道并进入瓶中。输送管以与其基本上气密的关系穿过第一分隔件。输送管的另一端可定位在被采样的液体中。

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