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11. 发明授权

US6072187A Apparatus and method for reducing stray laser light in particle sensors using a narrow band filter 失效
标题翻译：使用窄带滤波器减少粒子传感器中杂散激光的装置和方法
公开(公告)号：US6072187A
公开(公告)日：2000-06-06
申请号：US271311
申请日：1994-07-06
申请人： Peter G. Borden , James B. Stolz
发明人： Peter G. Borden , James B. Stolz
IPC分类号： G01N15/14 , G01N21/53 , G01N21/00
CPC分类号： G01N21/53
摘要： A dark-field particle monitor and a method for reducing errors due to stray light in the particle monitor provides a particle monitor having (i) an optical element focussed on the laser beam for detecting particles and (ii) a filter for preferentially selecting light incident on said filter in a preferential direction. In one embodiments the filter is implemented by a narrow band filter having maximum transmission for light having a wavelength of the laser beam.
摘要翻译：一种暗场粒子监测器和一种用于减少粒子监测器中由于杂散光引起的误差的方法，提供了一种粒子监测器，其具有（i）聚焦在激光束上的用于检测粒子的光学元件，（ii）用于优先选择光入射的滤光器在所述过滤器上以优先方向。在一个实施例中，滤波器由对具有激光束波长的光具有最大透射率的窄带滤波器来实现。

12. 发明授权

US5877860A System and method for measuring the microroughness of a surface of a substrate 失效
公开(公告)号：US5877860A
公开(公告)日：1999-03-02
申请号：US648231
申请日：1996-05-13
申请人： Peter G. Borden
发明人： Peter G. Borden
IPC分类号： G01B11/30 , G02F1/1333 , G11B5/84 , G01B11/24
CPC分类号： G01B11/303
摘要： A system for measuring an amount of microroughness of a surface of a substrate, wherein a first beam of electromagnetic radiation and a second beam of electromagnetic radiation are generated, the first and second beams being substantially parallel and spaced apart from each other so that the first and second beams are substantially non-overlapping, and the first and second beams are focused onto the substrate so that the beams impinge upon a selected area of the surface of the substrate having a surface contour, the surface contour of the substrate causing a scattering of both beams. The scattering of the first and second beams is detected, the amount of scattering corresponding to a microroughness value of the selected area of the substrate, and the microroughness value of the selected area of the substrate is determined from the amount of scattering of the first and second beams. The microroughness measuring system may also be used for controlling a fabrication process.

13. 发明授权

US5436465A Modular particle monitor for vacuum process equipment 失效
标题翻译：真空工艺设备的模块式颗粒监测仪
公开(公告)号：US5436465A
公开(公告)日：1995-07-25
申请号：US60904
申请日：1993-05-13
申请人： Peter G. Borden , Hung H. Quach , Derek G. Aqui
发明人： Peter G. Borden , Hung H. Quach , Derek G. Aqui
IPC分类号： G01N21/53 , G01N15/06
CPC分类号： G01N21/53
摘要： An apparatus and a method provide a modular design for a particle monitor of external design used in a vacuum process equipment. In one embodiment, the key elements, i.e. laser assembly, the detection module, the beam stop and a darkened surface opposite the detection module, can be independently mounted on a pump line. The particle monitors of the present invention can be mounted on both straight sections and bends of the pump line. Each key element can be accessed independently of other key elements for repair and service.
摘要翻译：一种设备和方法为真空处理设备中使用的外部设计的粒子监测器提供了模块化设计。在一个实施例中，关键元件，即激光组件，检测模块，光束挡块和与检测模块相对的变暗表面可以独立地安装在泵管线上。本发明的颗粒监测器可以安装在泵管的直线段和弯管上。每个关键元素可以独立于其他关键元素进行修复和维护。

14. 发明授权

US5424558A Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions 失效
标题翻译：响应于变化的工艺条件动态地调整颗粒传感器的装置和方法
公开(公告)号：US5424558A
公开(公告)日：1995-06-13
申请号：US62904
申请日：1993-05-17
申请人： Peter G. Borden , James Stolz
发明人： Peter G. Borden , James Stolz
IPC分类号： G01N21/53 , H03G5/04 , G01N15/06
CPC分类号： G01N15/1425 , G01N21/53 , H03G5/04
摘要： A method and an apparatus allow dynamic tuning of a particle sensor. The particle sensor provides output signals indicating particle detection to a controller, which includes an amplifier whose bandwidth and gain can be adjusted. The bandwidth and the gain of the amplifier are adjusted in accordance with predetermined optimal performance levels under the varying process conditions in which the particle sensor is placed. The optimal signal-to-noise ratio is maintained by adjusting the bandwidth and the gain according to both expected particle velocities and whether a plasma glow is present in the exhaust line for carrying gasses out of a process chamber.
摘要翻译：一种方法和装置允许对粒子传感器进行动态调谐。粒子传感器向控制器提供指示粒子检测的输出信号，该控制器包括可调整其带宽和增益的放大器。在放置粒子传感器的变化过程条件下，根据预定的最佳性能水平来调节放大器的带宽和增益。通过根据预期的粒子速度调节带宽和增益以及排气管线中是否存在等离子体发光以将气体输送出处理室来维持最佳信噪比。

15. 发明授权

US5212580A Low cost stage for raster scanning of semiconductor wafers 失效
标题翻译：用于半导体晶片光栅扫描的低成本阶段
公开(公告)号：US5212580A
公开(公告)日：1993-05-18
申请号：US836039
申请日：1992-02-12
申请人： George L. Coad , James B. Stolz , Yung C. Lee , Ron B. Whitney , Peter G. Borden , Mark A. Nokes
发明人： George L. Coad , James B. Stolz , Yung C. Lee , Ron B. Whitney , Peter G. Borden , Mark A. Nokes
IPC分类号： G02B21/00 , G02B21/26 , H01J37/20
CPC分类号： G02B21/002 , G02B21/26 , H01J37/20 , H01J2237/20228 , H01J2237/20264 , H01J2237/20292
摘要： A raster scan apparatus provides a scanning assembly capable of moving in a sinusoidal motion along a first direction and stepping in fine steps in a second direction perpendicular to the first direction. In one embodiment, a piezoelectric bimorph sets in scanning motion a scanning assembly formed by a wafer holder and leaf springs. The amplitude of the scanning motion is controlled by a voltage applied across the piezoelectric bimorph. A Hall effect sensor provides an output signal indicating the instantaneous location of the scanning assembly in motion. The output signal of the Hall effect sensor is compared against a predetermined threshold to provide a trigger signal for synchronization. The output signal of the Hall effect sensor is also fed back to the source of sinusoidal voltage to adaptively adjust the sinusoidal voltage so as to achieve a predetermined amplitude for the scanning motion.
摘要翻译：光栅扫描装置提供能够沿着第一方向以正弦运动移动的扫描组件，并且在垂直于第一方向的第二方向上以微细的步骤步进。在一个实施例中，压电双压电晶片将由晶片保持器和板簧形成的扫描组件进行扫描运动。扫描运动的幅度由施加在压电双压电晶片上的电压控制。霍尔效应传感器提供指示扫描组件在运动中的瞬时位置的输出信号。将霍尔效应传感器的输出信号与预定阈值进行比较，以提供用于同步的触发信号。霍尔效应传感器的输出信号也反馈到正弦电压源，以自适应地调节正弦电压，以达到扫描运动的预定幅度。

16. 发明授权

US4967075A Velocity monitoring method and apparatus 失效
标题翻译：速度监测方法及装置
公开(公告)号：US4967075A
公开(公告)日：1990-10-30
申请号：US186685
申请日：1988-04-21
申请人： Peter G. Borden
发明人： Peter G. Borden
IPC分类号： H01L21/00 , H01L21/68
CPC分类号： H01L21/67253 , H01L21/681
摘要： A velocity measuring system useful for monitoring repetitive bidirectional movements of a carrier, which supports workpieces in production, initially stores the values of a number of velocities representative of normal operation to establish a normal velocity range, and then compares the values of subsequent carrier velocities to the normal range. A continuing deviation from the normal range is indicative of defective actuator operation, allowing repair or replacement prior to hard failure and serious disruption of the production line.
摘要翻译：用于监测承载件的重复双向运动的速度测量系统，其支持生产中的工件，其初始地存储表示正常操作的多个速度的值以建立正常速度范围，然后将后续载体速度的值与正常范围。与正常范围的持续偏差表示执行器操作不良，允许在硬故障之前进行修理或更换，并严重破坏生产线。

17. 发明授权

US4812664A Apparatus for scanning a flat surface to detect defects 失效
标题翻译：用于扫描平坦表面以检测缺陷的装置
公开(公告)号：US4812664A
公开(公告)日：1989-03-14
申请号：US119762
申请日：1987-11-12
申请人： Peter G. Borden
发明人： Peter G. Borden
IPC分类号： G01N21/88 , G01N21/95
CPC分类号： G01N21/9501
摘要： A surface scanner useful for detecting defects on the surface of a water that is being processed in a vacuum equipment employs a light beam that scans the wafer surface in an arc. The scanning light beam impinges on the wafer surface at a low angle of incidence which permits the beam to pass under photosensing elements disposed in an arcuate array substantially congruous with the arc defined by the scanning light beam. The photosensing elements are patterned close to the wafer surface to receive light scattered by defects on the wafer surface.
摘要翻译：用于检测在真空设备中正在处理的水表面上的缺陷的表面扫描器采用以弧形扫描晶片表面的光束。扫描光束以低入射角照射在晶片表面上，这允许光束通过设置在与由扫描光束限定的弧形基本上一致的弓形阵列的光敏元件下面。光敏元件被图案化成靠近晶片表面以接收由晶片表面上的缺陷散射的光。

18. 发明申请

US20130063929A1 HANDS-FREE VISION AID 有权
标题翻译：无障碍的视觉援助
公开(公告)号：US20130063929A1
公开(公告)日：2013-03-14
申请号：US13410189
申请日：2012-03-01
申请人： Peter G. Borden , Peter H. Muller
发明人： Peter G. Borden , Peter H. Muller
IPC分类号： G02C11/04 , F21L4/02
CPC分类号： G02C11/04
摘要： Described herein are hands-free vision aids that may be used for low-vision reading. These vision aids may be beneficial for individuals with low-vision disorders such as age-related macular degeneration, retinitis pigmentosa, and other visual disorders. The vision aids described here comprise an optical system with one or more light sources configured to provide a rectangular field of illumination with high illuminance levels bounded by high contrast perimeter. Such an illumination field greatly illuminates a targeted viewing region while reducing glare that arises from illuminating peripheral regions. Some vision aids use green light with high illuminance values for improving visual acuity and comfort for long-duration reading. The optical system of a vision aid may be configured to fit onto and/or integrate with eyeglass frames.
摘要翻译：这里描述的是可以用于低视力阅读的免提视力辅助器。这些视力援助对于具有低视力障碍的个体，如年龄相关性黄斑变性，色素性视网膜炎和其他视觉障碍可能是有益的。这里描述的视觉辅助设备包括具有一个或多个光源的光学系统，其被配置为提供具有由高对比度周界限定的高照度水平的矩形照明场。这样的照明领域大大地照亮目标观看区域，同时减少由照射周边区域引起的眩光。一些视力辅助工具使用具有高照度值的绿灯，以提高长时间阅读的视力和舒适度。视力辅助装置的光学系统可以被配置成装配在眼镜框架上和/或与眼镜框架整合。

19. 发明申请

US20110162706A1 PASSIVATED POLYSILICON EMITTER SOLAR CELL AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：被分解的多晶硅发射体太阳能电池及其制造方法
公开(公告)号：US20110162706A1
公开(公告)日：2011-07-07
申请号：US12983846
申请日：2011-01-03
申请人： Peter G. Borden , Li Xu , Tristan R. Holtam , Vinay K. Shah
发明人： Peter G. Borden , Li Xu , Tristan R. Holtam , Vinay K. Shah
IPC分类号： H01L31/0216 , H01L31/18
CPC分类号： H01L31/03682 , H01L31/03921 , H01L31/068 , H01L31/182 , H01L31/1864 , H01L31/1868 , Y02E10/546 , Y02E10/547 , Y02P70/521
摘要： A method for manufacturing a polysilicon emitter solar cell with a passivating layer over its polysilicon emitter layer is disclosed. The method includes steps of preparing a substrate, forming a first polysilicon layer over the substrate, and forming a first passivating layer over the first polysilicon layer. Another embodiment of the present invention discloses a solar cell apparatus. The solar cell apparatus includes a substrate, a first polysilicon layer over the substrate, and a first passivating layer on first polysilicon layer.
摘要翻译：公开了一种在其多晶硅发射极层上制造具有钝化层的多晶硅发射极太阳能电池的方法。该方法包括制备衬底，在衬底上形成第一多晶硅层，以及在第一多晶硅层上形成第一钝化层的步骤。本发明的另一实施例公开了一种太阳能电池装置。太阳能电池装置包括衬底，衬底上的第一多晶硅层和第一多晶硅层上的第一钝化层。

20. 发明申请

US20100326797A1 CARRIER FOR TRANSPORTING SOLAR CELL SUBSTRATES 审中-公开
标题翻译：用于运输太阳能电池基板的载体
公开(公告)号：US20100326797A1
公开(公告)日：2010-12-30
申请号：US12766263
申请日：2010-04-23
申请人： Peter G. Borden
发明人： Peter G. Borden
IPC分类号： B65G17/00 , B65H1/00
CPC分类号： B65G15/42 , H01L21/67706 , H01L21/67721
摘要： A carrier for transporting a plurality of solar cell substrates comprising a peripheral frame defined by a pair of side members connected by first and second complementary end members, a plurality of cross struts, a plurality of standoffs for supporting the substrates, and at least one drive member coupled to one of the end members. The end members have alternating bends that provide a wave-like pattern of projections and indentations, are arranged in a spaced and substantially parallel orientation, and are constructed from metal wire. Each cross strut is connected to the first end member and the second end member between complementary projections and indentations. Rotation of the drive member causes both end members to rotate in a circular motion.
摘要翻译：一种用于传送多个太阳能电池基板的载体，包括由由第一和第二互补端部构件连接的一对侧构件限定的外围框架，多个横向支柱，用于支撑基板的多个支座，以及至少一个驱动成员与其中一个终端成员相连。端部构件具有交替的弯曲，其提供波浪状图案的突出和凹陷，以间隔且基本上平行的方向布置，并且由金属线构成。每个交叉支柱连接到第一端构件和第二端构件之间的互补突起和凹槽之间。驱动构件的旋转导致两个端部构件以圆周运动旋转。

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