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    • 12. 发明授权
    • Getter on die in an upper sense plate designed system
    • 吸气器在上感板设计系统中死亡
    • US07800190B2
    • 2010-09-21
    • US12140006
    • 2008-06-16
    • Bryan SeppalaJon DCampMax Glenn
    • Bryan SeppalaJon DCampMax Glenn
    • G01L9/04
    • B81B7/0038H01L2224/05554H01L2224/16225H01L2224/49171H01L2924/16195Y10T29/49002
    • A microelectromechanical system (MEMS) hermetically sealed package device that is less labor intensive to construct and thus less expensive to manufacture. An example package device includes a package having a bottom section and a lid. A MEMS die includes upper and lower plates made in accordance with upper sense plate design. The MEMS die is mounted to the bottom section. The upper and lower plates form a cavity that receives a MEMS device. The upper and lower plates are bonded by one or more bond pads and a seal ring that surrounds the cavity. The seal ring includes grooves that allow exposure of the cavity to the space within the package. A getter material applied to a top surface of the MEMS die on the upper plate. The getter material is activated during or after the lid is mounted to the bottom section.
    • 微机电系统(MEMS)密封封装装置,其制造费用较低,因此制造成本较低。 示例性包装装置包括具有底部部分和盖子的包装。 MEMS模具包括根据上感测板设计制成的上板和下板。 MEMS管芯安装在底部。 上板和下板形成接收MEMS装置的空腔。 上板和下板通过一个或多个接合垫和围绕腔的密封环粘合。 密封环包括允许腔体暴露于包装内的空间的凹槽。 将吸气剂材料施加到上板上的MEMS管芯的顶表面。 吸气剂材料在盖被安装到底部部分期间或之后被激活。
    • 17. 发明授权
    • Multistage proof-mass movement deceleration within MEMS structures
    • MEMS结构内的多级防爆质量运动减速
    • US08011247B2
    • 2011-09-06
    • US12147354
    • 2008-06-26
    • Max Glenn
    • Max Glenn
    • G01C19/00
    • G01C19/5719B81B3/0051B81B2201/0235
    • A micro-electromechanical systems (MEMS) device includes a substrate comprising at least one anchor, a proof mass having first and second deceleration extensions extending therefrom, a motor drive comb, a motor sense comb, a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb. The suspensions are anchored to the substrate. A body is attached to the substrate. At least one deceleration beam extends from a first side of said body. The at least one deceleration beam is configured to engage at least one of the first and second deceleration extensions and slow or stop the proof mass before the proof mass contacts the motor drive comb and the motor sense comb.
    • 微机电系统(MEMS)装置包括:基板,包括至少一个锚固件,具有从其延伸的第一和第二减速延伸部的检验质量块,马达传动梳,马达感应梳,多个悬架, 在电机驱动梳和马达感应梳之间。 悬浮液固定在基材上。 身体附着在基底上。 至少一个减速梁从所述主体的第一侧延伸。 所述至少一个减速梁被配置为接合所述第一和第二减速延伸部中的至少一个,并且在所述检测质量接触所述电动机驱动梳和所述电动机感测梳之前减慢或停止所述质量块。
    • 18. 发明申请
    • MULTISTAGE PROOF-MASS MOVEMENT DECELERATION WITHIN MEMS STRUCTURES
    • 微机械结构中的多级保护质量运动减速
    • US20090320592A1
    • 2009-12-31
    • US12147354
    • 2008-06-26
    • Max Glenn
    • Max Glenn
    • G01C19/56
    • G01C19/5719B81B3/0051B81B2201/0235
    • A micro-electromechanical systems (MEMS) device includes a substrate comprising at least one anchor, a proof mass having first and second deceleration extensions extending therefrom, a motor drive comb, a motor sense comb, a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb. The suspensions are anchored to the substrate. A body is attached to the substrate. At least one deceleration beam extends from a first side of said body. The at least one deceleration beam is configured to engage at least one of the first and second deceleration extensions and slow or stop the proof mass before the proof mass contacts the motor drive comb and the motor sense comb.
    • 微机电系统(MEMS)装置包括:基板,包括至少一个锚固件,具有从其延伸的第一和第二减速延伸部的检验质量块,马达驱动梳,马达感应梳,多个悬架, 在电机驱动梳和马达感应梳之间。 悬浮液固定在基材上。 身体附着在基底上。 至少一个减速梁从所述主体的第一侧延伸。 所述至少一个减速梁被配置为接合所述第一和第二减速延伸部中的至少一个,并且在所述检测质量接触所述电动机驱动梳和所述电动机感测梳之前减慢或停止所述质量块。