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11. 发明申请

US20130255782A1 SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZONE GAS FEEDS 有权
标题翻译：使用多区气体饲料的等离子体加工室中的共用气体面板
公开(公告)号：US20130255782A1
公开(公告)日：2013-10-03
申请号：US13549344
申请日：2012-07-13
申请人： Iqbal Shareef , Piyush Agarwal , Evangelos Spyropoulos , Mark Taskar
发明人： Iqbal Shareef , Piyush Agarwal , Evangelos Spyropoulos , Mark Taskar
IPC分类号： F17D1/00
CPC分类号： F17D1/00 , F17C1/00 , F17C2270/0518 , Y10T137/0318 , Y10T137/87249
摘要： Apparatus and methods for sharing a gas panel among a plurality of multi-zone gas feed chambers of a plasma processing chamber. Each multi-zone gas feed chamber is provided with its own multi-zone gas feed device to adjustably split the incoming gas flow into each chamber and provide the different gas flows to different zones of the multi-zone gas feed chamber.
摘要翻译：在等离子体处理室的多个多区域气体供给室中共享气体面板的装置和方法。每个多区气体进料室设置有其自己的多区气体进料装置，以将进入的气流可调节地分流到每个室中，并且将不同的气流提供给多区气体进料室的不同区域。

12. 发明申请

US20130255781A1 SHARED GAS PANELS IN PLASMA PROCESSING SYSTEMS 有权
标题翻译：等离子体加工系统中的共用气体面板
公开(公告)号：US20130255781A1
公开(公告)日：2013-10-03
申请号：US13431946
申请日：2012-03-27
申请人： Mark Taskar , Iqbal Shareef
发明人： Mark Taskar , Iqbal Shareef
IPC分类号： B01F5/04
CPC分类号： B01F3/026 , Y10T137/0318 , Y10T137/87249 , Y10T137/87281 , Y10T137/87652 , Y10T137/87885
摘要： Methods and apparatus for shared gas panel for supplying a process gas to a plurality of process modules are disclosed. The shared gas panel includes a plurality of mixing valves and at least two mixing manifolds for a given mixing valve to service at least two process modules. The mixing manifolds are disposed on a given plane and staggered to save space. Components of the shared gas panel are also stacked vertically in order to reduce volume of the shared gas panel enclosure. Components are optimized such that the two mixing manifolds coupled to the given mixing valve receive equal mass flow to eliminate matching issues.
摘要翻译：公开了用于向多个处理模块提供处理气体的共用气体面板的方法和装置。共用气体面板包括多个混合阀和用于给定混合阀的至少两个混合歧管，以用于至少两个过程模块。混合歧管布置在给定的平面上并交错以节省空间。共用气体面板的组件也垂直堆叠，以减少共用气体面板外壳的体积。优化组件使得耦合到给定混合阀的两个混合歧管获得相等的质量流量以消除匹配问题。

13. 发明申请

US20120153197A1 OPTIMIZED ACTIVATION PREVENTION MECHANISM FOR A GAS DELIVERY SYSTEM 有权
标题翻译：用于气体输送系统的优化预防机制
公开(公告)号：US20120153197A1
公开(公告)日：2012-06-21
申请号：US13338175
申请日：2011-12-27
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： A mechanism for implementing at least one of activation and deactivation of a gas valve that is coupled to an input manifold of a processing chamber is provided. The mechanism includes a toggle arm disposed in one of a toggle activation position and a toggle deactivation position. The mechanism also includes a toggle operated switch coupled to the toggle arm and the gas valve. The toggle operated switch is disposed on top of the gas valve and the toggle arm is disposed on top of the toggle operated switch so as to minimize a footprint of an assembly that comprises the gas valve, the toggle operated switch, and the toggle arm. Thus, the process gas flow flows through the gas valve when the toggle arm is in the toggle activation position and is inhibited from flowing into the gas valve when the toggle arm is in the toggle deactivation position.
摘要翻译：提供一种用于实现联接到处理室的输入歧管的气阀的激活和去激活中的至少一个的机构。该机构包括设置在肘节启动位置和肘节失活位置之一中的肘节臂。该机构还包括联接到肘节臂和气阀的拨动操作开关。拨动操作的开关设置在气阀的顶部，并且肘节臂设置在肘节操作的开关的顶部上，以便最小化包括气阀，肘节操作的开关和肘节臂的组件的占地面积。因此，当肘节臂处于肘节启动位置时，处理气体流动通过气体阀，并且当肘节臂处于肘节失活位置时，该气体流被阻止流入气体阀。

14. 发明授权

US08122910B2 Flexible manifold for integrated gas system gas panels 有权
标题翻译：集成气体系统气体面板的柔性歧管
公开(公告)号：US08122910B2
公开(公告)日：2012-02-28
申请号：US12873189
申请日：2010-08-31
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K11/10
CPC分类号： F16K27/003 , Y10T137/87249 , Y10T137/87885
摘要： A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.
摘要翻译：一种具有气体面板的柔性气体输送装置，其具有第一部分和第二部分，所述第一延伸部分具有第一部分和第二部分，所述第一部分位于混合阀和所述基底之间，所述第一部分具有与泵/清洗歧管流体连通的出口，延伸块具有第一部分和第二部分，所述第一部分位于清洗阀和所述基板之间，所述基板具有与混合歧管流体连通的排出口，其中所述第一和第二延伸块的第二部分从气体向外延伸面板。

15. 发明申请

US20100326554A1 FLEXIBLE MANIFOLD FOR INTEGRATED GAS SYSTEM GAS PANELS 有权
标题翻译：用于集成气体系统气体面板的柔性歧管
公开(公告)号：US20100326554A1
公开(公告)日：2010-12-30
申请号：US12873189
申请日：2010-08-31
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F17D1/04
CPC分类号： F16K27/003 , Y10T137/87249 , Y10T137/87885
摘要： A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.
摘要翻译：一种具有气体面板的柔性气体输送装置，其具有第一部分和第二部分，所述第一延伸部分具有第一部分和第二部分，所述第一部分位于混合阀和所述基底之间，所述第一部分具有与泵/清洗歧管流体连通的出口，延伸块具有第一部分和第二部分，所述第一部分位于清洗阀和所述基板之间，所述基板具有与混合歧管流体连通的排出口，其中所述第一和第二延伸块的第二部分从气体向外延伸面板。

16. 发明授权

US07806143B2 Flexible manifold for integrated gas system gas panels 有权
标题翻译：集成气体系统气体面板的柔性歧管
公开(公告)号：US07806143B2
公开(公告)日：2010-10-05
申请号：US11761326
申请日：2007-06-11
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K11/10
CPC分类号： F16K27/003 , Y10T137/87249 , Y10T137/87885
摘要： A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.
摘要翻译：一种具有气体面板的柔性气体输送装置，其具有第一部分和第二部分，所述第一延伸部分具有第一部分和第二部分，所述第一部分位于混合阀和所述基底之间，所述第一部分具有与泵/清洗歧管流体连通的出口，延伸块具有第一部分和第二部分，所述第一部分位于清洗阀和所述基板之间，所述基板具有与混合歧管流体连通的排出口，其中所述第一和第二延伸块的第二部分从气体向外延伸面板。

17. 发明授权

US07784496B2 Triple valve inlet assembly 有权
标题翻译：三通阀入口总成
公开(公告)号：US07784496B2
公开(公告)日：2010-08-31
申请号：US11761244
申请日：2007-06-11
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K11/10
CPC分类号： F16K27/003 , Y10T137/877 , Y10T137/87885
摘要： A gas delivery apparatus having a manifold block configured to create a fluid flow path, a horizontal inlet port coupled to the manifold block at a first side in fluid communication with the fluid flow path and configured to receive a supply gas, a pneumatic valve coupled to the manifold block at a first end configured to prevent unauthorized activation of fluid flow, the pneumatic valve in fluid communication with the fluid flow path and horizontal inlet port, a purge valve coupled to the manifold block in fluid communication with the fluid flow path positioned adjacent the pneumatic valve, and a vertical purge port coupled to the manifold block at a first end, the vertical purge port positioned between the purge valve and the pneumatic valve and having a purge gas input/output connection at a second end, wherein the horizontal inlet port is positioned perpendicular to the vertical purge port.
摘要翻译：一种气体输送装置，其具有被配置为产生流体流动路径的歧管块，在第一侧与流体连通的第一侧连接到歧管块的水平入口端口，并且被配置为接收供应气体，气动阀连接到所述歧管块在第一端被构造成防止流体流动的未经授权的激活，所述气动阀与所述流体流动路径和水平入口端口流体连通;联接到所述歧管块的净化阀，其与邻近的流体流动路径流体连通所述气动阀和在第一端处联接到所述歧管块的垂直吹扫端口，所述垂直吹扫端口位于所述吹扫阀和所述气动阀之间，并且在第二端具有吹扫气体输入/输出连接，其中所述水平入口端口垂直于垂直吹扫口定位。

18. 发明授权

US07628168B2 Optimized activation prevention assembly for a gas delivery system and methods therefor 有权
标题翻译：用于气体输送系统的优化的激活预防组件及其方法
公开(公告)号：US07628168B2
公开(公告)日：2009-12-08
申请号：US11165858
申请日：2005-06-24
申请人： Mark Taskar
发明人： Mark Taskar
IPC分类号： F16K35/00
CPC分类号： F16K35/06 , Y10T70/5637 , Y10T137/0491 , Y10T137/7069
摘要： An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.
摘要翻译：公开了一种用于气体输送系统的优化的激活预防组件。该装置包括气动阀组件。该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能机制。

19. 发明申请

US20090095354A1 UNIVERSAL FLUID FLOW ADAPTOR 有权
标题翻译：通用流体流量适配器
公开(公告)号：US20090095354A1
公开(公告)日：2009-04-16
申请号：US12245671
申请日：2008-10-03
申请人： Mark TASKAR
发明人： Mark TASKAR
IPC分类号： F16L41/00
CPC分类号： F16L41/03 , Y10T137/0402 , Y10T137/85938 , Y10T137/87885
摘要： A universal fluid flow adaptor may be formed of a single structure having a plurality of vertical conduits to receive a gas flow, the plurality of vertical conduits extending through the single structure from the top surface to the bottom surface, a plurality of horizontal conduits to receive a gas flow, the plurality of horizontal conduits extending through the first side, the second side, the first end, and the second end at an interior of the single structure, wherein one or more of the plurality of vertical conduits converge with at least one of the plurality of horizontal conduits at the interior of the single structure, and wherein one or more of the plurality of horizontal conduits converge to form at least one cross-shaped conduit at the interior of the single structure.
摘要翻译：通用流体流动适配器可以由具有多个垂直导管以接收气流的单个结构形成，所述多个垂直导管从顶表面延伸到底表面，多个垂直导管从多个水平导管接收气流，所述多个水平管道在单个结构的内部延伸穿过第一侧，第二侧，第一端和第二端，其中多个垂直导管中的一个或多个与至少一个所述多个水平管道在所述单个结构的内部，并且其中所述多个水平管道中的一个或多个会聚以在所述单个结构的内部形成至少一个十字形导管。

20. 发明授权

US10002747B2 Methods and apparatus for supplying process gas in a plasma processing system 有权
公开(公告)号：US10002747B2
公开(公告)日：2018-06-19
申请号：US13431950
申请日：2012-03-27
申请人： Iqbal Shareef , Evangelos Spyropoulos , Mark Taskar
发明人： Iqbal Shareef , Evangelos Spyropoulos , Mark Taskar
IPC分类号： C23C16/455 , C23C16/52 , H01J37/32
CPC分类号： H01J37/3244 , C23C16/455 , C23C16/52 , H01J37/32899
摘要： Methods and apparatus for supplying gas in a plasma processing system that employs the single line drop approach wherein a regulator is shared among multiple mass flow controllers. In one or more embodiments, an accumulator is provided and coupled in gaseous communication with a shared manifold to reduce pressure spikes and dips. A filter, which may be replaceable or non-replaceable separate from the accumulator, is integrated with the accumulator in one or more embodiments.

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