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    • 12. 发明授权
    • Moving head, coating apparatus
    • 摇头,涂装机
    • US07169229B2
    • 2007-01-30
    • US10364537
    • 2003-02-11
    • Gregory M. GibsonCarl W. NewquistJohn E. HawesRene SolizSamer Mahmoud KabbaniScott A. SnodgrassAltaf A. PoonawalaDarwin R. FrerkingZi-Qin WangOcie T. SnodgrassEric E. Anderson
    • Gregory M. GibsonCarl W. NewquistJohn E. HawesRene SolizSamer Mahmoud KabbaniScott A. SnodgrassAltaf A. PoonawalaDarwin R. FrerkingZi-Qin WangOcie T. SnodgrassEric E. Anderson
    • B05C3/02
    • B05C13/00B05C5/0245B05C5/0254B05C11/1013B05C11/1015
    • The invention pertains to a coating apparatus and method in which most of the relative movement between a dispensing head and the substrate to be coated is provided by the coating head. The moving head configuration reduces the system footprint and diminishes leveling problems. A powered shuttle mechanism carries a dispensing head above a substrate to be coated while riding on a bearing located underneath the chuck holding the substrate thereby providing rigidity and reducing the system footprint. Chuck support is designed to accommodate anticipated vertical sag in the dispensing head by supporting the chuck at points along its periphery thereby permitting the chuck to sag in conjunction with the dispensing head. The shuttle mechanism is equipped with means for automatically adjusting the height of the dispensing head with respect to substrate to compensate for substrate placement error, substrate dimensional variation, and mechanical drift in the mechanical machine parts. Coating consistency is enhanced using such height adjustment. A part of the apparatus containing the fluid delivery equipment and in communication with the dispensing head may be placed on a cart and removably attached to the rest of the apparatus. There is a utility station comprising equipment for cleaning and priming the dispensing head which may be located on the removable cart. A pump in addition to main remote pumping means may be integrally mounted on the dispensing head to more precisely control fluid flow to the dispensing head. The chuck may be configured to be micro deformable so as to maintain the surface of a substrate upon it at a constant height. Fluid may be dispensed along openings of selected lengths along the length of the dispensing head using die lips attached to the dispensing head or by cutting a plurality of slots in a single dispensing head.
    • 本发明涉及一种涂布装置和方法,其中分配头与要涂覆的基底之间的大部分相对运动由涂覆头提供。 移动头配置减少了系统占用空间并减少了调平问题。 动力穿梭机构在被涂覆的基底上方运送分配头,同时骑在位于夹持基底的卡盘下方的轴承上,从而提供刚性并减少系统占地面积。 卡盘支撑件设计成通过在其周边的点处支撑卡盘来适应分配头部中的预期垂直松弛,从而允许卡盘与分配头一起下垂。 穿梭机构配备有用于自动调节分配头相对于基底的高度以补偿机械机器部件中的基板放置误差,基板尺寸变化和机械漂移的装置。 使用这种高度调节可提高涂层的一致性。 包含流体输送设备并与分配头连通的装置的一部分可以放置在推车上并且可移除地附接到装置的其余部分上。 有一个实用工作站,包括用于清洁和启动分配头的设备,该分配头可以位于可移动的推车上。 除了主远程泵送装置之外的泵可以一体地安装在分配头上,以更精确地控制流到分配头的流体。 卡盘可以被配置为可微变形的,以便将基板的表面保持在恒定的高度。 可以使用附接到分配头的模唇或通过在单个分配头中切割多个狭槽沿着分配头的长度沿着选定长度的开口分配流体。