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11. 发明申请

US20160086765A1 ELECTRON DETECTION SYSTEM 有权
标题翻译：电子检测系统
公开(公告)号：US20160086765A1
公开(公告)日：2016-03-24
申请号：US14859391
申请日：2015-09-21
申请人： EL-MUL TECHNOLOGIES LTD.
发明人： ELI CHEIFETZ , AMIT WEINGARTEN , SEMYON SHOFMAN
IPC分类号： H01J37/147 , H01J37/08 , H01J37/285
CPC分类号： H01J37/1472 , H01J37/08 , H01J37/244 , H01J37/285 , H01J37/317 , H01J2237/15 , H01J2237/2448 , H01J2237/2806 , H01J2237/31749
摘要： An electron detection system for detecting secondary electrons emitted from a sample irradiated by a Focused Ion Beam (FIB). The FIB emanates from a FIB column and travels along a beam axis within a beam region, which extends from the FIB column to the sample. The system comprises an electron detector configured for detecting the secondary electrons, and a deflecting field configured to deflect a trajectory of the secondary electrons, which were propagating towards the FIB column, to propel away from the beam axis and towards the electron detector. The deflecting field may be configured to divert the trajectory of secondary electrons while the secondary electrons are generally within the beam region.
摘要翻译：一种用于检测由聚焦离子束（FIB）照射的样品发射的二次电子的电子检测系统。 FIB从FIB柱发出并沿着从FIB柱延伸到样品的束区域内的波束轴行进。该系统包括被配置用于检测二次电子的电子检测器和被配置为偏转朝向FIB列传播的二次电子的轨迹的偏转场，以推动远离光束轴线并朝向电子检测器。偏转场可以被配置为转移二次电子的轨迹，而二次电子通常在光束区域内。

12. 发明申请

US20150034822A1 POSITION SENSITIVE STEM DETECTOR 有权
标题翻译：位置敏感干扰检测器
公开(公告)号：US20150034822A1
公开(公告)日：2015-02-05
申请号：US14378098
申请日：2013-02-12
申请人： EL-MUL TECHNOLOGIES LTD.
发明人： Silviu Reinhorn , Eli Cheifetz , Amit Weingarten
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N23/04 , H01J37/244 , H01J2237/221 , H01J2237/2443 , H01J2237/2445 , H01J2237/2446 , H01J2237/26 , H01J2237/2802 , H01J2237/2806
摘要： A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.
摘要翻译：公开了一种STEM系统，其中使用成像系统将HAADF检测器的电子散射图形平面成像到二维阵列检测器上。数据采集系统存储和处理来自二维阵列检测器的数据。对于STEM的每个照明像素，生成和存储一帧数据每帧包括所有散射角的数据，并且可以在扫描之后的任何时间实时或离线分析。公开了一种通过检测从样品散射的电子并产生多个对应信号来检测从样品发射的电子的方法，每个信号指示散射电子的散射角; 产生多个信号组，每个信号组是用户选择的散射角的信号的集合。

13. 发明授权

US11493383B2 Magnetic photomultiplier tube system 有权
公开(公告)号：US11493383B2
公开(公告)日：2022-11-08
申请号：US16792263
申请日：2020-02-16
申请人： EL-MUL TECHNOLOGIES LTD.
发明人： Semyon Shofman , Alexander Kadyshevitch
IPC分类号： G01J1/44 , H01J43/14 , H01J49/02 , H01J43/18
摘要： A magnetic photomultiplier tube (PMT) system, including a PMT. The PMT including a photocathode for converting an impinging photon to a photoelectron, an anode, and at least two or a series of oppositely facing pairs of dynodes, wherein each pair is spaced apart from an adjacent pair, a first electric field being generated intermediate at least one pair of oppositely facing dynodes and a second electric field generated intermediate at least one adjacent pairs of dynodes. The PMT system includes a magnetic field generated by a magnetic system, the PMT being positioned within the magnetic field.

14. 发明申请

US20200312609A1 CHARGED PARTICLE DETECTION SYSTEM 审中-公开
公开(公告)号：US20200312609A1
公开(公告)日：2020-10-01
申请号：US16810879
申请日：2020-03-06
申请人： EL-MUL TECHNOLOGIES LTD
发明人： Dmitry SHUR , Eli CHEIFETZ , Armin SCHON
IPC分类号： H01J37/244 , G02B27/10 , H01J37/22 , H01J37/05
摘要： A scintillator assembly including an entrance surface for receiving charged particles into the scintillator assembly, the charged particles including first charged particles at a first energy level and second charged particles at a second energy level. A first scintillator structure configured for receiving the first charged particles and generating a corresponding first signal formed of first photons with a first wavelength of λ1, a second scintillator structure configured for receiving the second charged particles and generating a corresponding second signal of second photons with a second wavelength of λ2, and an emitting surface for egress of a combined signal from the scintillator assembly, the combined signal including the first and second photons, and at least one beam splitter for receiving the combined signal and separating the combined signal to first and second photons.

15. 发明申请

US20200264042A1 MAGNETIC PHOTOMULTIPLIER TUBE 审中-公开
公开(公告)号：US20200264042A1
公开(公告)日：2020-08-20
申请号：US16792263
申请日：2020-02-16
申请人： EL-MUL TECHNOLOGIES LTD.
发明人： Semyon SHOFMAN , Alexander KADYSHEVITCH
IPC分类号： G01J1/44 , H01J49/02 , H01J43/18 , H01J43/14
摘要： A magnetic photomultiplier tube (PMT) system, comprising a PMT. The PMT comprising a photocathode for converting an impinging photon to a photoelectron, an anode, and at least two or a series of oppositely facing pairs of dynodes, wherein each pair is spaced apart from an adjacent pair, a first electric field being generated intermediate at least one pair of oppositely facing dynodes and a second electric field generated intermediate at least one adjacent pairs of dynodes. The PMT system comprises a magnetic field generated by a magnetic system, the PMT being positioned within the magnetic field.

16. 发明申请

US20040217297A1 Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope 有权
标题翻译：使用扫描电子显微镜在非真空环境下检测样品的装置和方法
公开(公告)号：US20040217297A1
公开(公告)日：2004-11-04
申请号：US10841769
申请日：2004-05-06
申请人： YEDA RESEARCH AND DEVELOPMENT CO. LTD. , EL-MUL TECHNOLOGIES LTD.
发明人： Elisha Moses , Ory Zik , Stephan Thiberge
IPC分类号： H01J037/16
CPC分类号： H01J37/28 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/2807
摘要： A chamber suitable for use with a scanning electron microscope. The chamber comprises at least one aperture sealed with a membrane. The membrane is adapted to withstand a vacuum, and is transparent to electrons and the interior of the chamber is isolated from said vacuum. The chamber is useful for allowing wet samples including living cells to be viewed under an electron microscope.
摘要翻译：适用于扫描电子显微镜的室。该室包括用膜密封的至少一个孔。膜适于承受真空，并且对电子是透明的，并且室的内部与所述真空隔离。该室可用于允许在电子显微镜下观察包括活细胞的湿样品。

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