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11. 发明授权

US06947188B2 High stroke pixel for a deformable mirror 失效
标题翻译：可变形镜的高笔画像素
公开(公告)号：US06947188B2
公开(公告)日：2005-09-20
申请号：US10392594
申请日：2003-03-18
申请人： Robin R. Miles , Alexandros P. Papavasiliou
发明人： Robin R. Miles , Alexandros P. Papavasiliou
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： B81B3/0037 , B81B2201/033 , B81B2201/042 , B81B2203/0109 , B81B2203/0136 , B81B2203/053 , G02B26/0841 , G02B26/0866
摘要： A mirror pixel that can be fabricated using standard MEMS methods for a deformable mirror. The pixel is electrostatically actuated and is capable of the high deflections needed for spaced-based mirror applications. In one embodiment, the mirror comprises three layers, a top or mirror layer, a middle layer which consists of flexures, and a comb drive layer, with the flexures of the middle layer attached to the mirror layer and to the comb drive layer. The comb drives are attached to a frame via spring flexures. A number of these mirror pixels can be used to construct a large mirror assembly. The actuator for the mirror pixel may be configured as a crenellated beam with one end fixedly secured, or configured as a scissor jack. The mirror pixels may be used in various applications requiring high stroke adaptive optics.
摘要翻译：可以使用用于可变形反射镜的标准MEMS方法制造的镜像素。像素被静电驱动，并且能够实现基于间隔镜的应用所需的高偏转。在一个实施例中，反射镜包括三层，顶层或镜层，由弯曲构成的中间层，以及梳状驱动层，中间层的弯曲部连接到镜层和梳状驱动层。梳子驱动器通过弹簧弯曲连接到框架。这些反射镜像素中的许多可用于构造大镜组件。用于镜像素的致动器可以被配置为具有一端固定地固定或被配置为剪刀式千斤顶的带锯齿形梁。镜像素可以用于需要高冲程自适应光学器件的各种应用中。

12. 发明授权

US08941907B2 Microelectromechanical optical shutter system 有权
标题翻译：微机电光学快门系统
公开(公告)号：US08941907B2
公开(公告)日：2015-01-27
申请号：US12963578
申请日：2010-12-08
申请人： Alexandros P. Papavasiliou , Robert E. Mihailovich , John E. Mansell , Graham J. Martin
发明人： Alexandros P. Papavasiliou , Robert E. Mihailovich , John E. Mansell , Graham J. Martin
IPC分类号： G02B26/02 , B29D11/00 , G02B6/35 , G02B26/08
CPC分类号： B29D11/00663 , G02B6/3518 , G02B6/353 , G02B6/3552 , G02B6/357 , G02B26/0841
摘要： A microelectromechanical shutter system includes an actuator beam formed in a substrate, at least one actuator electrode spaced apart and electrically isolated from the actuator beam, the at least one actuator electrode angling away from a base of the actuator beam to actuate the actuator beam using a zipper action, and a fiber-optic channel in the substrate to receive a fiber-optic cable. A shutter mirror is included on a distal end of the actuator beam, with the shutter mirror in substantial alignment with a centerline of the fiber-optic channel. Upon application of a voltage between the actuator beam and the at least one actuator electrode, an electrostatic force is created between them to move the shutter mirror across the end of the fiber-optic channel.
摘要翻译：微机电快门系统包括形成在基板中的致动器光束，至少一个致动器电极，其间隔开并与致动器光束电隔离，所述至少一个致动器电极远离致动器光束的基座，以致致动器光束使用拉链动作，以及基板中的光纤通道以接收光纤电缆。快门反射镜包括在致动器光束的远端，快门镜与光纤通道的中心线基本对准。在致动器光束和至少一个致动器电极之间施加电压时，在它们之间产生静电力以将快门镜移动穿过光纤通道的端部。

13. 发明申请

US20120286884A1 Micro-scale System to Provide Thermal Isolation and Electrical Communication Between Substrates 有权
标题翻译：微尺度系统提供基板之间的热隔离和电气通信
公开(公告)号：US20120286884A1
公开(公告)日：2012-11-15
申请号：US13105735
申请日：2011-05-11
申请人： Jeffrey F. DeNatale , Philip A. Stupar , Yu-Hua Lin , Robert L. Borwick , Alexandros P. Papavasiliou
发明人： Jeffrey F. DeNatale , Philip A. Stupar , Yu-Hua Lin , Robert L. Borwick , Alexandros P. Papavasiliou
IPC分类号： H01S1/02 , B05D5/00 , B05D3/10 , H05K1/14 , B32B3/12 , B32B15/08 , B32B3/10 , C23F1/00 , B32B3/30
CPC分类号： H01S1/06 , B05D3/10 , B05D5/00 , B32B3/10 , B32B3/12 , B32B3/30 , B32B15/08 , B81B3/0081 , B81B7/0006 , C23F1/00 , G04F5/14 , H01S1/02 , H05K1/14 , Y10T428/24149 , Y10T428/24331 , Y10T428/24521 , Y10T428/24545
摘要： A microscale apparatus includes a microscale rigidized Parylene strap having a reinforcement structure extending from a first side of the strap, a first silicon substrate suspended by the microscale rigidized Parylene strap, the microscale rigidized Parylene strap conformally coupled to the first substrate, and a second substrate conformally coupled to the microscale rigidized Parylene strap to suspend the first silicon substrate through the microscale rigidized Parylene strap.
摘要翻译：微型设备包括具有从带的第一侧延伸的增强结构的微尺寸刚性聚对二甲苯带，通过微尺寸刚性聚对二甲苯带悬挂的第一硅衬底，与第一衬底共形耦合的微尺寸刚性聚对二甲苯带和第二衬底保形地耦合到微尺寸刚性聚对二甲苯带，以悬浮第一硅衬底通过微尺寸刚性聚对二甲苯带。

14. 发明申请

US20120162741A1 MICROELECTROMECHANICAL OPTICAL SHUTTER SYSTEM 有权
标题翻译：微电子光学切换系统
公开(公告)号：US20120162741A1
公开(公告)日：2012-06-28
申请号：US12963578
申请日：2010-12-08
申请人： Alexandros P. Papavasiliou , Robert E. Mihailovich , John E. Mansell , Graham J. Martin
发明人： Alexandros P. Papavasiliou , Robert E. Mihailovich , John E. Mansell , Graham J. Martin
IPC分类号： G02B26/02 , B29D11/00
CPC分类号： B29D11/00663 , G02B6/3518 , G02B6/353 , G02B6/3552 , G02B6/357 , G02B26/0841
摘要： A microelectromechanical shutter system includes an actuator beam formed in a substrate, at least one actuator electrode spaced apart and electrically isolated from the actuator beam, the at least one actuator electrode angling away from a base of the actuator beam to actuate the actuator beam using a zipper action, and a fiber-optic channel in the substrate to receive a fiber-optic cable. A shutter mirror is included on a distal end of the actuator beam, with the shutter mirror in substantial alignment with a centerline of the fiber-optic channel. Upon application of a voltage between the actuator beam and the at least one actuator electrode, an electrostatic force is created between them to move the shutter mirror across the end of the fiber-optic channel.
摘要翻译：微机电快门系统包括形成在基板中的致动器光束，至少一个致动器电极，其间隔开并与致动器光束电隔离，所述至少一个致动器电极远离致动器光束的基座，以致致动器光束使用拉链动作，以及基板中的光纤通道以接收光纤电缆。快门反射镜包括在致动器光束的远端，快门镜与光纤通道的中心线基本对准。在致动器光束和至少一个致动器电极之间施加电压时，在它们之间产生静电力以将快门镜移动穿过光纤通道的端部。

15. 发明授权

US07692838B2 Nanolaminate deformable mirrors 失效
标题翻译： Naminaminate可变形镜
公开(公告)号：US07692838B2
公开(公告)日：2010-04-06
申请号：US12362758
申请日：2009-01-30
申请人： Alexandros P. Papavasiliou , Scot S. Olivier
发明人： Alexandros P. Papavasiliou , Scot S. Olivier
IPC分类号： G02B26/08 , G02B7/182 , H01L21/00
CPC分类号： G02B26/0841
摘要： A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.
摘要翻译：引入由两层附着在刚性基材上的纳米层压箔形成的可变形反射镜。变形由两层之间的静电力提供。结构的内部刚度允许高空间频率形状。本发明的纳米脂肪酸箔允许高质量的镜面。该装置通过使用具有精确控制厚度的箔而在垂直方向上实现高精度，但是不需要在侧向尺寸上的高精度，允许使用粗光刻技术来制造这样的反射镜。这种技术允许制造高达约计量表的结构。

16. 发明申请

US20090159186A1 NANOLAMINATE DEFORMABLE MIRRORS 失效
标题翻译：纳米酸盐可变形反射镜
公开(公告)号：US20090159186A1
公开(公告)日：2009-06-25
申请号：US12362758
申请日：2009-01-30
申请人： Alexandros P Papavasiliou , Scot S. Olivier
发明人： Alexandros P Papavasiliou , Scot S. Olivier
IPC分类号： C25D7/08
CPC分类号： G02B26/0841
摘要： A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.
摘要翻译：引入由两层附着在刚性基材上的纳米层压箔形成的可变形反射镜。变形由两层之间的静电力提供。结构的内部刚度允许高空间频率形状。本发明的纳米脂肪酸箔允许高质量的镜面。该装置通过使用具有精确控制厚度的箔而在垂直方向上实现高精度，但是不需要在侧向尺寸上的高精度，允许使用粗光刻技术来制造这样的反射镜。这种技术允许制造高达约计量表的结构。

17. 发明授权

US07518780B2 Nanolaminate deformable mirrors 失效
标题翻译： Naminaminate可变形镜
公开(公告)号：US07518780B2
公开(公告)日：2009-04-14
申请号：US11501590
申请日：2006-08-08
申请人： Alexandros P. Papavasiliou , Scot S. Olivier
发明人： Alexandros P. Papavasiliou , Scot S. Olivier
IPC分类号： G02B26/00 , G02B7/182
CPC分类号： G02B26/0841
摘要： A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.
摘要翻译：引入由两层附着在刚性基材上的纳米层压箔形成的可变形反射镜。变形由两层之间的静电力提供。结构的内部刚度允许高空间频率形状。本发明的纳米脂肪酸箔允许高质量的镜面。该装置通过使用具有精确控制厚度的箔而在垂直方向上实现高精度，但是不需要在侧向尺寸上的高精度，允许使用粗光刻技术来制造这样的反射镜。这种技术允许制造高达约计量表的结构。

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