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151. 发明授权

US08991252B2 Displacement amount monitoring electrode arrangement 有权
标题翻译：位移量监测电极布置
公开(公告)号：US08991252B2
公开(公告)日：2015-03-31
申请号：US13579089
申请日：2011-08-26
申请人： Katsutoshi Narita
发明人： Katsutoshi Narita
IPC分类号： G01P15/125 , G01C19/56 , G01C19/5747
CPC分类号： G01P15/125 , G01C19/5747
摘要： According to a displacement amount monitoring electrode arrangement, there are a linear change region in which the change amount of capacitance changes linearly with the displacement of the movable electrode in the predetermined axis direction, and a nonlinear change region in which the change amount of the capacitance changes nonlinearly with the displacement of the movable electrode in the predetermined axis direction. The nonlinear change region includes a characteristic in which a change sensitivity of the change amount of the capacitance with respect to the displacement amount of the movable electrode in the predetermined axis direction is greater than that in the linear change region, and a target capacitance change amount of the capacitance when the displacement of the movable electrode in the predetermined axis direction reaches a target displacement amount corresponding to the target amplitude is set in the nonlinear change region.
摘要翻译：根据位移量监视电极装置，存在线性变化区域，其中电容变化量随着可动电极在预定轴方向上的位移而线性变化，并且存在电容变化量的非线性变化区域随着可动电极在规定的轴方向的位移而非线性地变化。非线性变化区域包括电容变化量相对于可动电极在规定轴方向的位移量的变化灵敏度大于线性变化区域的变化灵敏度的特性，以及目标电容变化量在非线性变化区域中设定当可动电极在规定轴方向上的位移达到与目标振幅对应的目标位移量时的电容值。

152. 发明授权

US08955379B2 Yaw rate sensor and method for manufacturing a mass element 有权
标题翻译：偏心率传感器和制造质量元件的方法
公开(公告)号：US08955379B2
公开(公告)日：2015-02-17
申请号：US13179157
申请日：2011-07-08
申请人： Johannes Classen
发明人： Johannes Classen
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw rate sensor includes a drive device, at least one mass element which is connected to the drive device, and at least one detection electrode for detecting a motion of the mass element. The mass element has a base layer and at least one web which is situated on the base layer. Also, a method for manufacturing a mass element.
摘要翻译：偏航率传感器包括驱动装置，连接到驱动装置的至少一个质量元件和用于检测质量元件的运动的至少一个检测电极。质量元件具有基底层和位于基底层上的至少一个腹板。另外，制造质量元件的方法。

153. 发明授权

US08844357B2 Yaw-rate sensor and method for operating a yaw-rate sensor 有权
标题翻译：偏航速率传感器和操作偏航率传感器的方法
公开(公告)号：US08844357B2
公开(公告)日：2014-09-30
申请号：US13294752
申请日：2011-11-11
申请人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
发明人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.
摘要翻译：偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

154. 发明申请

US20050109107A1 HORIZONTAL AND TUNING FORK VIBRATORY MICROGYROSCOPE 有权
标题翻译：水平和调音台振动微波
公开(公告)号：US20050109107A1
公开(公告)日：2005-05-26
申请号：US10888591
申请日：2004-07-12
申请人： Kyu Park
发明人： Kyu Park
IPC分类号： G01C19/00 , G01C19/56 , G01C19/5712 , G01C19/5747 , G01P9/04 , G01P15/14
CPC分类号： G01C19/56
摘要： A horizontal and tuning fork vibratory microgyroscope detects angular velocity and angular acceleration of an inertial object when the inertial object is rotated, wherein resonance directions of the microgyroscope are on the same horizontal plane in both sensing and driving modes. The microgyroscope includes a substrate, an anchored pad unit, an outer elastic element unit, an outer frame, a sensing electrode unit, an inner elastic element unit including a plurality of inner elastic elements connected to the inside of the outer frame, an inner weighted element unit including a pair of first and second inner weighted elements each having a driven comb, and a driven electrode unit including a comb drive forming a comb structure.
摘要翻译：当惯性物体旋转时，水平和音叉振动微陀螺仪检测惯性物体的角速度和角加速度，其中微陀螺仪的谐振方向在感测和驾驶模式中处于同一水平面上。微陀螺仪包括基底，锚定垫单元，外弹性元件单元，外框架，感测电极单元，内弹性元件单元，其包括连接到外框内部的多个内弹性元件，内加权元件单元包括一对第一和第二内部加权元件，每个元件具有从动梳子，以及驱动电极单元，其包括形成梳状结构的梳状驱动器。

155. 发明授权

US6098462A Low vibration link 失效
标题翻译：低振动链接
公开(公告)号：US6098462A
公开(公告)日：2000-08-08
申请号：US16186
申请日：1998-01-30
申请人： Rand H. Hulsing, II
发明人： Rand H. Hulsing, II
IPC分类号： F02G1/044 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/08 , G01P15/097 , G01P15/10 , G01P15/18 , G01P9/04
CPC分类号： G01P15/18 , F02G1/044 , F02G1/0445 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/0802 , G01P15/097 , F02G2250/18 , F02G2253/03 , F16F2230/0052 , F16F2230/34 , G01P2015/0828 , Y10S73/01
摘要： A symmetrical link device for linking first and second coplanar devices each movably mounted in a frame such that when one of the first and second coplanar devices is moved, a substantially equal and opposite motion is imparted to the other of the first and second coplanar devices.
摘要翻译：一种用于连接第一和第二共面设备的对称连接装置，每个可移动地安装在框架中，使得当第一和第二共面设备中的一个被移动时，基本相等且相反的运动被赋予第一和第二共面设备中的另一个。

156. 发明授权

US5920011A Micromachined rate and acceleration sensor 失效
标题翻译：微加速度和加速度传感器
公开(公告)号：US5920011A
公开(公告)日：1999-07-06
申请号：US786185
申请日：1997-01-20
申请人： Rand H. Hulsing, II
发明人： Rand H. Hulsing, II
IPC分类号： F02G1/044 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/08 , G01P15/097 , G01P15/10 , G01P15/18 , G01P9/04
CPC分类号： G01P15/18 , F02G1/044 , F02G1/0445 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/0802 , G01P15/097 , F02G2250/18 , F02G2253/03 , F16F2230/0052 , F16F2230/34 , G01P2015/0828 , Y10S73/01
摘要： A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).
摘要翻译：公开了一种用于测量移动体的比力和角度旋转速度的传感器（10），并且从硅衬底（16）进行微加工。第一和第二加速度计（32a和b）从硅衬底（16）微加工，每个具有力感测轴（38），并且沿其力感测轴线（38）产生运动体的加速度的输出信号。第一和第二加速度计（32a和b）安装在基板（16）内以沿着振动轴线（41）移动。第一和第二加速度计（32a和b）被振动或抖动以增加来自第一和第二加速度计（32a和b）的输出信号的科里奥利分量。将预定频率的正弦驱动信号施加到设置在每个加速度计上的导电路径（92）。此外，磁通被引导以穿过每个导电路径（92），由此磁通和通过其的驱动信号的相互作用引起期望的抖动运动。在硅衬底（16）内形成连接件（72）并连接到每个加速度计（32a和b），由此赋予一个运动的运动导致施加到另一个加速度计（32）的相似但相反的运动。此外，单一磁体（20）及其相关联的磁通路组件将磁通量通过形成在硅衬底（16）内的第一和第二加速度计（32a和b）引导并聚焦。

157. 发明授权

US5319976A Micromachined rate and acceleration sensor 失效
公开(公告)号：US5319976A
公开(公告)日：1994-06-14
申请号：US73817
申请日：1993-06-08
申请人： Rand H. Hulsing, II
发明人： Rand H. Hulsing, II
IPC分类号： F02G1/044 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/08 , G01P15/097 , G01P15/10 , G01P15/18 , G01P9/04
CPC分类号： G01P15/18 , F02G1/044 , F02G1/0445 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/0802 , G01P15/097 , F02G2250/18 , F02G2253/03 , F16F2230/0052 , F16F2230/34 , G01P2015/0828 , Y10S73/01
摘要： A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).

158. 发明授权

US5241861A Micromachined rate and acceleration sensor 失效
标题翻译：微型速率和加速度传感器
公开(公告)号：US5241861A
公开(公告)日：1993-09-07
申请号：US653533
申请日：1991-02-08
申请人： Rand H. Hulsing, II
发明人： Rand H. Hulsing, II
IPC分类号： F02G1/044 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/08 , G01P15/097 , G01P15/10 , G01P15/18
CPC分类号： G01P15/18 , F02G1/044 , F02G1/0445 , F16L37/24 , G01C19/5719 , G01C19/5747 , G01P15/0802 , G01P15/097 , F02G2250/18 , F02G2253/03 , F16F2230/0052 , F16F2230/34 , G01P2015/0828 , Y10S73/01
摘要： A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The first and second accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The first and second accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the first and second accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion. A link (72) is formed within the silicon substrate (16) and connected to each of the accelerometers (32a and b), whereby motion imparted to one results in a like, but opposite motion applied to the other accelerometer (32). Further, a unitary magnet (20) and its associated flux path assembly direct and focus the magnetic flux through the first and second accelerometers (32a and b) formed within the silicon substrate (16).
摘要翻译：公开了一种用于测量移动体的比力和角度旋转速度的传感器（10），并且从硅衬底（16）进行微加工。第一和第二加速度计（32a和b）从硅衬底（16）微加工，每个具有力感测轴（38），并且沿其力感测轴线（38）产生运动体的加速度的输出信号。第一和第二加速度计（32a和b）安装在基板（16）内以沿着振动轴线（41）移动。第一和第二加速度计（32a和b）被振动或抖动以增加来自第一和第二加速度计（32a和b）的输出信号的科里奥利分量。将预定频率的正弦驱动信号施加到设置在每个加速度计上的导电路径（92）。此外，磁通被引导以穿过每个导电路径（92），由此磁通和通过其的驱动信号的相互作用引起期望的抖动运动。在硅衬底（16）内形成连接件（72）并连接到每个加速度计（32a和b），由此赋予一个运动的运动导致施加到另一个加速度计（32）的相似但相反的运动。此外，单一磁体（20）及其相关联的磁通路组件将磁通量通过形成在硅衬底（16）内的第一和第二加速度计（32a和b）引导并聚焦。

159. 发明公开

US20240271934A1 MICRO-MECHANICAL GYROSCOPE AND ELECTRONIC PRODUCT 审中-公开
公开(公告)号：US20240271934A1
公开(公告)日：2024-08-15
申请号：US18313350
申请日：2023-05-07
申请人： AAC Kaitai Technologies (Wuhan) CO., LTD.
发明人： Zhao Ma , Xiao Kan , Shitao Yan , Shan Yang , Zhan Zhan , Yang Li , Veronica Tan , Kahkeen Lai
IPC分类号： G01C19/5747 , G01C19/5769
CPC分类号： G01C19/5747 , G01C19/5769
摘要： The present disclosure provides a micro-mechanical gyroscope and an electronic product. The micro-mechanical gyroscope includes first mass blocks, second mass blocks, a first driving member, a second driving member, first coupling components and second coupling components. The second mass blocks, the first driving member and the second driving member are arranged between the first mass blocks. The second mass blocks are arranged on either sides of the first second driving members. A first mass block arranged on a side of the first driving member is connected to the first driving member through a first coupling component, and a first mass block arranged on a side of the second driving member is connected to the second driving member through a first coupling component. Ends of the second mass block in the first direction are connected to the first driving member and the second driving member, respectively, through the second coupling components.

160. 发明授权

US11846508B2 Gyroscope with mass pairs 有权
公开(公告)号：US11846508B2
公开(公告)日：2023-12-19
申请号：US17241814
申请日：2021-04-27
申请人： MURATA MANUFACTURING CO., LTD.
发明人： Anssi Blomqvist , Ville-Pekka Rytkönen
IPC分类号： G01C19/574 , G01C19/5747 , G01C19/5712
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A microelectromechanical gyroscope comprising first, second, third and fourth Coriolis masses, arranged in that order on an x-axis. In the primary oscillation mode, the Coriolis masses are configured to oscillate so that the second and third Coriolis masses move in linear translation along the x-axis away from a center point when the first and fourth Coriolis masses move in linear translation along the x-axis towards the first center point, and vice versa. When the gyroscope undergoes rotation about a y-axis which is perpendicular to the x-axis, the Coriolis masses are configured to oscillate so that the first, second, third and fourth Coriolis masses undergo vertical motion in a z-direction, wherein the first and third Coriolis masses move up when the second and fourth Coriolis masses move down, and vice versa.

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