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    • 132. 发明申请
    • Telephone exchange apparatus
    • 电话交换设备
    • US20070286382A1
    • 2007-12-13
    • US11802990
    • 2007-05-29
    • Hitoshi Kato
    • Hitoshi Kato
    • H04M3/42
    • H04M3/42323H04M3/42263H04M3/42365H04M7/0075H04M2207/35
    • According to one embodiment, a telephone exchange apparatus which accommodates a plurality of telephone terminals includes a memory to store a management table wherein a terminal identification data (terminal ID) and a connection identification data (connection ID) correspond to an operation data indicating a connected/disconnect status with respect to each of the plurality of telephone terminals, and a controller to connect communication between the plurality of telephone terminals in operation based on the management table, and to update the operation data corresponding to the terminal ID of the relevant telephone terminal within the management table based on a predetermined condition.
    • 根据一个实施例,容纳多个电话终端的电话交换设备包括存储器,用于存储管理表,其中终端标识数据(终端ID)和连接标识数据(连接ID)对应于指示连接的操作数据 /断开状态,以及控制器,用于基于管理表在操作中连接多个电话终端之间的通信,并且更新与相关电话终端的终端ID相对应的操作数据 基于预定条件在管理表内。
    • 140. 发明申请
    • Semiconductor device manufacturing system
    • 半导体器件制造系统
    • US20070076942A1
    • 2007-04-05
    • US10554087
    • 2004-04-20
    • Yasuo YatsugakeHitoshi KatoMoyuru YasuharaTakashi Irie
    • Yasuo YatsugakeHitoshi KatoMoyuru YasuharaTakashi Irie
    • G06K9/00
    • G01N21/9501G01N21/94
    • The present invention provides a system capable of automatically making a diagnosis of a semiconductor device manufacturing apparatus, based on a result of particle detection on a substrate such as a semiconductor wafer. In one preferred embodiment, the surface of the wafer is divided into square-shaped minute areas of 0.1 mm to 0.5 mm, and existence of particles in each minute area is inspected. Based on the inspection result, data, in which existence of particles in each minute area is correlated with the address thereof, is created. The surface of the wafer is divided into several tens to several hundreds of evaluation areas. A binarized data is assigned to each evaluation area, and is determined based on the fact that the number of the minute areas in which particles are detected included in the evaluation area is larger, or not larger than a predetermined reference value. A correspondence table, showing the relationship between binarized data arrangements and the causes of particle adhesion, which is made based on empirical rules or experimental results, is prepared. By applying the binarized data made based on the inspection result to the correspondence table, the cause of particle adhesion can be identified.
    • 本发明提供一种能够基于半导体晶片等基板上的粒子检测结果自动进行半导体装置制造装置的诊断的系统。 在一个优选实施例中,将晶片的表面分成0.1mm至0.5mm的方形微小区域,并且检查每个微小区域中的颗粒的存在。 基于检查结果,创建了每个微小区域中的粒子的存在与其地址相关联的数据。 晶片的表面分为几十到几百个评估区域。 将二值化数据分配给每个评估区域,并且基于包括在评估区域中的检测粒子的微小区域的数量较大或不大于预定参考值的事实来确定。 准备了基于经验规则或实验结果的二值化数据配置与颗粒粘附原因之间的关系的对应表。 通过将基于检查结果的二值化数据应用于对应表,可以确定颗粒附着的原因。