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    • 122. 发明申请
    • MOSFET WITH ISOLATION STRUCTURE FOR MONOLITHIC INTEGRATION AND FABRICATION METHOD THEREOF
    • 具有隔离结构的MOSFET用于单片集成及其制造方法
    • US20090050962A1
    • 2009-02-26
    • US11913037
    • 2005-10-14
    • Chih-Feng HuangTuo-Hsin ChienJenn-Yu LinTa-yung Yang
    • Chih-Feng HuangTuo-Hsin ChienJenn-Yu LinTa-yung Yang
    • H01L29/78H01L21/336
    • H01L27/0928H01L21/823878H01L21/823892
    • A MOSFET device with an isolation structure for a monolithic integration is provided. A P-type MOSFET includes a first N-well disposed in a P-type substrate, a first P-type region disposed in the first N-well, a P+ drain region disposed in the first P-type region, a first source electrode formed with a P+ source region and an N+ contact region. The first N-well surrounds the P+ source region and the N+ contact region. An N-type MOSFET includes a second N-well disposed in a P-type substrate, a second P-type region disposed in the second N-well, an N+drain region disposed in the second N-well, a second source electrode formed with an N+ source region and a P+ contact region. The second P-type region surrounds the N+ source region and the P+ contact region. A plurality of separated P-type regions is disposed in the P-type substrate to provide isolation for transistors.
    • 提供了具有用于单片集成的隔离结构的MOSFET器件。 P型MOSFET包括设置在P型衬底中的第一N阱,设置在第一N阱中的第一P型区,设置在第一P型区中的P +漏极区,第一源电极 形成有P +源极区域和N +接触区域。 第一个N阱围绕着P +源极区域和N +接触区域。 N型MOSFET包括设置在P型衬底中的第二N阱,设置在第二N阱中的第二P型区,设置在第二N阱中的N +漏极区,第二源电极 形成有N +源区和P +接触区。 第二P型区围绕N +源极区域和P +接触区域。 多个分离的P型区域设置在P型衬底中以提供晶体管的隔离。
    • 123. 发明授权
    • Method for forming multiple doping level bipolar junctions transistors
    • 用于形成多个掺杂级双极结晶体管的方法
    • US07449388B2
    • 2008-11-11
    • US11458270
    • 2006-07-18
    • Daniel Charles KerrMichael Scott CarrollAmal Ma HamadThiet The LaiRoger W. Key
    • Daniel Charles KerrMichael Scott CarrollAmal Ma HamadThiet The LaiRoger W. Key
    • H01L21/331
    • H01L29/66272H01L21/8249H01L27/0623H01L27/0928H01L29/0821
    • A process for forming bipolar junction transistors having a plurality of different collector doping densities on a semiconductor substrate and an integrated circuit comprising bipolar junction transistors having a plurality of different collector doping densities. A first group of the transistors are formed during formation of a triple well for use in providing triple well isolation for complementary metal oxide semiconductor field effect transistors also formed on the semiconductor substrate. Additional bipolar junction transistors with different collector doping densities are formed during a second doping step after forming a gate stack for the field effect transistors. Implant doping through bipolar transistor emitter windows forms bipolar transistors having different doping densities than the previously formed bipolar transistors. According to one embodiment of the present invention, bipolar junction transistors having six different collector dopant densities (and thus six different breakdown characteristics) are formed.
    • 一种用于形成在半导体衬底上具有多个不同集电极掺杂密度的双极结型晶体管的工艺,以及包括具有多个不同集电极掺杂密度的双极结型晶体管的集成电路。 第一组晶体管在形成三阱期间形成,用于为也形成在半导体衬底上的互补金属氧化物半导体场效应晶体管提供三阱隔离。 在形成用于场效应晶体管的栅叠层之后的第二掺杂步骤期间,形成具有不同集电极掺杂密度的附加双极结型晶体管。 通过双极晶体管发射极窗口进行的种植体掺杂形成了与先前形成的双极晶体管不同的掺杂密度的双极晶体管。 根据本发明的一个实施例,形成具有六种不同集电极掺杂剂密度(并因此具有六种不同击穿特性)的双极结型晶体管。
    • 126. 发明申请
    • SEMICONDUCTOR DEVICE, SEMICONDUCTOR SYSTEM AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    • 半导体器件,半导体器件和半导体器件制造方法
    • US20080128756A1
    • 2008-06-05
    • US11952373
    • 2007-12-07
    • Shigeo SATOH
    • Shigeo SATOH
    • H01L23/48H01L21/82
    • H01L27/0928H01L21/823892
    • A semiconductor device is provided with a first conductivity type semiconductor substrate (10); a voltage supplying terminal (26) arranged on the semiconductors substrate (10); one or more elements (6) which include a second conductivity type well section (22) and are arranged on the semiconductor substrate (10); a second conductivity type first conductive layer (21), which is a lower layer of the one or more elements (6), is in contact with the second conductivity type well section (22), and connects the second conductivity type well section (22) of the one or more elements (6) with the voltage supplying terminal (26); and a first conductivity type second conductive layer (11) formed in contact with a lower side of the first conductive layer (21).
    • 半导体器件设置有第一导电型半导体衬底(10); 设置在所述半导体基板(10)上的电压供给端子(26)。 一个或多个元件(6),其包括第二导电类型阱部分(22)并布置在半导体衬底(10)上; 作为所述一个以上元件(6)的下层的第二导电型第一导电层(21)与所述第二导电型阱部(22)接触,并且将所述第二导电型阱部(22) )所述一个或多个元件(6)与所述电压供给端子(26)连接; 以及与第一导电层(21)的下侧接触形成的第一导电型第二导电层(11)。
    • 130. 发明授权
    • Triple well structure and method for manufacturing the same
    • 三重井结构及其制造方法
    • US07285453B2
    • 2007-10-23
    • US11474022
    • 2006-06-23
    • Jih-Wei Liou
    • Jih-Wei Liou
    • H01L21/336H01L21/8234H01L21/8238
    • H01L27/0928H01L21/823892H01L29/6659H01L29/7833
    • The present invention discloses a triple well structure, which includes a substrate of a first conductive type, a deep buried well of a second conductive type, a well of a first conductive type, a well ring of a second conductive type, and a well ring of a first conductive type. The deep buried well of the second conductive type is in the substrate. The well of the first conductive type is disposed over the deep buried well of the second conductive type in the substrate. The well ring of the second conductive type surrounds the well of the first conductive type. The well ring of the first conductive type is between the well of the first conductive type and the well ring of the second conductive type.
    • 本发明公开了一种三重阱结构,其包括第一导电类型的衬底,第二导电类型的深埋阱,第一导电类型的阱,第二导电类型的阱环和阱环 的第一导电类型。 第二导电类型的深埋井位于基板中。 第一导电类型的阱设置在衬底中的第二导电类型的深埋阱上。 第二导电类型的阱环围绕第一导电类型的阱。 第一导电类型的阱环在第一导电类型的阱和第二导电类型的阱环之间。