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    • 126. 发明授权
    • Positional deviation detecting method and device manufacturing method using the same
    • 位置偏差检测方法及使用该方法的装置制造方法
    • US06649923B2
    • 2003-11-18
    • US09879059
    • 2001-06-13
    • Takahiro Matsumoto
    • Takahiro Matsumoto
    • G01N2186
    • G03F9/7049G03F9/7038G03F9/7076G03F9/7088
    • A method of detecting a relative positional deviation between first and second objects by use of a first alignment mark provided on the first object and a second alignment mark provided on the second object, wherein the first alignment mark includes a first grating lens and a second grating lens having a mirror image of the first grating lens, and the alignment mark includes a third grating lens and a fourth grating lens having a mirror image of the third grating lens. The incidence position information of first light coming via the first grating lens and the third grating lens and incident upon a first predetermined plane, and the incidence position of second light coming via the second grating lens and the fourth grating lens and incident upon a second predetermined plane, are detected, on the basis of which the relative positional deviation between the first and second objects in a predetermined direction is detected.
    • 一种通过使用设置在第一物体上的第一对准标记和设置在第二物体上的第二对准标记来检测第一和第二物体之间的相对位置偏差的方法,其中第一对准标记包括第一光栅透镜和第二光栅 透镜具有第一光栅透镜的镜像,并且对准标记包括具有第三光栅透镜的镜像的第三光栅透镜和第四光栅透镜。 经由第一光栅透镜和第三光栅透镜入射到第一预定平面上的第一光的入射位置信息以及经由第二光栅透镜和第四光栅透镜进入的第二光的入射位置,并入射到第二预定面 检测出第一和第二物体之间在预定方向上的相对位置偏差的基础。
    • 128. 发明授权
    • Position detecting system and device manufacturing method using the same
    • 位置检测系统及使用其的装置制造方法
    • US06421124B1
    • 2002-07-16
    • US09203584
    • 1998-12-02
    • Takahiro MatsumotoKoichi Sentoku
    • Takahiro MatsumotoKoichi Sentoku
    • G01B1100
    • G03F9/7065G03F9/703G03F9/7038G03F9/7049G03F9/7076
    • A position detecting system for producing relative positional information related to first and second objects, is wherein the system includes a light projecting device for projecting light toward the first and second objects disposed opposed to each other and having physical optic elements, the light projecting device being capable of projecting lights of different wavelengths, a light detecting device for detecting light emitted from the light projecting device and being influenced by both of the physical optic elements of the first and second objects, wherein relative positional information related to the first and second objects is produced on the basis of the detection by the light detecting device, and a spacing setting device for changing the spacing between the first and second objects in accordance with a wavelength of light to be projected by the light projecting device.
    • 一种用于产生与第一和第二物体相关的位置信息的位置检测系统,其特征在于,所述系统包括:投光装置,用于将光朝向彼此相对设置并具有物理光学元件的第一和第二物体投射,所述投光装置为 能够投射不同波长的光的光检测装置,用于检测从投光装置发射的光并受到第一和第二物体的物理光学元件的影响的光检测装置,其中与第一和第二物体相关的相对位置信息是 基于光检测装置的检测而产生的间隔设定装置,以及用于根据由投光装置投射的光的波长来改变第一和第二物体之间的间隔的间隔设定装置。