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111. 发明授权

US09599510B2 Estimation of spectral feature of pulsed light beam 有权
公开(公告)号：US09599510B2
公开(公告)日：2017-03-21
申请号：US14488684
申请日：2014-09-17
申请人： Cymer, LLC , ASML Netherlands B.V.
发明人： Thomas P. Duffey , Herman Philip Godfried
IPC分类号： G03B27/32 , G03B27/54 , G03B27/74 , H01S3/10 , H01S3/13 , G01J3/28 , G03F7/20 , G01J11/00 , G01J9/00 , G01J3/14 , G01J3/26 , G01J3/02
CPC分类号： G01J3/28 , G01J3/027 , G01J3/14 , G01J3/26 , G01J9/00 , G01J11/00 , G01J2003/2853 , G03F7/70041 , G03F7/70058 , G03F7/70575
摘要： A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

112. 发明授权

US09200961B2 Systems and methods for high resolution spatial heterodyne raman spectroscopy 有权
标题翻译：高分辨率空间外差法拉曼光谱系统和方法
公开(公告)号：US09200961B2
公开(公告)日：2015-12-01
申请号：US14067244
申请日：2013-10-30
申请人： University of South Carolina
发明人： Stanley Michael Angel , Jerry Chance Carter
IPC分类号： G01J3/45 , G01J3/44 , G01J3/14 , G01J3/453 , G01N21/65
CPC分类号： G01J3/44 , G01J3/14 , G01J3/4531 , G01J2003/451 , G01N21/65
摘要： The present subject matter is directed to a device for spectroscopy. The device includes an excitation source and a first spatial heterodyne spectrometer configured to receive wavelengths from the excitation source and filter the wavelengths to produce fringes on a sample. The device also includes a second heterodyne spectrometer configured to receive Raman wavelengths from the sample.
摘要翻译：本发明涉及用于光谱学的装置。该装置包括激发源和第一空间外差光谱仪，其被配置为接收来自激发源的波长并过滤波长以在样品上产生条纹。该装置还包括配置成从样品接收拉曼波长的第二外差光谱仪。

113. 发明授权

US08922776B2 Confocal laser scanning microscope and a method for investigating a sample 有权
标题翻译：共聚焦激光扫描显微镜和样品调查方法
公开(公告)号：US08922776B2
公开(公告)日：2014-12-30
申请号：US13988784
申请日：2011-11-22
申请人： Reiner Rygiel
发明人： Reiner Rygiel
IPC分类号： G01N21/00 , G01J3/02 , G01J3/14 , G01J3/36 , G02B21/00 , G02B27/14
CPC分类号： G01J3/0205 , G01J3/0229 , G01J3/0237 , G01J3/14 , G01J3/36 , G02B21/0076 , G02B21/008 , G02B27/141
摘要： A confocal laser scanning microscope for examining a sample has a light source, which generates an illumination light beam, and a scanning unit which deflects the illumination light beam such that it optically scans the sample. A main beam splitter separates the illumination light beam from detection light emerging from the sample. The detection light separated from the illumination light beam passes at least partially through a detection pinhole diaphragm. At least two detector units detect the detection light passing through the detection pinhole diaphragm. An optical element is arranged in the beam direction between the detection pinhole diaphragm and the detector units and splits the detection light into at least two beam bundles and spectrally decomposes it within the beam bundles.
摘要翻译：用于检查样品的共聚焦激光扫描显微镜具有产生照明光束的光源和使照明光束偏转以使其光学扫描样品的扫描单元。主分束器将照明光束与从样品出射的检测光分离。与照明光束分离的检测光至少部分地通过检测针孔膜片。至少两个检测器单元检测通过检测针孔隔膜的检测光。在检测针孔光阑和检测器单元之间沿光束方向布置光学元件，并将检测光分裂成至少两束光束束，并在束束内对其进行光谱分解。

114. 发明授权

US08873048B2 Spectrometer arrangement 有权
标题翻译：光谱仪布置
公开(公告)号：US08873048B2
公开(公告)日：2014-10-28
申请号：US13518797
申请日：2010-12-13
申请人： Stefan Florek , Michael Okruss , Helmut Becker-Ross
发明人： Stefan Florek , Michael Okruss , Helmut Becker-Ross
IPC分类号： G01J3/28 , G01J3/02 , G01J3/18 , G01J3/14
CPC分类号： G01J3/1809 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0235 , G01J3/14 , G01J3/2803 , G01J2003/1828
摘要： A spectrometer assembly (10), comprising an Echelle grating (18; 46) for dispersing radiation entering the spectrometer assembly (10) in a main dispersion direction, and a dispersion assembly (16; 40) for dispersing a parallel radiation bundle generated from the radiation entering the spectrometer assembly in a lateral dispersion direction, is characterized in that the dispersion assembly (16; 40) is reflective, and the dispersion assembly (16; 40) is arranged relative to the Echelle grating (18; 46) in such a way that the parallel radiation bundle is reflected in the direction of the Echelle grating. The Echelle grating (18; 46) may be arranged in such a way that the dispersed radiation is reflected back to the dispersion assembly (16; 40).
摘要翻译：一种光谱仪组件（10），包括用于分散在主分散方向上进入光谱仪组件（10）的辐射的梯形光栅（18; 46）和用于分散从所述分散体组件（10; 40）产生的平行辐射束辐射进入光谱仪组件的横向分散方向，其特征在于分散体组件（16; 40）是反射性的，分散体组件（16; 40）相对于Echelle光栅（18; 46）平行辐射束在Echelle光栅的方向上反射的方式。可以将梯形光栅（18; 46）布置成使得分散的辐射被反射回到分散体组件（16; 40）。

115. 发明授权

US07319520B2 Method for separating fluorescence spectra of dyes present in a sample 有权
标题翻译：用于分离样品中存在的染料的荧光光谱的方法
公开(公告)号：US07319520B2
公开(公告)日：2008-01-15
申请号：US10924422
申请日：2004-08-24
申请人： Frank Olschewski
发明人： Frank Olschewski
IPC分类号： G06F7/16 , G01J3/30 , G01J3/433 , G01J3/14 , G01J3/18
CPC分类号： G01N21/6458 , G01J3/4406 , G01J2003/2833 , G01N21/6428 , G01N2021/6417 , G01N2021/6423 , G02B21/0064 , G02B21/0076
摘要： A system and a method for setting a fluorescence spectrum measurement system for microscopy is disclosed. Using illuminating light (3) from at least one laser that emits light of one wavelength, a continuous wavelength region is generated. Dyes are stored, with the pertinent excitation and emission spectra, in a database of a computer system (23). For each dye present in the specimen (15), a band of the illuminating light (3) and a band of the detected light (17) are calculated, the excitation and emission spectra read out from the database being employed. Setting of the calculated band in the illuminating light and in the detected light is performed on the basis of the calculation. Lastly, data acquisition is accomplished with the spectral microscope (100).
摘要翻译：公开了一种用于设置用于显微镜的荧光光谱测量系统的系统和方法。使用来自发射一个波长的光的至少一个激光器的照明光（3），产生连续的波长区域。将染料与相关的激发和发射光谱一起存储在计算机系统（23）的数据库中。对于样品（15）中存在的每种染料，计算照明光（3）的带和检测光（17）的带，从采用数据库读出的激发和发射光谱。在计算的基础上进行照明光和检测光中的计算频带的设定。最后，用光谱显微镜（100）完成数据采集。

116. 发明申请

US20050248769A1 Device and method for optical spectroscopy, optical sensor and use of said device 有权
标题翻译：光学仪器和方法，光学传感器和所述器件的使用
公开(公告)号：US20050248769A1
公开(公告)日：2005-11-10
申请号：US10521516
申请日：2002-07-15
申请人： Thilo Weitzel
发明人： Thilo Weitzel
IPC分类号： G01J3/12 , G01J3/14 , G01J3/18 , G01J3/32 , G01J3/36 , G01J3/45 , G01J3/453 , G01B9/02
CPC分类号： G01J3/453
摘要： The present invention relates to an apparatus and a method for optical spectroscopy and for optical sensory technology and to the use of the apparatus. An apparatus having high spectral resolution with simultaneously comparatively low demands on the quality of the optical components is provided in that the apparatus for optical spectroscopy comprises means for the generation of an interference pattern, means for the coupling of the incoming light field to be examined such that only one or several individual spatial modes of the field are permitted, and a detector which can record the intensity of the generated interference pattern at a plurality of spatially different positions, with the wavefronts and/or the propagation direction of at least one of the light fields involved in the interference pattern being changed by spectrally dispersive or diffractive optical elements in dependence on the wavelength. The present invention furthermore relates to a method of determining the optical spectrum and/or of other measurands encoded or transmitted by an optical spectrum by analysis of the interference pattern measured using an apparatus in accordance with the invention or using an apparatus in accordance with the invention.
摘要翻译：本发明涉及一种用于光学光学和光学感测技术的装置和方法以及该装置的使用。提供了一种具有高光谱分辨率并且对光学部件的质量要求相对较低的要求的装置，其特征在于，用于光学光学的装置包括用于产生干涉图案的装置，用于耦合待检测的入射光场的装置允许场的只有一个或几个单独的空间模式，以及可以在多个空间不同的位置记录生成的干涉图案的强度的检测器，其中波前和/或传播方向至少是根据波长，通过光谱色散或衍射光学元件改变涉及干涉图案的光场。本发明还涉及一种通过分析使用根据本发明的装置或使用根据本发明的装置测量的干涉图案来确定由光谱编码或传输的其他被测量的光谱和/或其他被测量的方法。

117. 发明授权

US06943353B2 Simultaneous multi-beam planar array IR (pair) spectroscopy 失效
标题翻译：同时多光束平面阵列IR（对）光谱
公开(公告)号：US06943353B2
公开(公告)日：2005-09-13
申请号：US10708927
申请日：2004-04-01
申请人： Douglas L. Elmore , John F. Rabolt , Mei-Wei Tsao
发明人： Douglas L. Elmore , John F. Rabolt , Mei-Wei Tsao
IPC分类号： G01J3/02 , G01J3/14 , G01J3/28 , G01J3/42 , G01N21/35
CPC分类号： G01J3/02 , G01J3/0216 , G01J3/0218 , G01J3/0224 , G01J3/0294 , G01J3/14 , G01J3/28 , G01J3/2803 , G01J3/42 , G01N21/3563 , G01N21/3577
摘要： An apparatus and method capable of providing spatially multiplexed IR spectral information simultaneously in real-time for multiple samples or multiple spatial areas of one sample using IR absorption phenomena requires no moving parts or Fourier Transform during operation, and self-compensates for background spectra and degradation of component performance over time. IR spectral information and chemical analysis of the samples is determined by using one or more IR sources, sampling accessories for positioning the samples, optically dispersive elements, a focal plane array (FPA) arranged to detect the dispersed light beams, and a processor and display to control the FPA, and display an IR spectrograph. Fiber-optic coupling can be used to allow remote sensing. Portability, reliability, and ruggedness is enhanced due to the no-moving part construction. Applications include determining time-resolved orientation and characteristics of materials, including polymer monolayers. Orthogonal polarizers may be used to determine certain material characteristics.
摘要翻译：能够使用IR吸收现象实时地对一个样本的多个样本或多个空间区域实时地提供空间多路复用的IR光谱信息的装置和方法在运行期间不需要运动部分或傅立叶变换，并且自我补偿背景光谱和降解的组件性能。通过使用一个或多个IR源，用于定位样品的采样附件，光学色散元件，布置成检测分散光束的焦平面阵列（FPA）以及处理器和显示器来确定样品的IR光谱信息和化学分析控制FPA，并显示红外光谱仪。可以使用光纤耦合来进行遥感。由于无移动部件结构，便携性，可靠性和耐用性得到了提高。应用包括确定材料的时间分辨取向和特性，包括聚合物单层。可以使用正交偏振器来确定某些材料特性。

118. 发明申请

US20050157293A1 Assembly and method for wavelength calibration in an echelle spectrometer 有权
标题翻译：在梯形光谱仪中进行波长校准的装配和方法
公开(公告)号：US20050157293A1
公开(公告)日：2005-07-21
申请号：US10503636
申请日：2003-01-28
申请人： Stefan Florek , Helmut Becker-Ross , Uwe Heitmann
发明人： Stefan Florek , Helmut Becker-Ross , Uwe Heitmann
IPC分类号： G01J3/02 , G01J3/04 , G01J3/08 , G01J3/12 , G01J3/14 , G01J3/18 , G01J3/28
CPC分类号： G01J3/04 , G01J3/02 , G01J3/0229 , G01J3/08 , G01J3/14 , G01J3/1809 , G01J3/28 , G01J2003/1208 , G01J2003/2866
摘要： A spectrometer assembly (10) comprises a light source (11) with a continuous spectrum, a pre-monochromator (2) for generating a spectrum with a relatively small linear dispersion from which a spectral portion is selectable, the spectral bandwidth of such spectral portion being smaller than or equal to the bandwidth of the free spectral range of such order in the echelle spectrum wherein the centre wavelength of the selected spectral interval is measurable with maximum blaze efficiency, an echelle spectrometer (4) with means for wavelength calibration, an entrance slit (21) at the pre-monochromator (2), an intermediate slit assembly (50) with an intermediate slit (3) and a spatially resolving light detector (5) in the exit plane of the spectrometer for the detection of wavelength spectra. The assembly is characterised in that the width of the intermediate slit (3) is larger than the monochromatic image of the entrance slit generated by the pre-monochromator at the location of the intermediate slit, and means for calibrating the pre-monochromator are provided, which are adapted to calibrate the light of the light source with a continuous spectrum on the detector to a reference position.
摘要翻译：光谱仪组件（10）包括具有连续光谱的光源（11），用于产生光谱部分可选择的相对小的线性色散的光谱的预单色器（2），该光谱部分的光谱带宽小于或等于梯级光谱中这种顺序的自由光谱范围的带宽，其中所选择的光谱间隔的中心波长可以用最大的火焰效率测量，具有用于波长校准的装置的梯形光谱仪（4），入口在预分光器（2）处的狭缝（21），具有用于检测波长光谱的光谱仪的出射平面中的中间狭缝（3）和空间分辨光检测器（5）的中间狭缝组件（50）。组件的特征在于，中间狭缝（3）的宽度大于由中间狭缝位置处的预单色仪产生的入口狭缝的单色图像，并且提供用于校准预单色仪的装置，其适合于用检测器上的连续光谱校准光源的光到参考位置。

119. 发明申请

US20050128477A1 Wide-band spectrometer with objective comprising an aspherical corrector mirror 失效
公开(公告)号：US20050128477A1
公开(公告)日：2005-06-16
申请号：US11032553
申请日：2005-01-10
申请人： Alberto Caruso , Andrea Romoli , Matteo Taccola
发明人： Alberto Caruso , Andrea Romoli , Matteo Taccola
IPC分类号： G01J3/02 , G01J3/14 , G01J3/28 , G01J3/36
CPC分类号： G01J3/36 , G01J3/02 , G01J3/0208 , G01J3/14 , G01J3/2823
摘要： The spectrometer comprises at least a first optical path for a beam of electromagnetic radiation, along which the following are set: a beam-entry slit (1) for an incoming beam; a collimator (5) comprising a convergent spherical mirror for collimation of the incoming beam; a first dispersor (9) for dispersion of the beam into its chromatic components; a first focusing system (19); and a first detector (21) which receives the beam dispersed and focused by said first focusing system. Set along the first optical path there is set at least one first aspherical corrector element (7; 17) comprising an aspherical mirror for correction of spherical aberration.

120. 发明申请

US20050088657A1 Optical measurment device and spectroscopic device 审中-公开
标题翻译：光学测量装置和光谱装置
公开(公告)号：US20050088657A1
公开(公告)日：2005-04-28
申请号：US10790796
申请日：2004-03-03
申请人： Toshiki Sugawara , Masataka Shirai
发明人： Toshiki Sugawara , Masataka Shirai
IPC分类号： G01J3/36 , G01J3/12 , G01J3/14 , G01J3/18 , G01J3/26 , G01N21/35 , G01N21/3563 , G01N21/359 , G02B6/34 , G01B9/02 , G01J3/28
CPC分类号： G01J3/12 , G02B6/2931 , G02B6/29358
摘要： To improve resolving power of an optical measurement device using a spectroscopic device, the optical measurement formed by use of a spectroscopic device which has a parallel interferometer (A) of high chromatic dispersion and a diffraction grating (B) of low chromatic dispersion, and the parallel interferometer (A) and the diffraction grating (B) are composed in such manner that chromatic dispersion directions of them in right angle, and a two dimensional array type light detection part (50) processing the light spread two dimensionally by the spectroscopic device (40).
摘要翻译：为了提高使用分光装置的光学测量装置的分辨率，使用具有高色散的平行干涉仪（A）和低色散的衍射光栅（B）的分光装置形成的光学测量，以及平行干涉仪（A）和衍射光栅（B）以它们的直角的色散方向和由分光装置二维地扩展的二维阵列型光检测部（50）的方式构成， 40）。

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