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    • 115. 发明授权
    • Manufacturing method of semiconductor device having organic semiconductor film
    • 具有有机半导体膜的半导体器件的制造方法
    • US07575952B2
    • 2009-08-18
    • US11797419
    • 2007-05-03
    • Tadashi AraiShinichi Saito
    • Tadashi AraiShinichi Saito
    • H01L51/40
    • H01L51/102B82Y30/00H01L51/0015H01L51/0023H01L51/0545
    • A method of manufacturing a semiconductor device having an organic semiconductor film comprises a step of preparing a transparent substrate at least having an opaque gate electrode and a gate insulator thereover, a step of forming a layer containing metal-nano-particles as a conductive layer for a source electrode and a drain electrode to the thus prepared transparent substrate, a step of applying exposure to the transparent substrate on the side of a surface not mounted with the opaque gate electrode, a step of flushing away a portion other than the source electrode and the drain electrode in the layer containing the metal-nano-particles after the exposure, and a step of forming an organic semiconductor layer forming a channel portion. Lower and upper electrodes are positioned in self-alignment manner and thus no positional displacement occurs even if a printing method is used. Accordingly, semiconductor devices such as flexible substrates using an organic semiconductor can be manufactured inexpensively by using a printing method.
    • 制造具有有机半导体膜的半导体器件的方法包括制备至少具有不透明栅电极和栅极绝缘体的透明基板的步骤,形成包含金属纳米颗粒的层作为导电层的步骤 源极电极和漏电极,对未形成的不透光栅电极的表面侧的透明基板进行曝光,除去源电极以外的部分的工序;以及 在曝光后含有金属 - 纳米粒子的层中的漏电极,以及形成形成沟道部分的有机半导体层的工序。 下电极和上电极以自对准方式定位,因此即使使用打印方法也不会发生位置偏移。 因此,可以通过使用印刷方法廉价地制造诸如使用有机半导体的柔性基板的半导体器件。