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    • 114. 发明授权
    • Electron tube
    • 电子管
    • US06586877B1
    • 2003-07-01
    • US09889605
    • 2001-07-19
    • Motohiro SuyamaAkihiro KageyamaMasaharu Muramatsu
    • Motohiro SuyamaAkihiro KageyamaMasaharu Muramatsu
    • H01J4000
    • H01J31/26H01J29/92H01J31/49H01J2229/922H01J2231/50068
    • In an electron tube 1, a space S between a periphery part 15b of a semiconductor device 15 and a stem 11 is filled with an insulating resin 20. The insulating resin 20 functions as a reinforcing member while the electron tube 1 is assembled under high-temperature condition, thereby preventing a bump 16 from coming off a bump connection portion 19. Since the space S is only partly closed by the resin 20, the space between the semiconductor device 15 and the stem 11 is ensured a ventilability. That is, no air reservoir is formed between an electron incidence part 15a at the center of the semiconductor device 15 and the surface C of the stem 11, whereby air expanding at high temperature does not damage the electron incidence part 15a of the back-illuminated semiconductor device 15.
    • 在电子管1中,半导体器件15的周边部分15b和杆11之间的空间S填充有绝缘树脂20.绝缘树脂20用作加强构件,而电子管1组装在高温 从而防止突起16从凸起连接部分19脱落。由于空间S仅部分地被树脂20封闭,因此确保了半导体器件15与杆11之间的空间。 也就是说,在半导体器件15的中心处的电子入射部分15a和杆11的表面C之间没有形成空气储存器,由此在高温下膨胀的空气不会损坏背照射的电子入射部分15a 半导体器件15。
    • 115. 发明授权
    • Integrated semiconductor microchannel plate and planar diode electron flux amplifier and collector
    • 集成半导体微通道板和平面二极管电子通量放大器和集电极
    • US06492657B1
    • 2002-12-10
    • US09492480
    • 2000-01-27
    • Erich BurlefingerCharles M. Tomasetti
    • Erich BurlefingerCharles M. Tomasetti
    • H01L2906
    • H01J43/246H01J31/48H01J31/49H01J2231/5016
    • An electron flux amplifier is provided wherein a microchannel plate (MCP) is monolithically formed with, or bonded to, a semiconductor amplifier. In a preferred embodiment, microchannels are formed to extend into a semiconductor substrate to a predetermined depth from the surface, and a collection diode is formed in the substrate beneath the channels. The collection diode may comprise a single planar diode, or a plurality of electrically isolated diodes to provide for imaging of the electron flux. The electron flux amplifier may be used as a detector in a photomultiplier tube (PMT) having a photoelectronically responsive input surface and one or more accelerating electrodes for directing a photoelectron flux toward the electron flux amplifier.
    • 提供一种电子通量放大器,其中微通道板(MCP)与半导体放大器单片形成或结合到半导体放大器。 在优选实施例中,微通道形成为从表面延伸到预定深度的半导体衬底中,并且在沟道下方的衬底中形成采集二极管。 收集二极管可以包括单个平面二极管或多个电隔离二极管,以提供电子通量的成像。 电子通量放大器可以用作具有光电子响应输入表面的光电倍增管(PMT)中的检测器,以及用于将光电子通量引向电子通量放大器的一个或多个加速电极。