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    • 113. 发明授权
    • Nonvolatile semiconductor memory and methods for manufacturing and using
the same
    • 非易失性半导体存储器及其制造和使用方法
    • US5923978A
    • 1999-07-13
    • US933763
    • 1997-09-23
    • Yosiaki Hisamune
    • Yosiaki Hisamune
    • G11C17/00G11C11/56G11C16/04H01L21/336H01L21/8247H01L29/788H01L29/792
    • H01L27/11521G11C11/5621G11C16/0458G11C16/0475H01L27/115H01L29/66825H01L29/7887G11C2211/5612
    • A nonvolatile semiconductor memory is composed of a number of multi-bit memory cells, each including a first floating gate and a second floating gate formed, side by side, and insulated from each other, on a first gate insulator film formed on a channel region defined between a source region and a drain region, a second gate insulator film formed to cover a surface of each of the floating gates, and a control gate formed on the second gate insulator film. The first floating gate is positioned above a source side of the channel region, and the second floating gate is positioned above a drain side of the channel region. At least the first floating gate is formed of a side wall polysilicon having a gate length remarkably smaller than that of the second floating gate or the control gate. Accordingly, the resulting channel length of the memory cell is remarkably reduced, with the result that the occupying area of each memory cell and the occupying area of a necessary peripheral circuit can be reduced.
    • 非易失性半导体存储器由多个多位存储单元组成,每个多位存储单元包括并排形成并彼此绝缘的第一浮置栅极和第二浮置栅极,形成在沟道区域上的第一栅极绝缘膜上 限定在源极区域和漏极区域之间,形成为覆盖每个浮置栅极的表面的第二栅极绝缘膜,以及形成在第二栅极绝缘膜上的控制栅极。 第一浮栅位于沟道区的源极侧上方,第二浮栅位于沟道区的漏极侧的上方。 至少第一浮栅由栅极长度显着小于第二浮栅或控制栅的栅极长度的侧壁多晶硅形成。 因此,存储单元的结果通道长度显着降低,从而可以减少每个存储单元的占用面积和所需外围电路的占用面积。
    • 117. 发明授权
    • Non-volatile memory having a cell applying to multi-bit data by double
layered floating gate architecture and programming/erasing/reading
method for the same
    • 具有通过双层浮栅结构应用于多位数据的单元的非易失性存储器以及用于其的编程/擦除/读取方法
    • US5753950A
    • 1998-05-19
    • US630184
    • 1996-04-10
    • Toshiaki Kojima
    • Toshiaki Kojima
    • G11C17/00G11C11/56G11C16/02G11C16/04H01L21/8247H01L27/115H01L29/788H01L29/792G11C11/34
    • H01L27/11519G11C11/5621G11C11/5628G11C11/5635G11C11/5642G11C16/0458G11C16/0475H01L29/7887G11C2211/5612H01L27/115
    • An object of the present invention is to contribute to increase of storage capacity of a memory and to cope with an nonlinear parasitic resistance. The non-volatile memory have a cell applying to multi-bit data by means of a double layered floating gate architecture. The cell comprises: heavily doped layers (drains 3.sub.0 -3.sub.2 and source 2) being formed separated from each other along an arrangement direction L in a semiconductor substrate; a first floating gate 4A being disposed along a direction orthogonal to the direction L between the drains and source above the semiconductor substrate; second floating gates 4B.sub.1, 4B.sub.2 which respectively extend across the first floating gate above the first floating gate and lie along the direction L, close to the drain; program gates 6.sub.1, 6.sub.2 disposed correspondingly to one of the second floating gates; and a control gate 5 extending across the gate 4A above the gate 4A and being disposed along the direction L, close to the source.Since the second floating gates individually store carriers corresponding to a data bit and the first floating gate determines a threshold voltage in accordance with a sum amount of carriers stored in all of the second floating gates, two or more bits of data can be saved per one storage cell. It is possible to avoid influence of nonlinear parasitic resistance because a transistor formed by the first floating gate and the control gate is used exclusively for reading.
    • 本发明的目的是有助于增加存储器的存储容量并且应对非线性寄生电阻。 非易失性存储器具有通过双层浮栅结构应用于多位数据的单元。 电池包括:在半导体衬底中沿着布置方向L彼此分离形成的重掺杂层(漏极30-32和源极2) 第一浮栅4A沿着与半导体基板上方的漏极和源极之间的方向L正交的方向设置; 第二浮栅4B1,4B2分别延伸穿过第一浮动栅极上方的第一浮动栅极并且沿着方向L位于靠近漏极的位置; 对应于第二浮动栅极之一设置的编程门61,62; 以及控制门5,其跨过门4A上方的栅极4A延伸,并且沿着方向L设置,靠近源极。 由于第二浮动门单独存储对应于数据位的载波,并且第一浮动栅极根据存储在所有第二浮动栅极中的载波的总和量来确定阈值电压,因此可以每一个存储两个或更多位的数据 存储单元。 由于由第一浮栅和控制栅形成的晶体管专门用于读取,所以可以避免非线性寄生电阻的影响。
    • 119. 发明授权
    • Non-volatile memory cell
    • 非易失性存储单元
    • US5424979A
    • 1995-06-13
    • US245253
    • 1994-05-17
    • Tomoyuki Morii
    • Tomoyuki Morii
    • G11C11/56G11C16/04H01L21/28H01L21/336H01L27/115H01L29/423H01L29/788H01L29/78
    • G11C16/0475G11C11/5621G11C16/0458H01L21/2815H01L29/42324H01L29/66825H01L29/7883G11C2211/5612H01L27/115
    • A non-volatile memory cell according to the present invention includes: a semiconductor layer of a first conductivity type having an upper portion; a pair of impurity diffusion regions of a second conductivity type provided in the upper portion of the semiconductor layer, facing each other at a certain distance; a channel region provided between the pair of impurity diffusion regions in the upper portion of the semiconductor layer; a gate insulating film provided on the upper portion of the semiconductor layer, having thin portions covering at least part of the pair of impurity diffusion regions and a thick portion covering the channel region; floating gate electrodes provided on the thin portions of the gate insulating film; a control gate electrode provided on the thick portion of the gate insulating film and electrically insulated from the floating gate electrodes; and an insulating film provided between the control gate electrode and the floating gate electrodes, capacity-coupling the control gate electrode with the floating gate electrodes, wherein, during writing data, part of electric carriers in the impurity diffusion regions are injected into the floating gate electrodes through the thin portions of the gate insulating film so as to form a Fowler-Nordheim current, depending upon a voltage to be applied to the control gate electrode, whereby electric resistance of the impurity diffusion regions is changed.
    • 根据本发明的非易失性存储单元包括:具有上部的第一导电类型的半导体层; 一对第二导电类型的杂质扩散区域设置在半导体层的上部,以一定距离彼此面对; 沟道区,设置在所述半导体层的上部的所述一对杂质扩散区之间; 设置在所述半导体层的上部的栅绝缘膜,具有覆盖所述一对杂质扩散区域的至少一部分的薄部分和覆盖所述沟道区域的厚部; 设置在栅绝缘膜的薄部上的浮栅电极; 控制栅电极,其设置在所述栅极绝缘膜的厚部并与所述浮栅电极电绝缘; 以及设置在所述控制栅电极和所述浮栅之间的绝缘膜,使所述控制栅电极与所述浮栅电容耦合,其中,在写数据期间,所述杂质扩散区中的一部分电载体注入到所述浮栅 电极通过栅极绝缘膜的薄部分,以形成Fowler-Nordheim电流,这取决于施加到控制栅电极的电压,由此改变杂质扩散区域的电阻。