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    • 113. 发明授权
    • Narrow band excimer laser
    • 窄带准分子激光器
    • US5802094A
    • 1998-09-01
    • US728448
    • 1996-10-10
    • Osamu WakabayashiMasahiko KowakaYukio Kobayashi
    • Osamu WakabayashiMasahiko KowakaYukio Kobayashi
    • G03F7/20H01S3/08H01S3/106H01S3/225H01S3/22
    • H01S3/106H01S3/08009H01S3/225
    • A narrow band excimer laser capable of easily adjusting the rotation of the laser beam by an image rotator provided between a laser chamber and a grating and on the laser beam optical axis. The image rotator is supported with freedom of rotation on the laser beam optical axis and rotates the laser beam about the optical axis so that the plane containing the direction in which the width of the laser beam incident upon the beam expander is narrower is parallel with the plane containing the beam-expansion direction of the beam expander, and the beam expansion direction of the laser beam incident upon the grating is perpendicular to the direction of the grooves of the grating. With this arrangement, a laser beam of narrowed bandwidth can be obtained with high efficiency.
    • 一种窄带准分子激光器,其能够通过设置在激光室和光栅之间的图像旋转体和激光束光轴容易地调节激光束的旋转。 图像旋转器在激光束光轴上具有旋转自由度并且围绕光轴旋转激光束,使得包含入射到扩束器上的激光束的宽度窄的方向的平面平行于 包含光束扩展器的光束扩展方向的平面,并且入射到光栅上的激光束的光束扩展方向垂直于光栅的凹槽的方向。 利用这种布置,可以以高效率获得带宽变窄的激光束。
    • 118. 发明授权
    • Hydraulic pressure control valve
    • 液压控制阀
    • US5058626A
    • 1991-10-22
    • US627909
    • 1990-12-17
    • Tokuro TakaokaTsuto SasakiYukio KobayashiKouichi SaitohSatoshi HamanoToshiya Tatumoto
    • Tokuro TakaokaTsuto SasakiYukio KobayashiKouichi SaitohSatoshi HamanoToshiya Tatumoto
    • B62D5/07B62D5/087B62D6/02G05D16/18F15B13/02
    • B62D5/087B62D6/02G05D16/18Y10T137/8663Y10T137/8671
    • A hydraulic pressure control valve includes a valve body having a slide bore with a circular cross-section, an inlet port opened in an inner surface of the slide bore, a control pressure port and an outlet port at axially spaced-apart distances in this sequence; a valve spool axially slidably fitted in the valve body; and a first variable orifice and a second variable orifice both formed between the valve body and the valve spool. The first variable orifice controls the degree of communication between the inlet port and the control pressure port, and the second variable orifice controls the degree of communication between the control pressure port and the outlet port. In this hydraulic pressure control valve, the valve spool has smaller diameter portions coaxially formed therein to define annular oil passages between the inner surface of the slide bore and the valve spool and each smaller diameter portion has an outer diameter set uniformly over the axially entire length thereof.
    • 液压控制阀包括具有圆形横截面的滑动孔的阀体,在该滑动孔的内表面中敞开的入口,在该顺序上轴向间隔开的距离处的控制压力端口和出口 ; 轴向可滑动地装配在阀体中的阀芯; 以及在阀体和阀芯之间形成的第一可变孔口和第二可变孔口。 第一可变节流孔控制入口和控制压力端口之间的连通程度,第二可变孔控制控制压力端口和出口之间的连通程度。 在该液压控制阀中,阀芯具有同轴地形成在其中的较小直径部分,以在滑动孔的内表面和阀芯之间限定环形油通道,并且每个较小直径部分具有均匀地设置在轴向全长上的外径 其中。