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    • 114. 发明授权
    • Method and its apparatus for detecting defects
    • 检测缺陷的方法及其装置
    • US07834992B2
    • 2010-11-16
    • US11695743
    • 2007-04-03
    • Minoru YoshidaShunji Maeda
    • Minoru YoshidaShunji Maeda
    • G01N21/00
    • G01N21/9501G01N21/4738
    • In the present invention, to make corrective matching thereof, it is designed as follows; position effect of defects coordinates, which are output from an inspection apparatus, is allowed, coordinates of inspected data are mutually corrected, and a state of coincidence or non-coincidence among a plurality sets of inspected data is output or displayed. Inspection data is designed to include kinds, kinds difference and dimension of defects. A state of coincidence or non-coincidence between inspected data is designed to be output or displayed appropriately, by kinds or dimensions, or by a grouping thereof, of a defects object. The same sample is inspected by every time of passing a production step, and a state of data increase or decrease, or coincidence or non-coincidence between the inspected data is designed to be output or displayed.
    • 在本发明中,为了进行校正匹配,设计如下: 允许从检查装置输出的缺陷坐标的位置效果,相互校正被检查数据的坐标,并且输出或显示多组检查数据之间的一致或不一致的状态。 检验数据旨在包括缺陷的种类,种类差异和尺寸。 被检查数据之间的重合或不一致的状态被设计为通过种类或尺寸或其分组来输出或显示缺陷对象。 通过每次通过生产步骤检查相同的样品,并且被设计为输出或显示检查数据之间的数据增加或减少或一致或不一致的状态。
    • 119. 发明授权
    • Method and apparatus for observing and inspecting defects
    • 观察和检查缺陷的方法和装置
    • US07499162B2
    • 2009-03-03
    • US11475667
    • 2006-06-26
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • G01J4/00
    • G01N21/21G01N21/9501G01N21/956G01N21/95607G02B21/0016
    • A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
    • 缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置,用于照亮安装在安装件上的图案样品,并检测由其获得的反射光的光学图像。 还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置,用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置,用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。
    • 120. 发明授权
    • Image forming apparatus and image forming method with cleaner portion
    • 具有清洁部分的图像形成装置和图像形成方法
    • US07477863B2
    • 2009-01-13
    • US11701435
    • 2007-02-02
    • Takeshi WatanabeMasashi TakahashiMinoru YoshidaShoko Shimmura
    • Takeshi WatanabeMasashi TakahashiMinoru YoshidaShoko Shimmura
    • G03G21/00
    • G03G21/0064G03G2215/0119
    • A color image forming apparatus includes an intermediate transfer member, a first forming portion having a first transfer unit, a second forming portion provided downstream from the first forming portion, a third forming portion provided downstream from the second forming portion, a fourth forming portion provided downstream from the third forming portion, and a control portion. The control portion controls a bias of at least one of the corresponding developing unit and the corresponding transfer unit, when transfer of the toner image from the intermediate transfer member to the recording medium is completed, so that a toner-image residue toner material resting on the intermediate transfer member is returned to the corresponding developing unit through the image bearing member of at least one of the first to fourth forming portions.
    • 彩色图像形成装置包括中间转印部件,具有第一转印单元的第一成形部分和设置在第一成形部分下游的第二成形部分,设置在第二成形部分下游的第三成形部分, 在第三形成部分的下游,以及控制部分。 当调色剂图像从中间转印部件转印到记录介质上时,控制部分控制对应的显影单元和相应的转印单元中的至少一个的偏压,使得调色剂图像残留调色剂材料搁置在 中间转印构件通过第一至第四形成部分中的至少一个的图像承载构件返回到相应的显影单元。