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    • 115. 发明授权
    • Field effect transistor with main surface including C-axis
    • 场效应晶体管主表面包括C轴
    • US08089096B2
    • 2012-01-03
    • US11470316
    • 2006-09-06
    • Hidetoshi IshidaMasayuki KurodaTetsuzo Ueda
    • Hidetoshi IshidaMasayuki KurodaTetsuzo Ueda
    • H01L29/778H01L29/04
    • H01L29/7787H01L29/2003
    • A normally-off type field effect transistor includes: a first semiconductor layer which is made of a first hexagonal crystal with 6 mm symmetry and has a main surface including a C-axis of the first hexagonal crystal; a second semiconductor layer which is formed on the main surface of the first semiconductor layer and is made of a second hexagonal crystal with 6 mm symmetry having a band gap different from a band gap of the first hexagonal crystal; and a gate electrode, a source electrode and a drain electrode that are formed on the second semiconductor layer. Here, the film thickness of the first nitride semiconductor layer is 1.5 μm or less and the second semiconductor layer is doped with impurities at a dose of 1×1013 cm−2 or more.
    • 常关型场效应晶体管包括:第一半导体层,其由具有6mm对称性的第一六边形晶体制成并且具有包括第一六边形晶体的C轴的主表面; 第二半导体层,其形成在所述第一半导体层的主表面上,并且由具有与所述第一六边形晶体的带隙不同的带隙的6mm对称的第二六边形晶体制成; 以及形成在第二半导体层上的栅电极,源电极和漏电极。 这里,第一氮化物半导体层的膜厚为1.5μm以下,第二半导体层以1×1013cm-2以上的剂量掺杂杂质。
    • 116. 发明授权
    • Nitride semiconductor laser diode
    • 氮化物半导体激光二极管
    • US07974322B2
    • 2011-07-05
    • US12686839
    • 2010-01-13
    • Tetsuzo UedaDaisuke Ueda
    • Tetsuzo UedaDaisuke Ueda
    • H01S5/00
    • H01S5/32341H01S5/021H01S5/2201
    • A nitride semiconductor laser device includes: a substrate made of silicon in which a plane orientation of a principal surface is a {100} plane; and a semiconductor laminate that includes a plurality of semiconductor layers formed on the substrate and includes a multiple quantum well active layer, each of the plurality of semiconductor layers being made of group III-V nitride. The semiconductor laminate has a plane parallel to a {011} plane which is a plane orientation of silicon as a cleavage face and the cleavage face constructs a facet mirror.
    • 氮化物半导体激光器件包括:由主表面的平面取向为{100}面的硅制成的衬底; 以及半导体层叠体,其具有形成在所述基板上的多个半导体层,所述半导体层叠体具有多量子阱活性层,所述多个半导体层中的每一个均由III-V族氮化物构成。 半导体层叠体具有与{011}平面平行的平面,其是作为解理面的硅的平面取向,并且切割面构成小平面镜。