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    • 113. 发明授权
    • Integrated prober, handler and tester for semiconductor components
    • 用于半导体元件的集成探测器,处理器和测试仪
    • US6024526A
    • 2000-02-15
    • US546236
    • 1995-10-20
    • Alexander H. SlocumLuis A. Muller
    • Alexander H. SlocumLuis A. Muller
    • B25J17/02H01L21/00H01L21/683B25J15/06
    • H01L21/67271B25J17/0216H01L21/67242H01L21/6838
    • An integral unit for use in testing semiconductor components. The unit is designed to manipulate either packaged semiconductor components or semiconductor wafers and present them to a test head. It provides significant space savings because it replaces the need for separate prober, handler and tester units. The integrated unit includes a positioning mechanism with a tool plate that can be changed to grasp either a semiconductor wafer or a tray of semiconductor components. The tool plate uses a vacuum plate. To hold a tray of semiconductor parts, the vacuum plate has numerous independently operable holes. Each hole is positioned behind one semiconductor component and can be engaged or released separately so that the components can be sorted into separate output bins. To hold a wafer, the tool plate has an extendible tongue member that can be inserted into a stack of semiconductor wafers to pick up one wafer in the stack. One disclosed positioning mechanism is a hexapod unit, which, due to its light weight, allows fast and accurate positioning of the semiconductor devices. Multiple positioning mechanisms are used in some instances to increase throughput.
    • 用于测试半导体元件的整体单元。 该单元被设计为操纵封装的半导体元件或半导体晶片并将其呈现给测试头。 它提供了显着的空间节省,因为它代替了单独的探测器,处理器和测试仪单元的需要。 集成单元包括具有工具板的定位机构,其可以改变以掌握半导体晶片或半导体部件的托盘。 工具板使用真空板。 为了保持半导体部件的托盘,真空板具有许多可独立操作的孔。 每个孔定位在一个半导体部件的后面,并且可以单独地接合或释放,使得部件可以被分类到单独的输出箱中。 为了保持晶片,工具板具有可延伸的舌构件,其可以插入到堆叠的半导体晶片中以拾取堆叠中的一个晶片。 一种公开的定位机构是六足单元,其由于其重量轻,允许半导体器件的快速和精确的定位。 在一些情况下使用多个定位机制来增加吞吐量。
    • 119. 发明授权
    • Method of and apparatus for locating and orientating a part on a gripper
and transferring it to a tool while maintaining location and
orientation on the tool
    • US5711647A
    • 1998-01-27
    • US324255
    • 1994-10-17
    • Alexander H. Slocum
    • Alexander H. Slocum
    • B23Q3/18B23Q7/04B65G49/07H01L21/687B65G65/00
    • B23Q7/04B23Q3/18H01L21/68707Y10S414/137Y10S414/141
    • A system for achieving a high degree of location and orientation accuracy and repeatability of a part, such as a semiconductor wafer, for storage of the part in a cassette or placement on a process tool while being able to grasp the part, while maintaining maximally repeatable location, orientation, and cleanliness, while moving it from one tool to another, such as a process tool to a cassette. This is accomplished by providing in one case a pattern of six grooves on the circumference of a part, typically spaced 60 angular degrees apart, and a pattern of three curved contact surfaces on a gripper plate and three curved contact surfaces on a tool plate, where the plates nest such that the three curved surfaces on the gripper plate would make contact with the sides of three of the grooves in the part, and when the gripper plate that is holding the part lowers the part onto the tool plate, the three curved surfaces on the tool plate would make contact with the sides of three of the other grooves in the part as the part is unloaded from the gripper plate and comes to rest on the tool plate. Thus at all times the part position is kinematically uniquely established and mathematically defined in space which provides a high degree of repeatability, and furthermore minimizes stresses placed on the part that would otherwise occur from the typical action of clamping-type gripping mechanisms. In the second case, where it is not feasible to put grooves in the parts, the same nesting plates would each have three sets of support units that each have orthogonal curved surfaces such that when a part rests on the support points, three of the support point curved surfaces support the weight of the part, and the other three orthogonal points restrain the lateral position, In either case, the plates can be stacked horizontally, or at an inclined angle.