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    • 114. 发明授权
    • Image sensor cells
    • 图像传感器单元
    • US07491992B2
    • 2009-02-17
    • US11619024
    • 2007-01-02
    • James W. AdkissonJohn J. Ellis-MonaghanMark D. JaffeRichard J. RasselJeffrey P. Gambino
    • James W. AdkissonJohn J. Ellis-MonaghanMark D. JaffeRichard J. RasselJeffrey P. Gambino
    • H01L31/62H01L31/113
    • H01L27/14609H01L27/1463H01L27/14641H01L27/14643H01L31/035281
    • A structure (and method for forming the same) for an image sensor cell. The method includes providing a semiconductor substrate. Then, a charge collection well is formed in the semiconductor substrate, the charge collection well comprising dopants of a first doping polarity. Next, a surface pinning layer is formed in the charge collection well, the surface pinning layer comprising dopants of a second doping polarity opposite to the first doping polarity. Then, an electrically conductive push electrode is formed in direct physical contact with the surface pinning layer but not in direct physical contact with the charge collection well. Then, a transfer transistor is formed on the semiconductor substrate. The transfer transistor includes first and second source/drain regions and a channel region. The first and second source/drain regions comprise dopants of the first doping polarity. The first source/drain region is in direct physical contact with the charge collection well.
    • 用于图像传感器单元的结构(及其形成方法)。 该方法包括提供半导体衬底。 然后,在半导体衬底中形成电荷收集阱,电荷收集阱包含第一掺杂极性的掺杂剂。 接下来,在电荷收集阱中形成表面钉扎层,表面钉扎层包括与第一掺杂极性相反的第二掺杂极性的掺杂剂。 然后,导电的推动电极形成为与表面钉扎层直接物理接触,但不与电荷收集阱直接物理接触。 然后,在半导体衬底上形成传输晶体管。 传输晶体管包括第一和第二源极/漏极区域和沟道区域。 第一和第二源/漏区包括第一掺杂极性的掺杂剂。 第一源极/漏极区域与电荷收集阱直接物理接触。
    • 117. 发明授权
    • Damascene copper wiring image sensor
    • 大马士革铜线接线图像传感器
    • US07193289B2
    • 2007-03-20
    • US10904807
    • 2004-11-30
    • James W. AdkissonJeffrey P. GambinoMark D. JaffeRobert K. LeidyAnthony K. Stamper
    • James W. AdkissonJeffrey P. GambinoMark D. JaffeRobert K. LeidyAnthony K. Stamper
    • H01L27/14
    • H01L27/14685H01L21/76819H01L21/76834H01L21/76838H01L27/14621H01L27/14627H01L27/14636H01L27/14687
    • An image sensor array and method of fabrication wherein the sensor includes Copper (Cu) metallization levels allowing for incorporation of a thinner interlevel dielectric stack with improved thickness uniformity to result in a pixel array exhibiting increased light sensitivity. In the sensor array, each Cu metallization level includes a Cu metal wire structure formed at locations between each array pixel and, a barrier material layer is formed on top each Cu metal wire structure that traverses the pixel optical path. By implementing a single mask or self-aligned mask methodology, a single etch is conducted to completely remove the interlevel dielectric and barrier layers that traverse the optical path. The etched opening is then refilled with dielectric material. Prior to depositing the refill dielectric, a layer of either reflective or absorptive material is formed along the sidewalls of the etched opening to improve sensitivity of the pixels by either reflecting light to the underlying photodiode or by eliminating light reflections.
    • 一种图像传感器阵列和制造方法,其中传感器包括铜(Cu)金属化水平,允许结合更薄的层间电介质叠层,改进的厚度均匀性,以产生呈现增加的光敏度的像素阵列。 在传感器阵列中,每个Cu金属化层包括在每个阵列像素之间的位置处形成的Cu金属线结构,并且阻挡材料层形成在穿过像素光路的每个Cu金属线结构上。 通过实现单掩模或自对准掩模方法,进行单次蚀刻以完全去除穿过光路的层间电介质层和阻挡层。 然后将蚀刻的开口用电介质材料重新填充。 在沉积再充填电介质之前,沿蚀刻开口的侧壁形成反射或吸收材料层,以通过将光反射到下面的光电二极管或通过消除光反射来提高像素的灵敏度。