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    • 111. 发明授权
    • Piezoelectric diaphragm structure with outer edge electrode
    • 压电膜片结构,外缘电极
    • US07084555B2
    • 2006-08-01
    • US10739478
    • 2003-12-18
    • John R. BachellerieSteven A. BuhlerJohn S. FitchMeng H. LeanKarl A. Littau
    • John R. BachellerieSteven A. BuhlerJohn S. FitchMeng H. LeanKarl A. Littau
    • H01L41/08
    • H01L41/0973H01L41/047
    • A multi-electrode piezoelectric diaphragm structure includes a diaphragm, piezoelectric material located on the diaphragm, which is defined as having a first area, and a second area. The first area of the piezoelectric is poled in a first direction, and the second area of the piezoelectric is poled in a second direction. The poled first direction is in a Z-axis of the piezoelectric and the poled second direction is in a Radial axis of the piezoelectric. A first electrode is positioned in the first area, on the first surface, of the piezoelectric. A second electrode is positioned in the second area, on the first surface, of the piezoelectric. A third electrode is located on a second surface of the piezoelectric. The application of voltages to the first, second and third electrodes generates electric fields in the piezoelectric material resulting in actuation of the piezoelectric material, or the application of pressure or strain to the diaphragm generates electric potentials at the first, second and third electrodes.
    • 多电极压电膜结构包括隔膜,位于膜片上的压电材料,其被定义为具有第一区域,第二区域。 压电体的第一区域沿第一方向极化,并且压电体的第二区域在第二方向上极化。 极化的第一方向在压电体的Z轴上,并且极化的第二方向处于压电体的径向轴线。 第一电极位于压电体的第一表面的第一区域中。 第二电极位于压电体的第一表面的第二区域中。 第三电极位于压电体的第二表面上。 施加电压到第一,第二和第三电极在压电材料中产生电场,导致压电材料的致动,或施加压力或应变到隔膜在第一,第二和第三电极处产生电位。