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    • 110. 发明授权
    • Method of forming single-crystal semiconductor layers and photovaltaic cell thereon
    • 在其上形成单晶半导体层和光电池的方法
    • US09356171B2
    • 2016-05-31
    • US13401206
    • 2012-02-21
    • Jifeng LiuXiaoxin Wang
    • Jifeng LiuXiaoxin Wang
    • H01L31/0368C30B1/02C30B29/06H01L31/076H01L31/18
    • H01L31/0368C30B1/02C30B1/023C30B29/06H01L31/03682H01L31/076H01L31/1872Y02E10/546Y02E10/548Y02P70/521
    • A method for forming single crystal or large-crystal-grain thin-film layers deposits a thin-film amorphous, nanocrystalline, microcrystalline, or polycrystalline layer, and laser-heats a seed spot having size on the order of a critical nucleation size of the thin-film layer. The single-crystal seed spot is extended into a single-crystal seed line by laser-heating one or more crystallization zones adjacent to the seed spot and drawing the zone across the thin-film layer. The single-crystal seed line is extended across the thin-film material layer into a single-crystal layer by laser-heating an adjacent linear crystallization zone and drawing the crystallization zone across the thin-film layer. Photovoltaic cells may be formed in or on the single-crystal layer. Tandem photovoltaic devices may be formed using one or several iterations of the method. The method may also be used to form single-crystal semiconductor thin-film transistors, such as for display devices, or to form single-crystal superconductor layers.
    • 用于形成单晶或大晶粒薄膜层的方法沉积薄膜非晶,纳米晶体,微晶或多晶层,并且激光加热具有临界成核尺寸级别的大小的晶种点 薄膜层。 通过激光加热与种子斑点相邻的一个或多个结晶区域并将该区域横穿薄膜层,将单晶种子斑点延伸到单晶种子线中。 单晶种子线通过激光加热相邻的线性结晶区并在薄膜层上拉伸结晶区,在薄膜材料层上延伸成单晶层。 光电池可以形成在单晶层中或单晶层上。 可以使用该方法的一个或多个迭代来形成串联光伏器件。 该方法也可用于形成诸如显示器件的单晶半导体薄膜晶体管,或者形成单晶超导体层。