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    • 101. 发明授权
    • High optical rejection optical spectrum analyzer/monochromator
    • 高光抑制光谱分析仪/单色仪
    • US06930776B2
    • 2005-08-16
    • US10625528
    • 2003-07-24
    • Gang HeDaniel Gariépy
    • Gang HeDaniel Gariépy
    • G01J3/18G01J3/28
    • G01J3/02G01J3/0202G01J3/021G01J3/0224G01J3/0294G01J3/18G01J2003/1819
    • A dual-channel, double-filtering, multi-pass OSA having a narrow spectral linewidth response and high ORR comprises a diffraction grating (DG), two input ports (P1′, P1″) for directing first and second input light beams (LR, LT) onto the grating; a retroreflector (RAM1) for returning the dispersed light beams to the grating for dispersion again; two intermediate output ports (P2′, P2″) for receiving the twice-dispersed light beams; two secondary input ports (P3′, P3″) coupled to the intermediate output ports by polarization-maintaining waveguides (PMF2′, PMF2″) for directing the light beams onto the grating a third time, with their SOPs having a predetermined orientation relative to the SOPs of the first and second light beams when first incident upon the grating, the retroreflector (RAM1) returning the three-times-dispersed light beams to the grating for dispersion a fourth time; and two output ports (P4′, P4″) for receiving the light beams after dispersion the fourth time.
    • 具有窄光谱线宽响应和高ORR的双通道双滤波多通道OSA包括衍射光栅(DG),用于引导第一和第二输入光的两个输入端口(P 1',P 1“) 光束(LR,LT)到光栅上; 用于将分散的光束返回到光栅以用于再次分散的后向反射器(RAM1); 用于接收两倍分散光束的两个中间输出端口(P 2',P 2“); 通过偏振保持波导(PMF 2',PMF 2“)耦合到中间输出端口的用于将光束第三次引导到光栅上的两个次级输入端口(P 3',P 3”),其SOP 当第一次入射到光栅上时,具有相对于第一和第二光束的SOP的预定取向,后向反射器(RAM1)将三次分散的光束第四次返回到光栅以进行分散; 以及用于在第四次分散之后接收光束的两个输出端口(P 4',P 4“)。
    • 102. 发明授权
    • Optical spectrum analyzer
    • 光谱分析仪
    • US06636306B2
    • 2003-10-21
    • US09753673
    • 2001-01-04
    • Gang HeDaniel GariépyGregory Walter Schinn
    • Gang HeDaniel GariépyGregory Walter Schinn
    • G01J328
    • G01J3/447G01J3/12
    • An optical spectrum analyzer comprises a diffraction grating (DG), a polarization decomposing unit (PDM) for decomposing the input light beam into first and second light beams having mutually-perpendicular linear states of polarization, and two output ports (FP2/1, FP2/2) each for receiving from the grating, substantially exclusively, a respective one of the polarized light beams (LT, LR) after diffraction by the diffraction grating (DG). Each of the linearly-polarized light beams is directed onto the diffraction grating with its linear state of polarization at any prescribed angle to a corresponding plane of diffraction of the diffraction grating The arrangement is such that the state of polarization of the light beams, at any particular wavelength within an operating band of the analyzer remains substantially unchanged with respect to time, The analyzer also may have a reflector (RAM) for reflecting the light beams leaving the diffraction grating after diffraction a first time so as to return them to the diffraction grating for diffraction a second time.
    • 光谱分析仪包括衍射光栅(DG),用于将输入光束分解成具有相互垂直的极化状态的第一和第二光束的偏振分解单元(PDM)和两个输出端口(FP2 / 1,FP2 / 2),每个用于在衍射光栅(DG)衍射之后从光栅接收基本上仅相应的一个偏振光束(LT,LR)。 每个线性偏振光束以与其衍射光栅的相应衍射平面成任意规定角度的线性极化状态被引导到衍射光栅上。这种布置使得光束的偏振状态 分析仪的工作频带内的特定波长相对于时间保持基本不变。分析仪还可以具有用于在衍射之后第一次反射离开衍射光栅的光束的反射器(RAM),以便将它们返回到衍射光栅 用于衍射第二次。
    • 103. 发明授权
    • Polarization independent photodetector device and method of making same
    • 极化独立光电探测器及其制作方法
    • US06621067B2
    • 2003-09-16
    • US09796796
    • 2001-03-02
    • Gang HeFrançois BabinMartin TremblayMarc BretonSteeve PotvinGregory Walter Schinn
    • Gang HeFrançois BabinMartin TremblayMarc BretonSteeve PotvinGregory Walter Schinn
    • G02F101
    • H01L31/0203G02B6/4204G02B6/4292H01L31/02325
    • A photodetector device comprising a photosensitive detector (12; 96) and one or more interfaces (20′, 20″, 28, 98) between dissimilar media is configured so that a light beam (LB) for detection will pass through the interface(s) along a beam axis that is not normal to the interface(s). The deviation (&thgr;) from the normal will be such that polarization dependent transmission introduced at the interface(s) will compensate for inherent polarization dependency of the detector (12; 96). The deviation may be achieved by inclining the interface(s) relative to a predetermined direction along which the light beam will be incident. Where the photosensitive detector is in a housing (84) with a window (20) through which the light beam enters the housing, the housing can be tilted. In such as case, there are three interfaces, one (28; 98) at the surface of the detector (12; 96), and one at each surface (20′, 20″) of the window (20). Alternatively, the detector surface and/or the window could be tilted. Where a pigtail fiber (116) is permanently attached to the photodetector device to input the light beam through an interposed lens (106), the end of the pigtail fiber may be offset laterally from the lens optical axis (LOA) so that the beam axis deviates from the normal by such an angle that the resulting polarization dependent transmission (PDT) substantially corrects for polarization dependent response (PDR) of the photosensitive detector. An end facet of the pigtail fiber, the lens, and/or the window may be inclined so that they are not perpendicular to the propagation direction of the light beam so as to reduce interference and backreflection effects.
    • 包括光敏检测器(12; 96)和不同介质之间的一个或多个接口(20',20“,28,98)的光检测器设备被配置为使得用于检测的光束(LB)将通过接口 s)沿着不垂直于接口的波束轴。 与正常的偏差(θ)将使得在界面处引入的偏振相关传输将补偿检测器(12; 96)的固有偏振依赖性。 可以通过使界面相对于光束入射的预定方向倾斜来实现偏差。 在光敏检测器位于具有窗口(20)的壳体(84)中,光束通过该窗口进入壳体,壳体可以倾斜。 在这种情况下,在检测器(12; 96)的表面处有三个界面,一个(28; 98),一个在窗口(20)的每个表面(20',20“)处。 或者,检测器表面和/或窗口可以倾斜。 在猪尾纤维(116)永久地附接到光电检测器装置以通过中介透镜(106)输入光束的情况下,猪尾纤维的端部可以从透镜光轴(LOA)侧向偏移,使得光束轴线 偏离正常,使得所得到的偏振相关透射(PDT)基本上校正光敏检测器的偏振相关响应(PDR)。 引线纤维,透镜和/或窗口的端面可以倾斜,使得它们不垂直于光束的传播方向,以便减少干涉和背反射效应。
    • 104. 发明授权
    • Method and apparatus for slurry distribution profile control in chemical-mechanical planarization
    • 化学机械平面化中浆料分布剖面控制的方法和装置
    • US06514863B1
    • 2003-02-04
    • US09513709
    • 2000-02-25
    • Gang He
    • Gang He
    • H01L21302
    • B24B37/04B24B57/02H01L21/31053
    • A nonplanar substrate surface is substantially uniformly planarized by a chemical mechanical planarization (CMP) process. The CMP process uses multiple sources of slurry delivered in between a slurry distribution screen and a slurry membrane of the CMP apparatus. The multiple slurry sources have differing chemical and physical compositions, and are delivered to different locations along the membrane. The slurries bleed into each other during polish to form a radially-variable, slurry abrasiveness concentration gradient. As a result, there are areas with a greater abrasiveness concentration of slurry, and hence a greater frictional contact. The slurry flow rate and concentration is adjusted along the wafer surface according to the non-uniformly planar areas of the wafer. Consequently, uniform planarization is substantially achieved.
    • 通过化学机械平坦化(CMP)工艺基本均匀地平坦化非平面基底表面。 CMP工艺使用在浆料分布筛和CMP装置的浆膜之间输送的多种浆料来源。 多个浆料源具有不同的化学和物理组成,并且沿着膜被递送到不同的位置。 在抛光期间,浆料彼此渗出以形成径向变化的浆料磨蚀性浓度梯度。 因此,存在具有较大磨料浓度的区域,因此具有较大的摩擦接触。 根据晶片的非均匀平面区域,沿着晶片表面调整浆料流速和浓度。 因此,基本上实现了均匀的平坦化。
    • 106. 发明授权
    • Encoder signal analysis system for high-resolution position measurement
    • 用于高分辨率位置测量的编码器信号分析系统
    • US5933106A
    • 1999-08-03
    • US890741
    • 1997-07-11
    • Gang HeHarry A. Atwater
    • Gang HeHarry A. Atwater
    • H03M5/22
    • H03M5/22
    • A signal analysis system for processing quadrature analog waveforms from an encoder. High-resolution position measurements for external measurement devices are obtained. A hardware component receives the quadrature analog signals from the encoder and processes these signals to generate low and high-resolution waveforms. These waveforms are then further processed and sent as first and second data streams to a computational component of the signal analysis system. The absolute phase angle (.THETA.) of the encoder's analog signal is determined by processing the data streams with the computational component. .THETA. is compared to a series of calibration factors to determine the position of the translating component of the external measurement device.
    • 用于处理来自编码器的正交模拟波形的信号分析系统。 获得外部测量装置的高分辨率位置测量。 硬件组件从编码器接收正交模拟信号,并处理这些信号以产生低分辨率和高分辨率波形。 然后将这些波形进一步处理并作为第一和第二数据流发送到信号分析系统的计算部件。 编码器模拟信号的绝对相位角(THETA)是通过用计算分量处理数据流来确定的。 将THETA与一系列校准因子进行比较,以确定外部测量装置的平移部件的位置。
    • 107. 发明授权
    • Reference-based in-band OSNR measurement on polarization-multiplexed signals
    • 偏振复用信号的基于参考的带内OSNR测量
    • US09112604B2
    • 2015-08-18
    • US13501708
    • 2011-02-14
    • Daniel GariepyGang He
    • Daniel GariepyGang He
    • H04B17/00H04B10/079
    • H04B10/07953
    • There is provided a method for determining an in-band noise parameter, such as the Optical Signal-to-Noise Ratio (OSNR), on an optical signal-under-test (SUT) propagating along an optical communication link and comprising a data-carrying signal contribution of any arbitrary degree of polarization and a noise contribution. A spectral shape trace of data-carrying signal contribution in the SUT is estimated using a reference optical spectrum trace of a reference signal which comprises a data-carrying signal contribution that is spectrally representative of the data-carrying signal contribution of the SUT and a noise contribution which is at least approximately known. The data-carrying signal contribution is mathematically discriminated from said noise contribution in the SUT using the spectral shape trace and the test optical spectrum trace. The in-band noise parameter is then determined at least from the mathematically discriminated noise contribution.
    • 提供了一种用于在沿着光通信链路传播的光信号在测试(SUT)上确定带内噪声参数(诸如光信噪比(OSNR))的方法,并且包括数据 - 携带任何任意极化度和噪声贡献的信号贡献。 使用参考信号的参考光谱轨迹来估计SUT中的数据携带信号贡献的谱形轨迹,该参考信号包括频谱上表示SUT的数据携带信号贡献的数据携带信号贡献,以及噪声 贡献至少大致已知。 使用光谱形状轨迹和测试光谱轨迹,数据载入信号贡献在数学上与SUT中的噪声贡献区分开。 至少从数学识别的噪声贡献中确定带内噪声参数。