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    • 104. 发明申请
    • SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
    • 半导体集成电路设备
    • US20080169486A1
    • 2008-07-17
    • US11963808
    • 2007-12-22
    • Shunsuke ToyoshimaKazuo TanakaMasaru Iwabuchi
    • Shunsuke ToyoshimaKazuo TanakaMasaru Iwabuchi
    • H01L27/06
    • H01L27/0251H01L24/06H01L2224/05553H01L2924/12036H01L2924/13091H01L2924/14H01L2924/00
    • To provide a semiconductor integrated circuit device advantageous against EM and ESD. A plurality of I/O cells; a power wire formed of a plurality of interconnect layers over the above-described I/O cells; a bonding pad formed in an upper layer of the power wire and in a position corresponding to the I/O cell; and lead-out areas capable of electrically coupling the I/O cell to the bonding pad are provided. The above-described power wire includes a first power wire and a second power wire, and the above-described I/O cell includes first elements coupled to the first power wire and second elements coupled to the second power wire. The first element is placed on the first power wire side, and the second element is placed on the second power wire side. The first power wire and the second power wire can allow for a high current due to the interconnect layers over the I/O cells, thus having robustness against EM and ESD.
    • 提供有利于抗EM和ESD的半导体集成电路器件。 多个I / O单元; 由上述I / O单元上的多个互连层形成的电力线; 焊盘,形成在所述电力线的上层并且与所述I / O单元相对应的位置; 并且提供能够将I / O单元电耦合到接合焊盘的导出区域。 上述电源线包括第一电源线和第二电源线,并且上述I / O单元包括耦合到第一电力线的第一元件和耦合到第二电力线的第二元件。 第一元件放置在第一电源线侧,第二元件放置在第二电源线侧。 第一电源线和第二电源线可以由于I / O单元上的互连层而允许高电流,因此具有抵抗EM和ESD的鲁棒性。
    • 106. 发明授权
    • Atmospheric pressure combustion turbine system
    • 大气压燃气轮机系统
    • US07204077B2
    • 2007-04-17
    • US10529488
    • 2003-10-03
    • Kazuo TanakaSeiji YamashitaEiichi HaradaNorihiko IkiSanyo TakahashiHirohide Furutani
    • Kazuo TanakaSeiji YamashitaEiichi HaradaNorihiko IkiSanyo TakahashiHirohide Furutani
    • F02C3/30F02C3/34F02C7/10
    • F02C7/08F02C3/30F02C3/34F02C7/10F02C7/143F05D2220/60F05D2260/212Y02E20/14
    • Techniques suitable for recovering energy from a high-temperature gas of an ordinary pressure are provided. A turbomachine has a turbine 16 and compressors 20 and 24. A combustor 12 is disposed at a stage above the turbine 16. A power generating system generates power by passing a working fluid for the turbomachine through the combustor 12, the turbine 16 and the compressors 20 and 24 in that order. An atmospheric pressure combustion turbine system includes: a regenerative heat exchanger 14 capable of cooling a high-temperature working gas discharged from the turbine 16 by making the high-temperature working gas exchange heat with a mixed gas produced by mixing an exhaust gas and air and moistened with hot water; coolers 22 and 26 connected to the entrance of the compressors 20 and 24, respectively, to cool the working gas by making the working gas exchange heat with water; and a humidifier 30 for producing a mixed gas by heating air by mixing part of the exhaust gas discharged from the compressor 24 in the air and humidifying the heated air with the hot water produced by heating water by the heat of the working gas through heat exchange. The mixed gas produced by the humidifier is supplied to the regenerative heat exchanger 14, the regenerative heat exchanger 14 produces a high-temperature, humid, mixed gas by making the mixed gas exchange heat with the high-temperature working gas discharged through the exit of the turbine 16 to heat the mixed gas, and the heated, high-temperature, humid, mixed gas is supplied to the combustor 12.
    • 提供了适合于从常压的高温气体中回收能量的技术。 涡轮机具有涡轮16和压缩机20和24。 燃烧器12设置在涡轮机16上方的阶段。 发电系统通过使涡轮机的工作流体依次通过燃烧器12,涡轮机16和压缩机20和24而产生动力。 大气压燃气轮机系统包括:再生式热交换器14,其能够通过使高温工作气体与通过混合排气和空气而产生的混合气体进行交换热量来冷却从涡轮16排出的高温工作气体;以及 用热水润湿; 冷却器22和26分别连接到压缩机20和24的入口,以通过使工作气体与水交换热量来冷却工作气体; 以及加湿器30,用于通过将来自压缩机24的排气的一部分混合在空气中来加热空气,并将加热的空气与通过热交换的工作气体的热量加热水产生的热水一起加热产生混合气体 。 由加湿器生成的混合气体被供给到再生热交换器14,再生热交换器14通过与通过出口的排出口排出的高温工作气体进行混合气体交换热而产生高温,潮湿混合气体 涡轮机16加热混合气体,将加热的,高温,潮湿的混合气体供给至燃烧器12。
    • 107. 发明申请
    • Semiconductor integrated circuit
    • 半导体集成电路
    • US20070019493A1
    • 2007-01-25
    • US11452238
    • 2006-06-14
    • Takeo TobaKazuo TanakaShunsuke Toyoshima
    • Takeo TobaKazuo TanakaShunsuke Toyoshima
    • G11C5/14
    • G11C5/147G11C7/1066G11C11/4074
    • The present invention provides a semiconductor integrated circuit having two kinds of input/output circuits realizing higher speed and higher packing density with rational configuration. The semiconductor integrated circuit has a first input/output circuit operating on a first power source voltage, an internal circuit operating on a second power source voltage lower than the first power source voltage, and a second input/output circuit operating on a third power source voltage lower than the first power source voltage. In an output circuit of the first input/output circuit, signal amplitude corresponding to the second power source voltage is converted to signal amplitude corresponding to the first power source voltage by a level shifter, and a P-channel MOSFET and an N-channel MOSFET constructing the output circuit are driven. In an output circuit of the second input/output circuit, a drive signal is generated by a level shifter in a manner similar to the above to drive second and third N-channel MOSFETs for generating an output signal having signal amplitude corresponding to the third power source voltage.
    • 本发明提供一种具有两种输入/输出电路的半导体集成电路,其实现了具有合理配置的更高速度和更高的封装密度。 半导体集成电路具有以第一电源电压工作的第一输入/输出电路,以及低于第一电源电压的第二电源电压运行的内部电路,以及在第三电源上运行的第二输入/输出电路 电压低于第一电源电压。 在第一输入/输出电路的输出电路中,对应于第二电源电压的信号幅度由电平移位器转换成对应于第一电源电压的信号幅度,以及P沟道MOSFET和N沟道MOSFET 驱动输出电路的构造。 在第二输入/输出电路的输出电路中,以与上述类似的方式由电平转换器产生驱动信号,以驱动第二和第三N沟道MOSFET,以产生具有对应于第三功率的信号幅度的输出信号 源电压。
    • 108. 发明申请
    • Fuel cell/constant pressure turbine/hybrid system
    • 燃料电池/恒压汽轮机/混合动力系统
    • US20060222919A1
    • 2006-10-05
    • US10553692
    • 2004-06-29
    • Kazuo TanakaEiichi HaradaTakatoshi ShojiJunichi KitajimaSeiji Yamashita
    • Kazuo TanakaEiichi HaradaTakatoshi ShojiJunichi KitajimaSeiji Yamashita
    • H01M8/04
    • H01M8/04022F02C6/00F05D2220/60H01M8/0662H01M16/00
    • A fuel cell-atmospheric-pressure turbine hybrid system uses the thermal energy of a cell exhaust gas discharged from an atmospheric-pressure, high-temperature fuel cell effectively, does not need any additional emergency protective device, and enables the use of lightweight, easy-to-process structural and piping materials to reduces the cost. The fuel cell-atmospheric-pressure turbine hybrid system includes: a combustor 2 for burning an exhaust gas G1 discharged from an atmospheric-pressure, high-temperature fuel cell 1; a turbine 3 in which a combustion gas G2 discharged from the combustor 2 expands and the pressure of the combustion gas G2 drops to a negative pressure; a compressor 4 for compressing an exhaust gas G3 discharged from the turbine 3 to increase the pressure of the exhaust gas G3; and a heat exchanger 5 for transferring heat from the high-temperature exhaust gas G3 discharged from the turbine 3 to low-temperature air A to be supplied to the fuel cell 1.
    • 燃料电池 - 大气压涡轮机混合动力系统有效地利用从大气压高温燃料电池排出的电池废气的热能,不需要任何额外的紧急保护装置,并且能够使用轻便,容易 过程结构和管道材料,以降低成本。 燃料电池 - 大气压涡轮机混合动力系统包括:用于燃烧从大气压高温燃料电池1排出的废气G 1的燃烧器2; 从燃烧器2排出的燃烧气体G 2膨胀并且燃烧气体G 2的压力下降到负压的涡轮3; 用于压缩从涡轮3排出的废气G 3的压缩机4,以增加废气G 3的压力; 以及用于将从涡轮3排出的高温排气G 3的热量传递给供给到燃料电池1的低温空气A的热交换器5。
    • 109. 发明申请
    • Substrate processing apparatus and substrate processing method
    • 基板加工装置及基板处理方法
    • US20060188240A1
    • 2006-08-24
    • US10550202
    • 2004-06-18
    • Kazuo TanakaMasaaki UenoMasashi Sugishita
    • Kazuo TanakaMasaaki UenoMasashi Sugishita
    • F26B19/00
    • H01L21/67248G05D23/1928G05D23/22H01L21/67109
    • It is an object of the invention to provide a substrate processing equipment that can predict a temperature of a substrate and easily control temperature of the substrate. Formed in a reactor (processing chamber) 3 are four temperature adjustment zones, of which setting and adjustment of temperature can be made by zone heaters 340-1 to 340-4. A temperature controller 4 mixes temperatures detected by inner thermocouples 302-1 to 302-4 and outer thermocouples 342-1 to 342-4 to calculate predicted temperatures of substrates by means of the first-order lag calculation on the basis of time constants of temperatures of substrates heated by the zone heaters 340-1 to 340-4. Also, the temperature controller 4 calculates electric power values (operating variables) for the zone heaters 340-1 to 340-4 with the use of predicted temperatures of substrates to output the same to the zone heaters 340-1 to 340-4.
    • 本发明的目的是提供一种能够预测基板的温度并容易地控制基板的温度的基板处理设备。 在反应器(处理室)3中形成的是四个温度调节区域,其中温度的设定和调节可以由区域加热器340-1至340-4进行。 温度控制器4将由内部热电偶302-1至302-4检测的温度与外部热电偶342-1至342-4混合,以基于温度的时间常数通过一阶滞后计算来计算衬底的预测温度 的区域加热器340-1至340-4加热的基底。 此外,温度控制器4使用基板的预测温度来计算区域加热器340-1至340-4的电功率值(操作变量),以将其输出到区域加热器340-1至340-4。