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101. 发明申请

US20080290865A1 Method of forecasting and detecting polishing endpoint and the device thereof and real time film thickness monitoring method and the device thereof 有权
标题翻译：抛光终点预测与检测方法及其装置及实时膜厚监测方法及其装置
公开(公告)号：US20080290865A1
公开(公告)日：2008-11-27
申请号：US11975195
申请日：2007-10-18
申请人： Takashi Fujita , Toshiyuki Yokoyama , Keita Kitade
发明人： Takashi Fujita , Toshiyuki Yokoyama , Keita Kitade
IPC分类号： G01B7/06
CPC分类号： H01L22/26 , B24B37/013 , B24B49/04 , B24B49/105 , H01L21/3212 , H01L2924/0002 , H01L2924/00
摘要： An object of the present invention is to provide a method of forecasting and detecting a polishing endpoint and the device thereof and a real time film thickness monitoring method and the device thereof capable of suppressing a Joule heat loss to the minimum due to an eddy current, and precisely forecasting and detecting the polishing endpoint, and moreover, precisely calculating a remaining film amount to be removed and a polishing rate and the like on the spot so as to be able to accurately evaluate whether the predetermined conductive film is appropriately removed.To achieve the above described object, the present invention brings an inductor in a high frequency inductor type sensor close to the predetermined conductive film, and monitors a flux change induced in the predetermined conductive film by the flux formed by the inductor 36, and based on a flux change when a film thickness during the polishing becomes a film thickness corresponding to a skin depth decided with the material of the predetermined conductive film as a factor, detects a film thickness reference point, and forecasts the polishing endpoint from this film thickness reference point, and provides a method of calculating on the spot a polishing rate and a remaining film amount to be removed.
摘要翻译：本发明的目的是提供一种预测和检测抛光终点及其装置的方法及其实时膜厚监测方法及其能够由于涡电流而将焦耳热损失抑制到最小的装置，精确地预测和检测抛光终点，并且还准确地计算待去除的剩余膜量和现场抛光速率等，以便能够准确地评估预定导电膜是否被适当地去除。为了实现上述目的，本发明使电感器在靠近预定导电膜的高频电感器型传感器中带动，并且通过由电感器36形成的磁通来监测在预定导电膜中感应的磁通量变化，并且基于当抛光期间的膜厚度变为与由预定导电膜的材料确定的皮肤深度相对应的皮肤深度的膜厚度时的通量变化，检测膜厚度参考点，并且从该膜厚参考点预测抛光终点，并且提供一种现场计算要除去的抛光速率和剩余膜量的方法。

102. 发明申请

US20080242197A1 Wafer polish monitoring method and device 有权
标题翻译：晶圆抛光监测方法及装置
公开(公告)号：US20080242197A1
公开(公告)日：2008-10-02
申请号：US12008350
申请日：2008-01-10
申请人： Takashi Fujita , Toshiyuki Yokoyama , Keita Kitade
发明人： Takashi Fujita , Toshiyuki Yokoyama , Keita Kitade
IPC分类号： B24B49/00
CPC分类号： B24B49/10 , H01L22/26
摘要： The present invention aims to provide a wafer polish monitoring method and device for detecting the end point of the polishing of a conductive film with high precision and accuracy by monitoring the variation of the film thickness of the conductive film without adverse influence of slurry or the like after the film thickness of the conductive film decreases to an extremely small film thickness defined by the skin depth. To achieve this objective, the present invention provides a wafer polish monitoring method by which a high-frequency transmission path is formed in a portion facing the conductive film on the surface of the wafer, the polishing removal state of the conductive film is evaluated based at least on the transmitted electromagnetic waves passing through the high-frequency transmission path or the reflected electromagnetic waves that are reflected without passing through the high-frequency transmission path, and the end point of the polishing removal and the point equivalent to the end point of the polishing removal are detected.
摘要翻译：本发明的目的在于提供一种晶片抛光剂监测方法和装置，其通过监测导电膜的膜厚变化而不受浆料等的不利影响，高精度和高精度地检测导电膜的抛光终点在导电膜的膜厚度降低到由皮肤深度限定的非常小的膜厚度之后。为了达到上述目的，本发明提供了一种在晶片表面上与导电膜相对的部分形成高频传输路径的晶片抛光监视方法，基于对穿过高频传输路径的透射电磁波或反射的电磁波至少不经过高频传输路径，抛光去除的终点和等同于检测到抛光去除。

103. 发明申请

US20080219718A1 Transfer-fixing device, image forming apparatus including the transfer-fixing device, and transfer-fixing method 有权
标题翻译：转印固定装置，包括转印固定装置的图像形成装置和转印固定方法
公开(公告)号：US20080219718A1
公开(公告)日：2008-09-11
申请号：US12073501
申请日：2008-03-06
申请人： Takashi Fujita , Shin Kayahara , Takeshi Takemoto , Hiromitsu Takagaki , Takashi Seto , Hirohmi Tamura
发明人： Takashi Fujita , Shin Kayahara , Takeshi Takemoto , Hiromitsu Takagaki , Takashi Seto , Hirohmi Tamura
IPC分类号： G03G15/16 , G03G15/20
CPC分类号： G03G15/161 , G03G15/2064 , G03G2215/0129 , G03G2215/1685 , G03G2215/2074
摘要： A transfer-fixing device transfers and fixes a toner image onto a transfer-fixing surface of a recording medium, and includes a transfer-fixing member, a pressing member, a heating member, and a temperature equalization member. The transfer-fixing member carries the toner image. The pressing member pressingly contacts the transfer-fixing member to form a nip between the pressing member and the transfer-fixing member through which the recording medium passes. The heating member heats the transfer-fixing surface of the recording medium conveyed toward the nip so that the recording medium reaches the nip before a temperature of a back surface opposite the transfer-fixing surface of the recording medium increases. The temperature equalization member equalizes temperature distribution on a surface of the transfer-fixing member in a width direction of the transfer-fixing member perpendicular to a conveyance direction of the recording medium, after the surface of the transfer-fixing member passes the nip.
摘要翻译：转印固定装置将调色剂图像转印并固定到记录介质的转印固定表面上，并且包括转印固定构件，按压构件，加热构件和温度均衡构件。转印固定构件承载调色剂图像。按压构件按压接触转印固定构件，以在按压构件和记录介质通过的转印固定构件之间形成辊隙。加热构件加热朝向辊隙传送的记录介质的转印固定表面，使得记录介质在与记录介质的转印固定表面相对的背面的温度增加之前到达辊隙。所述温度均衡部件在所述转印固定部件的表面经过所述辊隙之后，使所述转印固定部件的表面上的转印固定部件的表面上的温度分布与所述记录介质的输送方向垂直的方向相等。

104. 发明授权

US07421224B2 Heating device, auxiliary power supplying device, auxiliary power supplying system, fixing device, and image forming apparatus 有权
标题翻译：加热装置，辅助供电装置，辅助供电系统，定影装置和成像装置
公开(公告)号：US07421224B2
公开(公告)日：2008-09-02
申请号：US11624489
申请日：2007-01-18
申请人： Kazuhito Kishi , Susumu Matsusaka , Takashi Fujita , Eriko Konno
发明人： Kazuhito Kishi , Susumu Matsusaka , Takashi Fujita , Eriko Konno
IPC分类号： G03G15/20
CPC分类号： G03G15/2053 , G03G2215/2016 , G03G2215/2035 , Y10T307/391 , Y10T307/527
摘要： A heating device of the invention comprises a heater, a main power supply, and an auxiliary power supply. The heater includes a main heating element which generates heat with power supplied from the main power supply, and an auxiliary heating element which has a resistance different from a resistance of the main heating element and generates heat with power supplied from the auxiliary power supply. The auxiliary power supply is provided to supply to the auxiliary heating element a current that is different from a current supplied from the main power supply to the main heating element.
摘要翻译：本发明的加热装置包括加热器，主电源和辅助电源。该加热器包括通过从主电源供给的电力产生热量的主加热元件和与主加热元件的电阻不同的电阻的辅助加热元件，并且从辅助电源供应的电力产生热量。提供辅助电源以向辅助加热元件提供与从主电源向主加热元件供应的电流不同的电流。

105. 发明申请

US20080199229A1 Transfer-fixing device, image forming apparatus, and transfer-fixing method 有权
标题翻译：转印固定装置，成像装置和转印固定方法
公开(公告)号：US20080199229A1
公开(公告)日：2008-08-21
申请号：US12071070
申请日：2008-02-15
申请人： Takashi Fujita , Shin Kayahara , Hiromitsu Takagaki , Takashi Seto , Takeshi Takemoto , Hirohmi Tamura
发明人： Takashi Fujita , Shin Kayahara , Hiromitsu Takagaki , Takashi Seto , Takeshi Takemoto , Hirohmi Tamura
IPC分类号： G03G15/00
CPC分类号： G03G15/161 , G03G15/2042 , G03G2215/1671 , G03G2215/1695
摘要： A transfer-fixing device includes a transfer-fixing member, a pressing member, a heating device, and a temperature equalizer. The transfer-fixing member carries the toner image. The pressing member presses against the transfer-fixing member to form a nip portion to which the recording medium is conveyed. The heating device heats the transfer-fixing surface of the recording medium conveyed toward the nip portion. The temperature equalizer equalizes a temperature distribution of a surface of the transfer-fixing member in a width direction of the transfer-fixing member after the surface of the transfer-fixing member passes through the nip portion.
摘要翻译：转印固定装置包括转印固定构件，按压构件，加热装置和温度均衡器。转印固定构件承载调色剂图像。按压构件压靠转印固定构件以形成传送记录介质的夹持部分。加热装置加热向夹持部输送的记录介质的转印固定面。温度均衡器在转印 - 固定部件的表面经过夹持部分之后，使转印 - 固定部件的表面在转印 - 固定部件的宽度方向上的温度分布相等。

106. 发明授权

US07354337B2 Pad conditioner, pad conditioning method, and polishing apparatus 有权
标题翻译：垫调节剂，垫调理方法和抛光装置
公开(公告)号：US07354337B2
公开(公告)日：2008-04-08
申请号：US11467240
申请日：2006-08-25
申请人： Takashi Fujita
发明人： Takashi Fujita
IPC分类号： B24B21/18
CPC分类号： B24B53/017 , B24B29/005
摘要： The present invention provides: a pad conditioner for dressing a surface of a polishing pad which is used in a polishing apparatus for polishing works, comprising a bending or deflecting or elastic member and a supporting section to support a base end of the bending or deflecting or elastic member, wherein upon contact of a vicinity of a tip end of the bending or deflecting or elastic member with the polishing pad, the bending or deflecting or elastic member elastically deforms, so that a pressure necessary to condition the pad is generated; a polishing apparatus using the pad conditioner; and a pad conditioning method using the same, in order to evenly condition a polishing pad of an elastic body by following a surface of the polishing pad.
摘要翻译：本发明提供一种用于修整用于抛光工件的抛光装置中的抛光垫的表面的垫调节器，包括弯曲或偏转或弹性构件和支撑部分，以支撑弯曲或偏转的基端，弹性构件，其中当弯曲或偏转或弹性构件的尖端附近与抛光垫接触时，弯曲或偏转或弹性构件弹性变形，从而产生调节垫所需的压力; 使用该垫调节剂的研磨装置; 以及使用其的垫调节方法，以便通过跟随抛光垫的表面来均匀地调节弹性体的抛光垫。

107. 发明申请

US20080071414A1 Polishing end point detection method utilizing torque change and device thereof 失效
标题翻译：利用扭矩变化的抛光终点检测方法及其装置
公开(公告)号：US20080071414A1
公开(公告)日：2008-03-20
申请号：US11900155
申请日：2007-09-10
申请人： Takashi Fujita , Satoshi Hasegawa , Shinji Osada , Soushi Yamada , Takuji Atarashi
发明人： Takashi Fujita , Satoshi Hasegawa , Shinji Osada , Soushi Yamada , Takuji Atarashi
IPC分类号： G06F19/00
CPC分类号： B24B49/16 , B24B37/013 , H01L21/3212 , H01L22/26
摘要： Change in a torque waveform is monitored while removing continuously-varied periodic noise in real time, and the change in the torque waveform caused purely by the wafer state is detected by separating noise components while removing the noise not caused by the wafer state such as drift noise cased by dressing conditions and the polishing pad state, thereby reliably detecting a polishing end point at high precision in the wafer state when polishing is finished. A polishing end point detection device utilizing torque change having a torque measurement means for measuring torque, a periodic component analysis means for analyzing periodic components in data by subjecting Fourier transformation to the measured data, an average processing time calculation means for calculating moving average processing time for removing periodic noise components based on the analyzed periodic components, an average processing means for correcting the waveform by performing averaging process based on the moving average processing time calculated in real time for the data, and an end point detection means for detecting the polishing end point of a predetermined film based on change in the corrected torque waveform is provided.
摘要翻译：在实时切换连续变化的周期性噪声的同时监视扭矩波形的变化，并且仅通过晶片状态引起的转矩波形的变化通过分离噪声分量来检测，同时消除由晶片状态引起的噪声（例如漂移）通过修整条件和抛光垫状态进行包围的噪声，从而在抛光结束时在晶片状态下可靠地高精度地检测抛光终点。一种利用扭矩变化的抛光终点检测装置，具有用于测量扭矩的扭矩测量装置，用于通过对所测量的数据进行傅里叶变换来分析数据中的周期分量的周期性分量分析装置，用于计算移动平均处理时间的平均处理时间计算装置用于基于分析的周期分量去除周期性噪声分量;平均处理装置，用于通过基于对于数据实时计算的移动平均处理时间进行平均处理来校正波形;以及终点检测装置，用于检测抛光端提供基于校正转矩波形的变化的预定胶片的点。

108. 发明申请

US20080069610A1 IMAGE FORMING APPARATUS 失效
标题翻译：图像形成装置
公开(公告)号：US20080069610A1
公开(公告)日：2008-03-20
申请号：US11857579
申请日：2007-09-19
申请人： Atsushi NAKAFUJI , Takashi Fujita , Shin Kayahara , Hiromitsu Takagaki , Takashi Seto , Katsuaki Miyawaki , Kazumi Suzuki , Hirohmi Tamura
发明人： Atsushi NAKAFUJI , Takashi Fujita , Shin Kayahara , Hiromitsu Takagaki , Takashi Seto , Katsuaki Miyawaki , Kazumi Suzuki , Hirohmi Tamura
IPC分类号： G03G15/20
CPC分类号： G03G15/24 , G03G2215/1695
摘要： An image forming apparatus includes an image carrier for bearing a visible image thereon, an endless transfer-fixing belt stretchedly disposed between a plurality of spanning members, a pressure member for pressing the transfer-fixing belt to the image carrier while contacting a backside of the transfer-fixing belt at the transfer nip, and a heater for heating the visible image. The visible image on the image carrier is transferred onto the front surface of the transfer-fixing belt at the transfer nip and is transported to the transfer-fixing nip while heated by the heater, where the visible image is transferred and fixed on a recording member. The transfer-fixing belt is stretchedly arranged such that the transfer-fixing belt travels in a direction substantially perpendicular to a pressure direction of the pressure member in the proximity of the transfer nip.
摘要翻译：图像形成装置包括用于在其上承载可见图像的图像载体，张紧地设置在多个跨越构件之间的环形转印定影带，用于将转印固定带按压到图像载体的压力构件，同时接触在转印辊隙处的转印定影带，以及用于加热可见图像的加热器。图像载体上的可见图像在转印辊隙处转印到转印固定带的前表面上，并且在可见图像被转印并固定在记录元件上的同时被加热器传送到转印定影辊隙。转印定影带被拉伸布置成使得转印定影带在与转印辊隙附近的压力构件的压力方向基本上垂直的方向上行进。

109. 发明授权

US07346305B2 Sheet wrapping avoidable fixing apparatus and image forming apparatus 有权
标题翻译：片材包装可避免的定影装置和图像形成装置
公开(公告)号：US07346305B2
公开(公告)日：2008-03-18
申请号：US11557238
申请日：2006-11-07
申请人： Hisashi Kikuchi , Shigeo Kurotaka , Kiyoshi Ohshima , Takashi Fujita , Toshihiko Baba , Atsushi Nakafuji , Hirokazu Ikenoue , Jun Yura , Katsuhiro Echigo , Hideki Kosugi
发明人： Hisashi Kikuchi , Shigeo Kurotaka , Kiyoshi Ohshima , Takashi Fujita , Toshihiko Baba , Atsushi Nakafuji , Hirokazu Ikenoue , Jun Yura , Katsuhiro Echigo , Hideki Kosugi
IPC分类号： G03G15/20
CPC分类号： G03G15/2028
摘要： A fixing apparatus includes a fixing member to be heated and a pressure-contacting member for pressure contacting the fixing member. The fixing apparatus directs and conveys a recording member through a nip formed between the fixing member and pressure applying member in such a manner that a toner image carried on a recording member contacts the fixing member in order to be fixed thereto with heat and pressure. The fixing apparatus is configured to direct a tip margin of the recording member toward the pressure applying member across a virtual linear extension line drawn from a downstream end to upstream end of the nip when only the tip margin exits from the nip. A fixing member side separation device may be separately provided from the surface of the fixing apparatus so as to separate the recording member exiting from the nip. A gap formed between the downstream end of the nip and the tip of the fixing member side separation device is set smaller than the width of the tip margin.
摘要翻译：定影装置包括待加热的固定构件和用于与定影构件压力接触的压力接触构件。定影装置通过形成在固定构件和压力施加构件之间的辊隙引导并传送记录构件，使得承载在记录构件上的调色剂图像与定影构件接触以便在热和压力下固定。定影装置被构造成当只有尖端边缘从辊隙离开时，将记录构件的尖端边缘朝向压力施加构件引导穿过从辊隙的下游端到上游端部拉出的虚拟线性延伸线。固定构件侧分离装置可以从定影装置的表面分离设置，以便将从辊隙出来的记录构件分开。在辊隙的下游端和固定件侧分离装置的末端之间形成的间隙被设定为小于前端边缘的宽度。

110. 发明授权

US07333760B2 Fixing device with temperature control 有权
标题翻译：具有温度控制的固定装置
公开(公告)号：US07333760B2
公开(公告)日：2008-02-19
申请号：US11165021
申请日：2005-06-24
申请人： Toshihiko Baba , Shigeo Kurotaka , Katsuhiro Echigo , Takashi Fujita , Hisashi Kikuchi , Yukimichi Someya , Hiroyuki Kunii , Atsushi Nakafuji , Kohji Ue
发明人： Toshihiko Baba , Shigeo Kurotaka , Katsuhiro Echigo , Takashi Fujita , Hisashi Kikuchi , Yukimichi Someya , Hiroyuki Kunii , Atsushi Nakafuji , Kohji Ue
IPC分类号： G03G15/16 , G03G15/20
CPC分类号： G03G15/2042 , G03G2215/1695 , G03G2215/2006 , G03G2215/2016 , G03G2215/2032 , G03G2215/2035
摘要： A fixing device including a magnetic field generating device to generate a magnetic field, a fixing member to heat a recording material by heat generated in a first recording material passing area having a first width on the fixing member by electromagnetic induction heat generation by the magnetic field formed by the magnetic field generating device, a pressing member to form a nip portion where the pressing member and the fixing member press against each other to fix an unfixed image on the recording material, and at least one radiation heating device configured to heat a second recording material passing area having a second width.
摘要翻译：一种固定装置，包括产生磁场的磁场产生装置，用于通过磁场的电磁感应发热在固定构件上在具有第一宽度的第一记录材料通过区域中产生的热量加热记录材料的固定构件由所述磁场产生装置形成的按压部件，形成所述按压部件和所述固定部件彼此压靠以将未定影图像固定在所述记录材料上的夹持部，以及至少一个辐射加热装置，其被配置为加热第二记录材料通过区域具有第二宽度。

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