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    • 103. 发明授权
    • TFT substrate for liquid crystal display apparatus and method of manufacturing the same
    • 液晶显示装置用TFT基板及其制造方法
    • US07304383B2
    • 2007-12-04
    • US10535304
    • 2003-10-27
    • Beom-Seok ChoChang-Oh Jeong
    • Beom-Seok ChoChang-Oh Jeong
    • H01L23/48H01L23/52H01L29/40
    • H01L29/4908C22C9/00G02F1/133345G02F1/136286H01L27/12H01L27/124H01L27/1288H01L29/66765
    • There are provided a TFT substrate for an LCD apparatus and a method of manufacturing the same. A substrate (10), a diffusion barrier layer (11) and a copper alloy layer (12) are formed on the TFT substrate, consecutively. The copper alloy includes a material from about 0.5 at % to about 15 at % to form a gate wiring layer. The material is used to form the diffusion barrier layer (11). A compound that comprises a material such as Zr, Ti, Hf, V, Ta, Ni, Cr, Nb, Co, Mn, Mo, W, Rh, Pd, Pt, etc. is deposited on the diffusion barrier layer (11) to a thickness from about 50 Å to about 5,000 Å. The deposited compound is then heat treated to convert the deposited compound into a silicide compound (11b). The transistor substrate has low resistance and high conductance. Also, etching process is simplified, and a mutual diffusion is prevented by means of the thin diffusion barrier layer.
    • 提供了一种用于LCD装置的TFT基板及其制造方法。 连续地在TFT基板上形成基板(10),扩散阻挡层(11)和铜合金层(12)。 铜合金包括约0.5at%至约15at%的材料以形成栅极布线层。 该材料用于形成扩散阻挡层(11)。 包含诸如Zr,Ti,Hf,V,Ta,Ni,Cr,Nb,Co,Mn,Mo,W,Rh,Pd,Pt等材料的化合物沉积在扩散阻挡层(11)上, 至约50至约5000的厚度。 然后将沉积的化合物进行热处理以将沉积的化合物转化为硅化物(11b)。 晶体管衬底具有低电阻和高电导率。 此外,简化了蚀刻工艺,并且通过薄的扩散阻挡层来防止相互扩散。
    • 105. 发明申请
    • Tft substrate for liquid crystal display apparatus and method of manufacturing the same
    • 用于液晶显示装置的Tft基板及其制造方法
    • US20060151788A1
    • 2006-07-13
    • US10535304
    • 2003-10-27
    • Beom-Seok ChoChang-Oh Jeong
    • Beom-Seok ChoChang-Oh Jeong
    • H01L29/04
    • H01L29/4908C22C9/00G02F1/133345G02F1/136286H01L27/12H01L27/124H01L27/1288H01L29/66765
    • There are provided a TFT substrate for an LCD apparatus and a method of manufacturing the same. A substrate (10), a diffusion barrier layer (11) and a copper alloy layer (12) are formed on the TFT substrate, consecutively. The copper alloy includes a material from about 0.5 at % to about 15 at % to form a gate wiring layer. The material is used to form the diffusion barrier layer (11). A compound that comprises a material such as Zr, Ti, Hf, V, Ta, Ni, Cr, Nb, Co, Mn, Mo, W, Rh, Pd, Pt, etc. is deposited on the diffusion barrier layer (11) to a thickness from about 50 Å to about 5,000 Å. The deposited compound is then heat treated to convert the deposited compound into a silicide compound (11b). The transistor substrate has low resistance and high conductance. Also, etching process is simplified, and a mutual diffusion is prevented by means of the thin diffusion barrier layer.
    • 提供了一种用于LCD装置的TFT基板及其制造方法。 连续地在TFT基板上形成基板(10),扩散阻挡层(11)和铜合金层(12)。 铜合金包括约0.5at%至约15at%的材料以形成栅极布线层。 该材料用于形成扩散阻挡层(11)。 包含诸如Zr,Ti,Hf,V,Ta,Ni,Cr,Nb,Co,Mn,Mo,W,Rh,Pd,Pt等材料的化合物沉积在扩散阻挡层(11)上, 至约50至约5000的厚度。 然后将沉积的化合物进行热处理以将沉积的化合物转化为硅化物(11b)。 晶体管衬底具有低电阻和高电导率。 此外,简化了蚀刻工艺,并且通过薄的扩散阻挡层来防止相互扩散。
    • 108. 发明授权
    • Wiring line assembly and method for manufacturing the same, and thin film transistor array substrate having the wiring line assembly and method for manufacturing the same
    • 配线组装及其制造方法以及具有布线组件的薄膜晶体管阵列基板及其制造方法
    • US06867108B2
    • 2005-03-15
    • US10112760
    • 2002-04-02
    • Chang-Oh JeongBong-Joo KangJae-Gab Lee
    • Chang-Oh JeongBong-Joo KangJae-Gab Lee
    • G02F1/1345G02F1/1362G02F1/1368G09F9/00G09F9/30H01L21/3205H01L21/336H01L21/77H01L21/84H01L23/52H01L23/532H01L27/12H01L29/43H01L29/49H01L29/786H01L21/20H01L29/04
    • G02F1/13458G02F1/136286G02F2001/13629G02F2001/136295H01L23/53242H01L27/12H01L27/124H01L27/1288H01L29/4908H01L2924/0002H01L2924/00
    • In a method for fabricating a thin film transistor array substrate, a glass substrate undergoes an oxygen plasma treatment. A silver or silver alloy-based conductive layer is deposited onto the substrate, and patterned to thereby form a gate line assembly proceeding in the horizontal direction. The gate line assembly includes gate lines, gate electrodes, and gate pads. Thereafter, a silicon nitride-based gate insulating layer is deposited onto the substrate, and a semiconductor layer and an ohmic contact layer are sequentially formed on the gate insulating layer. The semiconductor layer and the ohmic contact layer are HF-treated. A silver alloy-based conductive layer is deposited onto the substrate, and patterned to thereby form a data line assembly. The data line assembly includes data lines crossing over the gate lines, source electrodes, drain electrodes, and data pads. A protective layer based on silicon nitride or an organic material is deposited onto the substrate, and patterned through dry etching such that the protective layer bears contact holes exposing the drain electrodes, the gate pads and the data pads, respectively. An indium zinc oxide or indium tin oxide-based layer is deposited onto the substrate, and patterned to thereby form pixel electrodes, and subsidiary gate and data pads. The pixel electrodes are electrically connected to the drain electrodes, and the subsidiary gate and data pads to the gate and data pads.
    • 在制造薄膜晶体管阵列基板的方法中,玻璃基板进行氧等离子体处理。 将银或银合金基导电层沉积到衬底上,并被图案化,从而形成在水平方向上进行的栅极线组件。 栅极线组件包括栅极线,栅电极和栅极焊盘。 此后,在衬底上沉积氮化硅基栅极绝缘层,并且在栅极绝缘层上依次形成半导体层和欧姆接触层。 对半导体层和欧姆接触层进行HF处理。 将银合金基导电层沉积到衬底上,并被图案化从而形成数据线组件。 数据线组件包括跨越栅极线,源电极,漏电极和数据焊盘的数据线。 基于氮化硅或有机材料的保护层沉积到衬底上,并通过干蚀刻图案化,使得保护层分别暴露漏电极,栅极焊盘和数据焊盘的接触孔。 将氧化铟锌或铟锡氧化物基层沉积在衬底上,并被图案化,从而形成像素电极,以及辅助栅极和数据焊盘。 像素电极电连接到漏电极,辅助栅极和数据焊盘电连接到栅极和数据焊盘。