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    • 96. 发明申请
    • RIGID RF TRANSMISSION LINE WITH EASY REMOVAL SECTION
    • RIGID射频发射线,轻松移除部分
    • US20080276868A1
    • 2008-11-13
    • US12039616
    • 2008-02-28
    • Carl A. SorensenJohn M. WhiteKim Neill
    • Carl A. SorensenJohn M. WhiteKim Neill
    • C23C16/453H01B7/17
    • H01P1/045H01J37/32082H01J37/32174
    • An RF feed for a processing apparatus is disclosed. Coupling an RF generator to an RF matching network by a rigid RF feed lessens the amount of power that is lost during transmission from the generator to the matching network. The rigid RF feed comprises an inverted J shaped section that decouples the generator from the matching network whenever servicing the chamber is necessary. The J shape section has two parallel portions coupled together by a perpendicular portion. The J shaped section may be removed as a one piece assembly by uncoupling the J shaped section at a location disposed near the top of the chamber and a location near the floor of the chamber. The connections between the J shaped section and the remainder of the RF feed face the same direction to ensure easy coupling and decoupling without twisting and/or bending any portion of the rigid RF feed.
    • 公开了一种用于处理装置的RF馈送。 通过刚性RF馈送将RF发生器耦合到RF匹配网络可以减少在从发生器到匹配网络的传输过程中丢失的功率量。 刚性射频馈电包括倒置的J形截面,每当需要维修腔室时,将发生器与匹配网络分离。 J形截面具有通过垂直部分联接在一起的两个平行部分。 J形截面可以作为一个单独的组件被移除,该J形截面在设置在室顶部附近的位置处以及靠近该室底部的位置脱离J形截面。 J形截面和RF进料的其余部分之间的连接面向相同的方向,以确保容易的耦合和解耦,而不会扭曲和/或弯曲刚性RF进给的任何部分。
    • 97. 发明授权
    • Protective device
    • 保护装置
    • US07440253B2
    • 2008-10-21
    • US10727076
    • 2003-12-02
    • George M. Kauffman
    • George M. Kauffman
    • H01C7/12
    • H01P1/202H01P1/045H01R13/6625H01R13/719H01R24/44H01R24/48H01R2103/00
    • A protective device for transmitting electromagnetic signals of a desired frequency band from a source to a load comprises an outer conductor, an inner conductor extending coaxially within the outer conductor and a quarter wavelength shunt conductor. A radio frequency impedance control (RFIC) tube is used to maintain the proper transmission line impedance for the device. The shunt conductor is connected, at one end, to the inner conductor and extends along a multi-curved path through an opening in the RFIC tube and wraps around the RFIC tube in at least one plane. The other end of the stub is connected to the outer conductor either directly or indirectly by means of distributed capacitance through a dielectric insulator. A plurality of gas discharge tubes may be coupled to the shunt conductor to shunt undesired voltages. In use, the inner conductor serves as the transmission line, the outer conductor serves as the return path and the quarter wavelength shunt conductor serves as an inductor for filtering out electromagnetic energy which falls outside the desired frequency band.
    • 用于将期望频带的电磁信号从源传输到负载的保护装置包括外导体,在外导体内同轴延伸的内导体和四分之一波长并联导体。 使用射频阻抗控制(RFIC)管来保持设备的正确的传输线阻抗。 分流导体在一端连接到内部导体,并且沿着多个弯曲的路径延伸穿过RFIC管中的开口并且在至少一个平面中围绕RFIC管卷绕。 短截线的另一端通过介电绝缘体的分布电容直接或间接连接到外导体。 多个气体放电管可以耦合到分流导体以分流不期望的电压。 在使用中,内导体用作传输线,外导体用作返回路径,并且四分之一波长并联导体用作用于滤出掉在期望频带外的电磁能的电感器。
    • 99. 发明授权
    • Coaxial plug-and-socket connector
    • 同轴插头和插座连接器
    • US07294023B2
    • 2007-11-13
    • US10570694
    • 2004-06-21
    • Mario Schneider
    • Mario Schneider
    • H01R24/00
    • H01R24/40H01P1/045H01R13/6583H01R2103/00
    • The coaxial plug-and-socket connector is for high frequencies, particularly in the GHz range, and comprises a socket part and a plug part as well as an elastic electrical contact element. The contact element connects the outer conductor of the socket part to the outer conductor of the plug part and is placed between the plug part and the socket part. The contact element comprises a number of elastic parts that, while under radial elastic stress, form a contact point to the outer conductor of the socket part and a contact point to the outer conductor of the plug part. Said contact points preferably lie in a plane running perpendicular to the longitudinal axis of the plug-and-socket connector and near a face of the plug part. The connector is stable up to approximately 65 GHz.
    • 同轴插头和插座连接器用于高频率,特别是在GHz范围内,并且包括插座部分和插头部分以及弹性电接触元件。 接触元件将插座部分的外部导体连接到插头部分的外部导体,并且被放置在插头部分和插座部分之间。 接触元件包括多个弹性部件,其在径向弹性应力下形成与插座部分的外导体的接触点和与插塞部件的外导体的接触点。 所述接触点优选位于垂直于插头 - 插座连接器的纵向轴线并且在插头部分的表面附近的平面中。 连接器在65 GHz左右是稳定的。
    • 100. 发明申请
    • Coaxial plug-and-socket connector
    • 同轴插头和插座连接器
    • US20060264098A1
    • 2006-11-23
    • US10570694
    • 2004-06-21
    • Mario Schneider
    • Mario Schneider
    • H01R9/05
    • H01R24/40H01P1/045H01R13/6583H01R2103/00
    • The coaxial plug-and-socket connector is for high frequencies, particularly in the GHz range, and comprises a socket part and a plug part as well as an elastic electrical contact element. The contact element connects the outer conductor of the socket part to the outer conductor of the plug part and is placed between the plug part and the socket part. The contact element comprises a number of elastic parts that, while under radial elastic stress, form a contact point to the outer conductor of the socket part and a contact point to the outer conductor of the plug part. Said contact points preferably lie in a plane running perpendicular to the longitudinal axis of the plug-and-socket connector and near a face of the plug part. The connector is stable up to approximately 65 GHz.
    • 同轴插头和插座连接器用于高频率,特别是在GHz范围内,并且包括插座部分和插头部分以及弹性电接触元件。 接触元件将插座部分的外部导体连接到插头部分的外部导体,并且被放置在插头部分和插座部分之间。 接触元件包括多个弹性部件,其在径向弹性应力下形成与插座部分的外导体的接触点和与插塞部件的外导体的接触点。 所述接触点优选位于垂直于插头 - 插座连接器的纵向轴线并且在插头部分的表面附近的平面中。 连接器在65 GHz左右是稳定的。