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91. 发明授权

US07507978B2 Beam line architecture for ion implanter 有权
标题翻译：离子注入机的梁线结构
公开(公告)号：US07507978B2
公开(公告)日：2009-03-24
申请号：US11540064
申请日：2006-09-29
申请人： Bo H. Vanderberg , Patrick Splinter
发明人： Bo H. Vanderberg , Patrick Splinter
IPC分类号： G21K1/093 , H01J37/08 , H01J37/317
CPC分类号： H01J37/1471 , H01J37/04 , H01J37/304 , H01J37/3171 , H01J2237/0475 , H01J2237/055 , H01J2237/1501 , H01J2237/152 , H01J2237/24507 , H01J2237/24528 , H01J2237/3045 , H01J2237/31703
摘要： A parallelizing component of an ion implantation system comprises two angled dipole magnets that mirror one another and serve to bend an ion beam traversing therethrough to have a substantially “s” shape. This s bend serves to filter out contaminants of the beam, while the dipoles also parallelize the beam to facilitate uniform implant properties across the wafer, such as implant angle, for example. Additionally, a deceleration stage is included toward the end of the implantation system so that the energy of the beam can be kept relatively high throughout the beamline to mitigate beam blowup.
摘要翻译：离子注入系统的平行化部件包括两个成角度的偶极子磁体，其彼此相互反射并用于弯曲横穿其中的离子束以具有基本上“s”的形状。该弯曲用于滤除光束的污染物，而偶极子也使光束平行化，以促进跨晶片的均匀植入性能，例如植入角度。此外，朝向植入系统的端部包括减速阶段，使得束的能量可以在整个束线中保持相对较高以减轻束的膨胀。

92. 发明申请

US20080067397A1 Beam processing system and beam processing method 有权
标题翻译：光束处理系统和光束处理方法
公开(公告)号：US20080067397A1
公开(公告)日：2008-03-20
申请号：US11806128
申请日：2007-05-30
申请人： Mitsukuni Tsukihara , Mitsuaki Kabasawa
发明人： Mitsukuni Tsukihara , Mitsuaki Kabasawa
IPC分类号： H01J1/50
CPC分类号： H01J37/3171 , H01J37/04 , H01J37/05 , H01J2237/055 , H01J2237/30483
摘要： A beam processing system is for causing a particle beam extracted from a beam generating source to pass through a mass analysis magnet device, a mass analysis slit, and a deflection scanner in the order named, thereby irradiating the particle beam onto a processing object. The mass analysis slit is installed between the mass analysis magnet device and the deflection scanner at a position where the particle beam having passed through the mass analysis magnet device converges most in a lateral direction. A first DC quadrupole electromagnet and a second DC quadrupole electromagnet are installed on an upstream side and a downstream side of the mass analysis slit, respectively,
摘要翻译：光束处理系统用于使得从光束发生源提取的粒子束以所述顺序通过质量分析磁体装置，质量分析狭缝和偏转扫描器，从而将粒子束照射到处理对象上。在通过质量分析用磁体装置的粒子束在横向收敛最多的位置处，将质量分析用狭缝安装在质量分析磁体装置与偏转扫描仪之间。分别在质量分析狭缝的上游侧和下游侧安装第一直流四极电磁体和第二直流四极电磁体，

93. 发明授权

US06639227B1 Apparatus and method for charged particle filtering and ion implantation 有权
标题翻译：带电粒子滤波和离子注入的装置和方法
公开(公告)号：US06639227B1
公开(公告)日：2003-10-28
申请号：US09691842
申请日：2000-10-18
申请人： Hilton Glavish , Causon Ko-Chuan Jen
发明人： Hilton Glavish , Causon Ko-Chuan Jen
IPC分类号： H01J37317
CPC分类号： H01J37/3171 , H01J37/05 , H01J2237/03 , H01J2237/055
摘要： A charged particle filter provides a curved through path and has both magnetic poles for applying a magnetic field normal to the plane of curvature of the path and electrodes for applying a radial electric field. The filter is used as an energy filter downstream of an accelerator in an ion implanter. The filter can be set to provide a range of energy dispersions, to operate as an achromatic bend, or to reject lower charge state ions.
摘要翻译：带电粒子滤波器提供弯曲通路，并且具有用于施加垂直于路径曲面的磁场的磁极和用于施加径向电场的电极的两个磁极。过滤器用作离子注入机中加速器下游的能量过滤器。过滤器可以设置为提供一系列能量分散体，作为消色差弯曲进行操作，或者抑制较低电荷状态的离子。

94. 发明授权

US06498348B2 Apparatus and method relating to charged particles 失效
公开(公告)号：US06498348B2
公开(公告)日：2002-12-24
申请号：US09736253
申请日：2000-12-15
申请人： Derek Aitken
发明人： Derek Aitken
IPC分类号： H01J4900
CPC分类号： H01J49/06 , H01J37/05 , H01J37/3171 , H01J49/322 , H01J2237/055 , H01J2237/057
摘要： The present invention provides an apparatus for acting upon charge particles in dependence upon on or more parameters including mass and/or energy and/or charged state of the particles. The apparatus includes an array of elongate magnetic poles extending longitudinally in an elongation direction of the array; an array reference surface extending in the array elongation direction and passing through the array with a magnetic pole on each side of the reference surface; a means for providing charged particles entering into or originating in the field of the magnetic pole array. The magnetic poles are configured in a plane perpendicular to the elongation direction to give parameter dependent change of direction to charged particles moving in array with a direction of movement substantially parallel to the reference surface, whereby parameter dependent selection of charged particles may be achieved by parameter dependent dispersion in a plane transverse to the reference surface.

95. 发明授权

US6160262A Method and apparatus for deflecting charged particles 有权
标题翻译：用于偏转带电粒子的方法和装置
公开(公告)号：US6160262A
公开(公告)日：2000-12-12
申请号：US176110
申请日：1998-10-21
申请人： Masahiko Aoki , Masayasu Tanjyo
发明人： Masahiko Aoki , Masayasu Tanjyo
IPC分类号： C23C14/48 , H01J37/05 , H01J37/317 , H01J49/26 , H01L21/265 , H01J37/30
CPC分类号： H01J49/26 , H01J37/05 , H01J2237/055 , H01J2237/057 , H01J2237/31701
摘要： A large-area ion beam having a one-directionally long section is generated in a magnetically shielded ion source. The ion beam is bent evenly to form a large center angle of about 90 degrees in the direction of the short side by a window/frame type magnet having a large gap and having left and right frames each wound with a plurality of coils. Then, the ion beam is made to pass through a slit plate having a one-directionally long opening so that unnecessary ions are removed. The ion beam is then radiated onto a subject which makes a translational motion in the direction of the short side of the beam.
摘要翻译：在磁屏蔽离子源中产生具有单向长截面的大面积离子束。离子束被均匀地弯曲，以通过具有大间隙的窗/框型磁体在短边方向上形成约90度的大的中心角，并且具有卷绕有多个线圈的左右框架。然后，使离子束通过具有一向长的开口的狭缝板，从而去除不需要的离子。然后将离子束辐射到对象上，该对象在光束的短边方向上进行平移运动。

96. 发明授权

US6097028A Energy filter 失效
标题翻译：能量过滤器
公开(公告)号：US6097028A
公开(公告)日：2000-08-01
申请号：US32203
申请日：1998-02-27
申请人： Katsushige Tsuno
发明人： Katsushige Tsuno
IPC分类号： H01J37/05 , H01J37/26 , H01J49/44 , H01J40/00 , H01J47/00
CPC分类号： H01J49/44 , H01J37/05 , H01J2237/055 , H01J2237/153 , H01J2237/26
摘要： There is disclosed a highly isochromatic electron spectroscopic imaging filter providing good energy resolution even in a microscope image having a wide field of view. To reduce the difference in energy between the vicinity of the center of the image on the pupil plane and peripheral portions, the relation LL/L.sub.5 > is satisfied, where LL is the distance from the pupil plane to the slit plane S and L.sub.5 is the distance from the exit end surface of the filter to the slit plane S.
摘要翻译：公开了一种高等离子体电子分光成像滤光片，即使在具有宽视场的显微镜图像中也能提供良好的能量分辨率。为了减小光瞳面上的图像中心附近与周边部分之间的能量差异，满足关系式LL / L5>其中LL是从光瞳面到狭缝面S的距离，L5是从过滤器的出口端表面到狭缝平面S的距离。

97. 发明授权

US5969354A Electron analyzer with integrated optics 失效
标题翻译：具有集成光学的电子分析仪
公开(公告)号：US5969354A
公开(公告)日：1999-10-19
申请号：US987325
申请日：1997-12-09
申请人： Michael A. Kelly
发明人： Michael A. Kelly
IPC分类号： H01J37/05 , H01J49/46
CPC分类号： H01J37/05 , H01J2237/055
摘要： A charged-particle analyzer in which a solenoid or other means set up a generally axial magnetic field in a drift region. Meshes of magnetically permeable material are set at ends of the drift region to terminate the magnetic field. Charged particles, such as electrons, are incident upon entrance mesh at a given angle with respect to the central axis. After passing through the entrance mesh, they gyrate around the magnetic field lines, and they then exit the drift region through the exit mesh. The rotation accumulated across the drift region depends upon the energy of the incident particle, and the angle of the particle trajectory exterior of the exit mesh thus depends on the particle's energy. A charged-particle detector detects the position of the particle relative to the central axis and, hence, its energy. In one embodiment, the meshes are flat so that a uniform magnetic field is created in the drift region. In another embodiment, the meshes are curved and may act as charged-particle lenses with focal planes at the particle source and at the detector.
摘要翻译：一种带电粒子分析仪，其中螺线管或其它装置在漂移区域中建立大致轴向的磁场。将导磁材料的网格设置在漂移区的端部以终止磁场。带电粒子，例如电子，以相对于中心轴线给定的角度入射到入口网。通过入口网格后，它们在磁场线周围旋转，然后通过出口网离开漂移区域。在漂移区域上积累的旋转取决于入射颗粒的能量，并且出口网格外部的粒子轨迹的角度因此取决于颗粒的能量。带电粒子检测器检测颗粒相对于中心轴线的位置，并因此检测其能量。在一个实施例中，网格是平坦的，使得在漂移区域中产生均匀的磁场。在另一个实施例中，网格是弯曲的，并且可以作为粒子源和检测器处的焦平面的带电粒子透镜。

98. 发明授权

US5585630A Electron energy filter and transmission electron microscope provided with the same 失效
标题翻译：电子能量滤波器和透射电子显微镜一样提供
公开(公告)号：US5585630A
公开(公告)日：1996-12-17
申请号：US502718
申请日：1995-07-14
申请人： Yoshifumi Taniguchi , Shunroku Taya
发明人： Yoshifumi Taniguchi , Shunroku Taya
IPC分类号： H01J37/05 , H01J37/26 , H01J49/44 , H01J49/46
CPC分类号： H01J49/46 , H01J37/05 , H01J2237/055 , H01J2237/057 , H01J2237/26
摘要： An electron energy filter is structured by superposing a pair of yokes having electron beam passage holes and pole pieces on each side facing each other so as that the pole pieces are positioned facing each other with a certain space in between, and the electron energy filter is mounted in a transmission electron microscope to obtain a stable elemental mapping image.
摘要翻译：电子能量滤波器是通过在彼此面对的每一侧上叠加具有电子束通过孔和极片的一对轭来构成的，以使得极片彼此间隔一定的间隔相对定位，电子能量过滤器安装在透射电子显微镜中以获得稳定的元素映射图像。

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