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91. 发明申请

US20060082907A1 Optical element holding system, barrel, exposure apparatus, and device manufacturing method 失效
标题翻译：光学元件保持系统，镜筒，曝光装置和装置的制造方法
公开(公告)号：US20060082907A1
公开(公告)日：2006-04-20
申请号：US11247166
申请日：2005-10-12
申请人： Naoki Murasato
发明人： Naoki Murasato
IPC分类号： G02B7/02
CPC分类号： G02B7/181 , G02B7/026 , G02B7/028 , G03F7/70266 , G03F7/70825
摘要： Disclosed in this specification are an optical element holding system, a barrel usable therewith, and an exposure apparatus and an exposure method usable therewith. In one preferred form, the optical element holding system includes a ring-like inner holding member which is disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces. The optical element holding system further includes a ring-like outer holding member which is disposed at an outer periphery of the inner holding member and is connected to the inner holding member at plural points. The inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators.
摘要翻译：在本说明书中公开了一种光学元件保持系统，与其可用的镜筒，以及可用于其中的曝光装置和曝光方法。在一种优选形式中，光学元件保持系统包括环形内部保持构件，该内部保持构件设置在光学元件的外周，用于使用至少一对片来支撑光学元件。光学元件保持系统还包括环状外部保持构件，其设置在内部保持构件的外周，并且在多个点处连接到内部保持构件。内部保持构件具有至少一对具有致动器的驱动单元，用于通过致动器支撑光学元件。

92. 发明授权

US07009173B2 Lens mount integrated with a thermoelectrically cooled photodetector module 有权
标题翻译：透镜座与热电冷却光电检测器模块集成
公开(公告)号：US07009173B2
公开(公告)日：2006-03-07
申请号：US10872595
申请日：2004-06-22
申请人： Radu Ispasoiu , Thomas R. Gockel , James S. Vickers
发明人： Radu Ispasoiu , Thomas R. Gockel , James S. Vickers
IPC分类号： H01J40/14 , H01J5/02
CPC分类号： G02B7/028 , F25B21/02 , H01L31/0203 , H01L31/024
摘要： An integrated housing for a lens and a photodetector, which is being cooled to low temperatures to enable the detector to detect faint emission of photons. An enclosure is provided to which a lens is affixed from one side using a retaining ring, and a photodetector is affixed from the opposite side. The enclosure is affixed to a TE cooler. The enclosure and the retaining ring are made from materials having similar thermal expansion coefficients.
摘要翻译：用于透镜和光电检测器的集成外壳，其被冷却至低温以使得检测器能够检测光子的微弱发射。提供了一个外壳，使用保持环从一侧固定透镜，并且从相对侧固定光电检测器。外壳固定在TE冷却器上。外壳和保持环由具有相似热膨胀系数的材料制成。

93. 发明授权

US06999238B2 Tunable micro-lens array 失效
标题翻译：可调微型镜头阵列
公开(公告)号：US06999238B2
公开(公告)日：2006-02-14
申请号：US10725840
申请日：2003-12-01
申请人： Alexei Glebov , Lidu Huang , Kishio Yokouchi
发明人： Alexei Glebov , Lidu Huang , Kishio Yokouchi
IPC分类号： G02B26/00 , G02B27/10
CPC分类号： G02B7/028 , G02B3/0012 , G02B3/0068 , G02B3/0081 , G02B6/32
摘要： A tunable micro-lens and micro-lens array for use in optical communications are disclosed. The micro-lens uses thermo optical material and a temperature controller to adjust the temperature and, hence, the index of refraction of the thermo optical material. In one embodiment, a single temperature controller is used to maintain an array of micro-lenses at a desired temperature. In an alternate embodiment, the individual lenses in an array are separately tunable. The invention may be used with either 2D or 3D lenses, and is well suited for use with existing planar lightwave circuit (PLC) technology.
摘要翻译：公开了一种用于光通信的可调谐微透镜和微透镜阵列。微透镜使用热光学材料和温度控制器来调节温度，因此调节热光学材料的折射率。在一个实施例中，使用单个温度控制器将微透镜阵列维持在所需温度。在替代实施例中，阵列中的各个透镜是可单独调节的。本发明可以与2D或3D透镜一起使用，并且非常适用于现有的平面光波电路（PLC）技术。

94. 发明申请

US20050279923A1 Lens mount integrated with a thermoelectrically cooled photodetector module 有权
标题翻译：透镜座与热电冷却光电检测器模块集成
公开(公告)号：US20050279923A1
公开(公告)日：2005-12-22
申请号：US10872595
申请日：2004-06-22
申请人： Radu Ispasoiu , Thomas Gockel , James Vickers
发明人： Radu Ispasoiu , Thomas Gockel , James Vickers
IPC分类号： F25B21/02 , G02B7/02 , H01J3/14 , H01J5/02 , H01L31/0203 , H01L31/024
CPC分类号： G02B7/028 , F25B21/02 , H01L31/0203 , H01L31/024
摘要： An integrated housing for a lens and a photodetector, which is being cooled to low temperatures to enable the detector to detect faint emission of photons. An enclosure is provided to which a lens is affixed from one side using a retaining ring, and a photodetector is affixed from the opposite side. The enclosure is affixed to a TE cooler. The enclosure and the retaining ring are made from materials having similar thermal expansion coefficients.
摘要翻译：用于透镜和光电检测器的集成外壳，其被冷却至低温以使得检测器能够检测光子的微弱发射。提供了一个外壳，使用保持环从一侧固定透镜，并且从相对侧固定光电检测器。外壳固定在TE冷却器上。外壳和保持环由具有相似热膨胀系数的材料制成。

95. 发明申请

US20050105070A1 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US20050105070A1
公开(公告)日：2005-05-19
申请号：US10735847
申请日：2003-12-16
申请人： Pertrus Bartray , Wilhelmus Box , Bernardus Antonius Luttikhuis , Michael Ten Bhomer
发明人： Pertrus Bartray , Wilhelmus Box , Bernardus Antonius Luttikhuis , Michael Ten Bhomer
IPC分类号： H01L21/027 , G02B7/02 , G03B27/42 , G03F7/20
CPC分类号： G03F7/7095 , G02B7/028 , G03F7/70833 , G03F7/70858 , G03F7/709
摘要： A lithographic apparatus is disclosed. The apparatus includes an illumination system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate support that supports a substrate, a projection system that projects the patterned beam onto a target portion of the substrate, and a reference frame that provides a reference surface with respect to which a position of at least one of the substrate and the patterning structure is measured. The reference frame includes a material that has a coefficient of thermal expansion of greater than about 2.9×10−6/K.
摘要翻译：公开了一种光刻设备。该装置包括提供辐射束的照明系统和支撑图形结构的支撑结构。图案形成结构被配置为在其横截面中赋予辐射束图案。该装置还包括支撑基板的基板支撑件，将图案化的光束投影到基板的目标部分上的投影系统以及提供参考表面的参考框架，基准面相对于基板的至少一个基板并且测量图案结构。参考框架包括具有大于约2.9×10 -6 / K的热膨胀系数的材料。

96. 发明授权

US06865034B1 Method and apparatus for eliminating alignment error in an optical system 失效
标题翻译：消除光学系统中的对准误差的方法和装置
公开(公告)号：US06865034B1
公开(公告)日：2005-03-08
申请号：US10616265
申请日：2003-07-08
申请人： Chris L. Willis
发明人： Chris L. Willis
IPC分类号： G01J1/02 , G02B7/02 , G02B27/64 , H01S3/00
CPC分类号： G01J1/02 , G01J1/0252 , G01J1/0266 , G02B7/028 , G02B27/64
摘要： A system is provided for nulling out or eliminating alignment errors in an optical system by moving a lens to capture and center a collimated beam laterally-shifted by thermal excursions, thus to couteract the boresight error caused by the thermally-induced lateral shifting. As a result, alignment error the thermal coefficient of expansion characteristics of the optical elements and their mounting systems caused by lateral off-sets is corrected by moving a lens or lens system in response to thermal changes in a direction which moves the lens so that the collimated light impinging on the lens is made to come in on the optical axis of the lens.
摘要翻译：提供了一种用于通过移动透镜以捕获和对准通过热偏移横向移位的准直光束来对光学系统中的对准误差进行零位或消除的系统，从而对由热诱导的横向偏移引起的视轴误差进行协调。结果，通过使透镜或透镜系统响应于使透镜移动的方向上的热变化来移动透镜或透镜系统来校正由侧向偏移引起的光学元件及其安装系统的热膨胀特性的对准误差，入射在透镜上的准直光进入透镜的光轴。

97. 发明授权

US06859317B1 Diffraction grating for wavelength division multiplexing/demultiplexing devices 失效
$Diffraction grating for wavelength division multiplexing/demultiplexing devices$
标题翻译：用于波分复用/解复用器件的衍射光栅
公开(公告)号：US06859317B1
公开(公告)日：2005-02-22
申请号：US09724803
申请日：2000-11-28
申请人： Gregory G. Cappiello , Mikhail N. Sokolskiy , Robert H. Dueck
发明人： Gregory G. Cappiello , Mikhail N. Sokolskiy , Robert H. Dueck
IPC分类号： G01J3/02 , G01J3/14 , G01J3/18 , G01J3/28 , G02B5/18 , G02B6/34 , G02B6/38 , G02B7/00 , G02B7/02 , G02B27/10 , H04B10/08 , H04B10/213 , H04J14/02
CPC分类号： G02B6/29397 , G01J3/02 , G01J3/0208 , G01J3/0286 , G01J3/14 , G01J3/18 , G01J3/2803 , G02B5/18 , G02B6/2931 , G02B6/2938 , G02B6/3807 , G02B7/008 , G02B7/028 , G02B27/1073 , G02B27/1086 , G02B27/123 , G02B27/126 , H04B10/077 , H04B10/07955 , H04J14/02 , H04J14/0201
摘要： A diffraction grating for optical communication is disclosed. The diffraction grating includes a substrate and a reflective material adjacent the substrate, wherein one or more input optical signals incident the reflective material is diffracted into one or more output optical signals over a wavelength range of at least approximately 30 nm, within which the diffraction grating is substantially polarization insensitive.
摘要翻译：公开了一种用于光通信的衍射光栅。衍射光栅包括衬底和与衬底相邻的反射材料，其中入射到反射材料的一个或多个输入光信号在至少约30nm的波长范围内被衍射成一个或多个输出光信号，在该衍射光栅中，衍射光栅基本上极化不敏感。

98. 发明申请

US20050024753A1 Temperature compensation device for optical instruments 失效
标题翻译：光学仪器温度补偿装置
公开(公告)号：US20050024753A1
公开(公告)日：2005-02-03
申请号：US10887166
申请日：2004-07-08
申请人： Avihu Goral , Ehud Shoavi , Ehud Chishinski
发明人： Avihu Goral , Ehud Shoavi , Ehud Chishinski
IPC分类号： G02B7/02
CPC分类号： G02B7/028
摘要： The present invention discloses a temperature compensation device for optical instruments which comprises a lens assembly, motor means for rotating the lens assembly about the optical axis thereof, kinematic means for producing rectilinear motion of the lens assembly in response to the rotary motion of the lens assembly, and means for determining the linear displacement and therefore the actual linear position of the lens assembly. Additionally, the device comprises thermometric means, e.g. a temperature detector, which measures the temperature of the environment and transmits the temperature to a processor which controls the actual linear position of the lens assembly through an electronic circuit. The relationship between the temperature detector reading and the corresponding desired linear position is defined by memorized means, preferably by a LUT (look-up table) or, e.g., through optimization on a sensor (ccd, IR, etc.) output (picture). At all times, the desired linear position, corresponding to the temperature detector reading, is compared to the actual linear position, and, if there is a difference, the aforesaid kinematic means is actuated by appropriate means to displace the lens assembly to the desired linear position.
摘要翻译：本发明公开了一种用于光学仪器的温度补偿装置，其包括透镜组件，用于使透镜组件围绕其光轴旋转的运动装置，用于响应于透镜组件的旋转运动而产生透镜组件的直线运动的运动装置以及用于确定透镜组件的线性位移以及因此确定实际线性位置的装置。另外，该装置包括例如温度测量装置。温度检测器，其测量环境的温度并将温度传递到通过电子电路控制透镜组件的实际线性位置的处理器。温度检测器读数和对应的期望线性位置之间的关系由存储的方式，优选地通过LUT（查找表）或例如通过传感器（ccd，IR等）输出（图像）上的优化来定义。。在任何时候，将对应于温度检测器读数的期望的线性位置与实际的线性位置进行比较，并且如果存在差异，则上述运动装置通过适当的装置被致动以将透镜组件移动到期望的线性位置。

99. 发明申请

US20040233493A1 Optical scanner and image formation apparatus 失效
公开(公告)号：US20040233493A1
公开(公告)日：2004-11-25
申请号：US10866716
申请日：2004-06-15
发明人： Yoshinori Hayashi , Seizo Suzuki , Atsushi Kawamura , Hiromichi Atsuumi , Kohji Sakai , Akihisa Itabashi
IPC分类号： G02B026/08
CPC分类号： G02B7/028 , G02B26/124 , G02B26/125
摘要： An optical system includes three optical systems. The first has a coupling lens. The second includes a lens having a positive power in a vertical scanning direction and forms the light flux into a line image extending in the horizontal scanning direction on a deflector. The third includes a first lens having a positive power in the horizontal scanning direction, and a second lens having a positive power in the vertical scanning direction. Lateral magnification in the horizontal scanning direction is set larger than that in the vertical scanning direction. Temperature near the first lens is maintained higher than that near the second lens.

100. 发明授权

US06791729B2 Adjusting imaging position of optical beam spot in main and sub-scanning directions by individually and/or collectively adjusting position(s) of temperature-compensating lens(es) 失效
标题翻译：通过单独和/或共同调整温度补偿透镜的位置来调整主光束和副扫描方向上的光束点的成像位置，
公开(公告)号：US06791729B2
公开(公告)日：2004-09-14
申请号：US10161756
申请日：2002-06-05
申请人： Hiromichi Atsuumi , Seizo Suzuki
发明人： Hiromichi Atsuumi , Seizo Suzuki
IPC分类号： G02B2608
CPC分类号： G02B26/124 , G02B7/028
摘要： The imaging position of an optical beam spot in an optical scanning device is adjusted. The imaging position of the optical beam spot is adjusted in both a main scanning direction and a sub-scanning direction. The imaging position of the optical beam spot in the main scanning direction is adjusted by individually adjusting, in an optical axis direction, a position of at least one lens 10 having power in the main scanning direction. The imaging position of the optical beam spot in the sub-scanning direction is adjusted by collectively adjusting, in the optical axis direction, a position of the linear image imaging optical system 100 as a whole.
摘要翻译：调整光学扫描装置中的光束点的成像位置。在主扫描方向和副扫描方向上调整光束光点的成像位置。通过在光轴方向上分别调整具有主扫描方向的功率的至少一个透镜10的位置，来调节光束光斑在主扫描方向上的成像位置。通过在光轴方向上整体地调整线性图像成像光学系统100的位置来调整光束光斑在副扫描方向上的成像位置。

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