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    • 95. 发明授权
    • Method of manufacturing stamper
    • 制造压模的方法
    • US07938978B2
    • 2011-05-10
    • US12691491
    • 2010-01-21
    • Takuya ShimadaShinobu SugimuraYoshiyuki KamataMasatoshi Sakurai
    • Takuya ShimadaShinobu SugimuraYoshiyuki KamataMasatoshi Sakurai
    • B44C1/22B28B11/08
    • G11B5/855
    • According to one embodiment, a method of manufacturing a stamper includes forming a first stamper from a master plate having lands and grooves through electroforming, forming a second stamper, a width of which is GW, from the first stamper through electroforming, forming a lamination film with a thickness of LLT on the second stamper, forming, on the lamination film, a second releasing layer, a transfer layer with a thickness of TLT and a third electroforming layer with a thickness of ELT, peeling off the transfer layer and the third electroforming layer from the second stamper to form a third stamper, and isotropically etching the transfer layer on the third stamper in an etching thickness of ET to reduce a width of lands of the third stamper, in which the following relations are satisfied: 10 nm≦ELT and ET≦TLT.
    • 根据一个实施例,制造压模的方法包括通过电铸从具有焊盘和槽的母板形成第一压模,通过电铸从第一压模形成其宽度为GW的第二压模,形成层压膜 在第二压模上具有LLT的厚度,在层压膜上形成第二释放层,厚度为TLT的转印层和具有ELT厚度的第三电铸层,剥离转印层和第三电铸 从而形成第三压模,并且以蚀刻厚度的ET对第三压模上的转印层进行各向同性蚀刻,以减小第三压模的焊盘的宽度,其中满足以下关系:10nm≦̸ ELT 和ET≦̸ TLT。