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    • 92. 发明申请
    • X-ray microscopic inspection apparatus
    • X线显微镜检查仪
    • US20050111624A1
    • 2005-05-26
    • US10719008
    • 2003-11-21
    • Keiji YadaHiromi KaiYasushi Saito
    • Keiji YadaHiromi KaiYasushi Saito
    • G21K7/00H01J35/06H01J35/12
    • H01J35/065G21K7/00H01J35/12H01J2235/1204H01J2235/1291H01J2235/186
    • To provide an X-ray microscopic inspection apparatus capable of performing non-destructive inspection with high resolving power equal to or less than 0.1 μm in a very short period, and largely contributing to the nano-technology field. In the X-ray microscopic inspection apparatus having X-ray generating means for generating an X-ray by allowing an electron beam from an electron source to impinge on a target for X-ray generation, for inspecting an object to be inspected by utilizing the X-ray, a magnetic field superposition lens having a magnetic field generating portion disposed in the vicinity of an electron generating portion of an electron gun is included as a component element of the X-ray generating means. Further, the apparatus includes a liquid metal electron source using liquid metal or a thermal field emission electron source as the electron source, as a component element of the X-ray generating means. Furthermore, the apparatus includes a target with a heat sink using CVD diamond as the heat sink as the target for X-ray generation, as a component element of the X-ray generating means.
    • 本发明提供一种X射线显微镜检查装置,其能够在非常短的时间内以高分辨能力进行0.1μm以下的非破坏性检查,并且在很大程度上有助于纳米技术领域。 在具有用于通过使来自电子源的电子束撞击到X射线产生用靶上而产生X射线的X射线显微镜检查装置中,为了利用 作为X射线产生装置的构成要素,包括设置在电子枪的电子发生部附近的具有磁场产生部的磁场叠加透镜。 此外,该装置包括使用液态金属或热场发射电子源作为电子源的液态金属电子源作为X射线产生装置的组成元件。 此外,该装置包括具有使用CVD金刚石作为散热器作为X射线产生的目标的散热器的靶,作为X射线产生装置的组成元件。
    • 93. 发明授权
    • Apparatus and method for controlling movement of an optical head
    • 用于控制光学头的移动的装置和方法
    • US06445649B1
    • 2002-09-03
    • US09503913
    • 2000-02-15
    • Yasushi SaitoMitsuhiko Awata
    • Yasushi SaitoMitsuhiko Awata
    • G11B1722
    • G11B5/59677G11B5/59627
    • An information recording/reproduction apparatus is adapted to quickly move the optical pickup to a desired position on the optical disk being used with it without emitting any sound of collision. The information recording/reproduction apparatus adapted to use an optical disk comprises an optical pickup 5 supported by a lead screw 9 so to move freely at least in a radial direction of the optical disk 1, a thread motor 4 for driving the optical pickup 5 to move by the distance specified by a drive signal in the radial direction of the optical disk 1, a position detecting switch 7 for detecting the innermost movable limit of the optical pickup 5 in the radial direction of the optical disk 1 and a system controller 6 for controlling the movement of the optical pickup 5 by means of the drive signal applied to the thread motor 4, using the detected position as reference.
    • 信息记录/再现装置适于将光学拾取器快速移动到与其一起使用的光盘上的期望位置,而不发出任何碰撞声。 适于使用光盘的信息记录/再现装置包括:由导螺杆9支撑的至少沿光盘1的径向方向自由移动的光学拾取器5,用于驱动光学拾取器5的螺纹马达4 在光盘1的径向方向上移动由驱动信号指定的距离,用于检测光学拾取器5在光盘1的径向方向上的最内部可移动极限的位置检测开关7,以及用于 使用检测到的位置作为参考,通过施加到螺纹马达4的驱动信号来控制光学拾取器5的移动。