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91. 发明申请

US20070219495A1 Control System for Liquid Infusion Apparatus 审中-公开
标题翻译：液体输液器控制系统
公开(公告)号：US20070219495A1
公开(公告)日：2007-09-20
申请号：US11686548
申请日：2007-03-15
申请人： Hiroshi Kato , Shunichi Kawamata , Seiji Kojima , Yoshihisa Kagawa , Koji Mizukami , Takahiro Matsumoto
发明人： Hiroshi Kato , Shunichi Kawamata , Seiji Kojima , Yoshihisa Kagawa , Koji Mizukami , Takahiro Matsumoto
IPC分类号： A61M37/00
CPC分类号： A61M5/1413 , A61M5/16827 , A61M5/16831 , A61M2205/3569
摘要： A control system for a liquid infusion apparatus comprises a plurality of liquid infusion devices, each having a common connector of liquid infusion device side for an electric power supply line and a communication line, a plurality of racks stacked one another, each for receiving each of the liquid infusion devices, a plurality of common connectors of rack side, each mounted on each of the racks a base unit, and a connector provided on the base unit so as to connect an electric power supply line and a communication line to the connectors of lack side. Each of the common connectors of rack side is connected to each of the common connectors of liquid infusion device side, when each of the liquid infusion devices is inserted into each of the respective racks.
摘要翻译：液体输注装置的控制系统包括多个液体输注装置，每个液体输注装置具有用于电力供给线和通信线的液体输注装置侧的公共连接器，彼此堆叠的多个机架，每个用于接收液体输注装置，齿条侧的多个公共连接器，每个安装在每个机架上的基座单元，以及设置在基座单元上的连接器，以将电源线和通信线连接到缺乏一面。当每个液体输注装置插入每个相应的机架时，齿条侧的每个公共连接器连接到液体输注装置侧的每个公共连接器。

92. 发明授权

US07229566B2 Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US07229566B2
公开(公告)日：2007-06-12
申请号：US10664998
申请日：2003-09-18
申请人： Takahiro Matsumoto , Hideki Ina
发明人： Takahiro Matsumoto , Hideki Ina
IPC分类号： G01B11/00
CPC分类号： G03F9/7088 , G03F9/7076 , G03F9/7092
摘要： A two-dimensional image of an alignment mark 30 is acquired by an alignment scope 15 at step S61, and the two-dimensional image acquired at step S61 is converted to a light-intensity signal line by line at step S62. A selection as to whether each line signal is valid or unnecessary is made at step S63. The amount of positional deviation of the alignment mark 30 is calculated using only valid line signals at step S64.
摘要翻译：在步骤S61通过对准范围15获取对准标记30的二维图像，并且在步骤S62逐行地将在步骤S61获取的二维图像转换为光强度信号。关于每个线路信号是有效还是不必要的选择在步骤S63进行。在步骤S64，仅使用有效的行信号来计算对准标记30的位置偏差量。

93. 发明申请

US20060290351A1 Superconducting magnet apparatus for MRI 失效
标题翻译： MRI超导磁体设备
公开(公告)号：US20060290351A1
公开(公告)日：2006-12-28
申请号：US11305010
申请日：2005-12-19
申请人： Takahiro Matsumoto
发明人： Takahiro Matsumoto
IPC分类号： G01V3/00
CPC分类号： G01R33/3815 , G01R33/3806
摘要： In a superconducting magnets for MRI configured to generate a homogeneous magnetic field and a gradient magnetic field in a space between a top superconducting magnet and a bottom superconducting magnet, the bottom superconducting magnet is provided with a supporting member that supports a helium vessel, and the supporting member is fixed to a vacuum vessel of the bottom superconducting magnet at one end, and is fixed to the floor surface in the vicinity of the end fixed to the vacuum vessel. A high-quality MR image can be thus obtained by preventing direct transmission of oscillation of the gradient coils to the superconducting magnet and reducing oscillation of the gradient coils while achieving a reduction of the overall superconducting magnet in size.
摘要翻译：在用于MRI的超导磁体被配置为在顶部超导磁体和底部超导磁体之间的空间中产生均匀的磁场和梯度磁场，底部超导磁体设置有支撑氦容器的支撑构件，并且支撑构件在一端固定到底部超导磁体的真空容器，并且固定到固定到真空容器的端部附近的地板表面。因此可以通过防止梯形线圈的振荡直接传递到超导磁体并减小梯度线圈的振荡，同时实现整个超导磁体的尺寸的减小，从而可以获得高质量的MR图像。

94. 发明申请

US20060241894A1 Position detecting device and position detecting method 失效
标题翻译：位置检测装置和位置检测方法
公开(公告)号：US20060241894A1
公开(公告)日：2006-10-26
申请号：US11474331
申请日：2006-06-26
申请人： Takahiro Matsumoto , Hideki Ina
发明人： Takahiro Matsumoto , Hideki Ina
IPC分类号： G01C17/00
CPC分类号： G03F9/7088 , G03F7/70633 , G03F9/7003 , G03F9/7046 , G03F9/7065 , G03F9/7069 , G03F9/7092
摘要： A position detection method for detecting the position of marks comprises the following steps: a step for detecting first information relating to the position of the mark by detecting light from the mark under first measurement conditions; a step for detecting second information relating to the position of the mark by detecting light from the mark under second measurement conditions which differ from the first measurement conditions; and a step for detecting the position of the mark based on the first and second information, thereby providing a high-precision position detecting method and device serving as an alignment or overlaying detection device in an exposure apparatuses used in manufacturing semiconductor devices, wherein position detection precision is not lost even in the event that the alignment marks are not symmetrical or there are irregularities in the non-symmetry of multiple alignment marks within the same wafer.
摘要翻译：用于检测标记位置的位置检测方法包括以下步骤：通过在第一测量条件下检测来自标记的光来检测与标记的位置有关的第一信息的步骤; 通过在与第一测量条件不同的第二测量条件下检测来自标记的光来检测与标记的位置有关的第二信息的步骤; 以及基于第一和第二信息来检测标记的位置的步骤，从而在用于制造半导体器件的曝光装置中提供用于对准或重叠检测装置的高精度位置检测方法和装置，其中位置检测即使在对准标记不对称或在同一晶片内的多个对准标记的非对称性中存在不规则性的情况下，精度也不会降低。

95. 发明授权

US07010380B2 Management system, management method and apparatus, and management apparatus control method 失效
标题翻译：管理系统，管理方法和设备，以及管理设备控制方法
公开(公告)号：US07010380B2
公开(公告)日：2006-03-07
申请号：US10423891
申请日：2003-04-28
申请人： Koichi Sentoku , Hideki Ina , Takehiko Suzuki , Takahiro Matsumoto , Satoru Oishi
发明人： Koichi Sentoku , Hideki Ina , Takehiko Suzuki , Takahiro Matsumoto , Satoru Oishi
IPC分类号： G06F19/00 , G06F17/50
CPC分类号： G03F7/70525 , G05B19/418 , G05B2219/32015 , G05B2219/34402 , G05B2219/45027 , Y02P90/02 , Y02P90/18 , Y02P90/185
摘要： A system which manages a plurality of semiconductor exposure apparatuses holds TIS information representing the characteristics of the respective semiconductor exposure apparatuses. In a semiconductor exposure apparatus, a parameter value is optimized on the basis of AGA measurement results obtained using a set parameter value and another parameter value and AGA measurement estimation results obtained by virtually changing the parameter value. Whether to reflect the optimized parameter value in another exposure device is decided on the basis of the TIS information. If it is decided to reflect the optimized parameter value, the parameter value of another semiconductor exposure apparatus is optimized by the optimized parameter value. In this manner, the optimization result of a parameter value by a given exposure device can be properly reflected in another exposure device, realizing efficient parameter value setting.
摘要翻译：管理多个半导体曝光装置的系统保持表示各半导体曝光装置的特性的TIS信息。在半导体曝光装置中，基于使用设定参数值和另一参数值获得的AGA测量结果和通过虚拟改变参数值而获得的AGA测量估计结果来优化参数值。根据TIS信息确定是否反映另一曝光装置中的优化参数值。如果决定反映优化参数值，则通过优化的参数值优化另一半导体曝光装置的参数值。以这种方式，通过给定曝光装置的参数值的优化结果可以适当地反映在另一曝光装置中，实现有效的参数值设定。

96. 发明授权

US06344892B1 Exposure apparatus and device manufacturing method using same 有权
标题翻译：曝光装置及其制造方法
公开(公告)号：US06344892B1
公开(公告)日：2002-02-05
申请号：US09253710
申请日：1999-02-22
申请人： Mitsuro Sugita , Akiyoshi Suzuki , Takahiro Matsumoto
发明人： Mitsuro Sugita , Akiyoshi Suzuki , Takahiro Matsumoto
IPC分类号： G03B2742
CPC分类号： G03F9/7084 , G03F7/70408 , G03F7/7045 , G03F7/70466
摘要： An exposure apparatus includes an exposure device for effecting a multiplex pattern exposure of a photosensitive substrate before development and an alignment device for effecting alignment between the photosensitive substrate and the exposure device using a latent image of an alignment mark formed on the photosensitive substrate before one or some of the pattern exposures of the multiplex exposure. The latent image of the alignment mark is disposed outside a pattern provided by the pattern exposure.
摘要翻译：曝光装置包括曝光装置，用于在显影前进行感光基板的多重图案曝光，以及对准装置，用于在感光基板和曝光装置之间进行对准，使用在感光基板上形成的对准标记的潜像，多重曝光的一些模式曝光。对准标记的潜像设置在由图案曝光提供的图案的外侧。

97. 发明授权

US06217954B1 Phenyl triester compound and anti-ferroelectric liquid crystal composition containing the same 失效
标题翻译：苯基三酯化合物和含有它的反铁电液晶组合物
公开(公告)号：US06217954B1
公开(公告)日：2001-04-17
申请号：US09413482
申请日：1999-10-06
申请人： Yuki Motoyama , Takahiro Matsumoto , Masahiro Johno , Tomoyuki Yui
发明人： Yuki Motoyama , Takahiro Matsumoto , Masahiro Johno , Tomoyuki Yui
IPC分类号： C09K1912
CPC分类号： C09K19/0266 , C07C69/90 , C09K19/2021 , Y10T428/10
摘要： An anti-ferroelectric liquid crystal composition containing a phenyl triester compound of the formula (1), wherein R1 is a linear alkyl group having 6 to 12 carbon atoms, m is an integer of 0 to 3, n is an integer of 1 to 3, and X1 is a hydrogen atom or a fluorine atom, and an anti-ferroelectric liquid crystal compound of the formula (2), wherein R2 is a linear alkyl group having 6 to 12 carbon atoms, X2 is a hydrogen atom or a fluorine atom, A is —CH3 or —CF3, r is 0 or 1 and C* is an asymmetric carbon, provided that when A is —CH3, r is 0 and p is an integer of 4 to 10, that when A is —CF3 and when r is 0, p is an integer of 6 to 8, and further than when A is —CF3 and when r is 1, q is an integer of 5 to 8 and p is 2 or 4. The phenyl triester compound and anti-ferroelectric liquid crystal compound composition is not only improved in response speed but also shows remarkably controlled layer rotation, and it can achieve a simple matrix liquid crystal display device which is free of a change in contrast and is highly reliable in use for a long period of time.
摘要翻译：一种含有式（1）的苯基三酯化合物的反铁电液晶组合物，其中，R 1为碳原子数6〜12的直链烷基，m为0〜3的整数，n为1〜3的整数。，X 1为氢原子或氟原子，式（2）的反铁电液晶化合物，其中，R2为碳原子数6〜12的直链烷基，X2为氢原子或氟原子 A为-CH 3或-CF 3，r为0或1，C *为不对称碳，条件是当A为-CH 3时，r为0，p为4至10的整数，当A为-CF 3和当r为0时，p为6至8的整数，并且当A为-CF 3时，当r为1时，q为5至8的整数，p为2或4.苯基三酯化合物和抗 - 铁电液晶化合物组合物不仅提高了响应速度，而且显示出显着控制的层旋转，并且可以实现简单的矩阵液晶显示装置，其不含ch 相比之下，在长时间使用中是高度可靠的。

98. 发明授权

US5818588A Displacement measuring method and apparatus using plural light beam beat frequency signals 失效
标题翻译：使用多个光束拍频信号的位移测量方法和装置
公开(公告)号：US5818588A
公开(公告)日：1998-10-06
申请号：US962680
申请日：1997-11-03
申请人： Takahiro Matsumoto , Koichi Sentoku
发明人： Takahiro Matsumoto , Koichi Sentoku
IPC分类号： G01B9/02 , G01D5/26
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02019 , G01B9/02022 , G01D5/266 , G01B2290/45 , G01B2290/60 , G01B2290/70
摘要： A displacement measuring method for measuring displacement of an object to be examined is disclosed, wherein light which contains two components having a small difference in frequency is separated into a first light of a firs wavelength and a second light of a second wavelength, having different frequencies. First light beam of the first light and a second light beam of the second light interfere with each other, wherein at least one of the first and second light beams is directed via the object, whereby a first light beat signal is produced. Third light beam of the first light and a fourth light beam of the second light interfere with each other, wherein at least one of the third and fourth light beams is directed via the object, whereby a second light beat signal having a predetermined phase difference as compared with the first light beat signal is produced. Then, displacement of the object is measured on the basis of a phase resulting from comparison of the phases of the first and second light beat signals.
摘要翻译：公开了一种用于测量待检测物体的位移的位移测量方法，其中包含具有小的频率差的两个分量的光被分离成具有不同频率的第一波长的第一光和第二波长的第二光。第一光的第一光束和第二光的第二光束彼此干涉，其中第一和第二光束中的至少一个通过物体被引导，由此产生第一光拍信号。第一光的第三光束和第二光的第四光束彼此干涉，其中第三和第四光束中的至少一个经由物体被引导，由此具有预定相位差的第二光拍信号作为与第一个光拍信号相比产生。然后，基于通过比较第一和第二光拍信号的相位而产生的相位来测量物体的位移。

99. 发明授权

US5716544A Phenyl ester compound and liquid crystal composition containing the same 失效
标题翻译：苯酯化合物和含有它们的液晶组合物
公开(公告)号：US5716544A
公开(公告)日：1998-02-10
申请号：US635320
申请日：1996-04-19
申请人： Yuki Motoyama , Tomoyuki Yui , Masahiro Johno , Takahiro Matsumoto , Teruyo Tomiyama
发明人： Yuki Motoyama , Tomoyuki Yui , Masahiro Johno , Takahiro Matsumoto , Teruyo Tomiyama
IPC分类号： C07C69/90 , C09K19/02 , C09K19/46 , C09K19/12 , C09K19/20
CPC分类号： C09K19/0266 , C07C69/90 , C09K19/46
摘要： A phenyl ester compound of the following general formula (1), ##STR1## wherein m is an integer of 3 to 8, n is an integer of 3 to 11, both of X.sup.1 and X.sup.2 are hydrogen atoms, or one of X.sup.1 and X.sup.2 is a fluorine atom and the other is a hydrogen atom, and A is a hydrogen atom or --CH.sub.3 ; and an anti-ferroelectric liquid crystal composition containing the above phenyl ester compound and a specific anti-ferroelectric liquid crystal compound or a specific liquid crystal compound having ferrielectric-phase.
摘要翻译：下述通式（1）的苯基酯化合物，其中m为3〜8的整数，n为3〜11的整数，X1和X2均为氢原子，或者为 X1和X2是氟原子，另一个是氢原子，A是氢原子或-CH 3; 以及含有上述苯基酯化合物和特定的抗铁电液晶化合物的反铁电液晶组合物或具有铁电相的特定液晶化合物。

100. 发明授权

US5682239A Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters 失效
$Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters$
标题翻译：用于通过利用入射在来自第一和第二发光体的光栅的光束的光学外差干涉来检测基板上的衍射光栅的位置偏差的装置
公开(公告)号：US5682239A
公开(公告)日：1997-10-28
申请号：US528817
申请日：1995-09-15
申请人： Takahiro Matsumoto , Kenji Saitoh , Koichi Sentoku
发明人： Takahiro Matsumoto , Kenji Saitoh , Koichi Sentoku
IPC分类号： G01B9/02 , G01B11/00 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70633 , G03F9/70
摘要： Apparatus for detecting a positional deviation of two diffraction gratings of each of first and second pairs of diffraction gratings formed on a substrate, by utilizing an optical heterodyne interference method. The apparatus includes a first light emitter for emitting a pair of coherent light beams having different frequencies close to a first frequency, a second light emitter for emitting a pair of coherent light beams having different frequencies close to a second frequency, different from the first frequency, a four-way radiating unit radiating the two pairs of light beams in four directions and for causing a selected pair of the light beams to be incident on a corresponding one of the first and second pairs of the diffraction gratings such that corresponding beam spots overlap with each other, a splitter for splitting diffracted light beams from the diffraction gratings according to frequencies of the diffracted light beams, to separate a first diffracted light beam, which is diffracted from the first pair of diffraction gratings in a diffraction direction, and a second diffracted light beam, which is diffracted from the second pair of diffraction gratings in the same diffraction direction, a beat signal detector for detecting beat signals respectively corresponding to the split light beams, and a deviation detecting unit for receiving the detected beat signals and for detecting a positional deviation in a predetermined direction of two diffraction gratings of each of the first and second pairs, from the beat signals respectively corresponding to the two diffraction gratings of a corresponding one of the first and second pairs.
摘要翻译：用于通过利用光学外差干扰法检测形成在基板上的第一和第二对衍射光栅中的每一个的两个衍射光栅的位置偏差的装置。该装置包括用于发射具有接近于第一频率的不同频率的一对相干光束的第一光发射器，用于发射具有接近第二频率的不同频率的一对相干光束的第二光发射器，其不同于第一频率，四路辐射单元，其在四个方向上辐射两对光束，并且使所选择的一对光束入射在第一和第二对衍射光栅中的相应一个上，使得相应的光束点重叠彼此分离，用于根据衍射光束的频率从衍射光栅分离衍射光束，以在衍射方向上分离从第一对衍射光栅衍射的第一衍射光束，以及第二衍射光束衍射光束在相同的衍射光谱中衍射自第二对衍射光栅 n是用于检测分别对应于分割光束的拍频信号的拍频信号检测器，以及用于接收所检测到的拍频信号并检测第一和第二声道中的每一个的两个衍射光栅的预定方向的位置偏差的偏差检测单元从分别对应于第一和第二对应的一个的两个衍射光栅的拍子信号对。

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