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    • 91. 发明授权
    • Optical scanner and image forming apparatus
    • 光学扫描仪和图像形成装置
    • US08553062B2
    • 2013-10-08
    • US13102121
    • 2011-05-06
    • Atsushi Ueda
    • Atsushi Ueda
    • B41J27/00B41J15/14B41J2/435
    • G03G15/011B41J2/473G02B26/123G02B26/125G03G15/0435G03G2215/0132
    • An optical scanner includes a third f-theta lens, an eccentric cam, an attaching portion, a first supporting member, a second supporting member and a spring. A distance between a face opposed to the first side-face of the third f-theta lens in the first supporting member and a face opposed to the second side-face of the third f-theta lens in the second supporting member is set to be longer than a distance of the third f-theta lens in its lateral direction. The spring is disposed opposed to the first side-face or the second side-face, and presses the third f-theta lens so that the third f-theta lens is in contact with the eccentric cam and either of the first supporting member and the second supporting member.
    • 光学扫描器包括第三f-theta透镜,偏心凸轮,附接部分,第一支撑构件,第二支撑构件和弹簧。 在第一支撑构件中与第三f-theta透镜的第一侧面相对的面与第二支撑构件中与第三f-θ透镜的第二侧面相对的面之间的距离被设定为 长于第三个f-θ透镜在其横向上的距离。 弹簧设置成与第一侧面或第二侧面相对,并且按压第三f-theta透镜,使得第三f-theta透镜与偏心凸轮接触并且第一支撑构件和 第二支撑构件。
    • 94. 发明申请
    • PLANAR ANTENNA MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME
    • 平面天线成员和等离子体处理装置,包括它们
    • US20110114021A1
    • 2011-05-19
    • US12922402
    • 2009-03-13
    • Atsushi UedaHikaru AdachiCaizhong TianYoshinori FukudaToshiaki HongoMasao Yoshioka
    • Atsushi UedaHikaru AdachiCaizhong TianYoshinori FukudaToshiaki HongoMasao Yoshioka
    • C23C16/50H01Q13/10C23C8/10
    • H05H1/46H01J37/32192H01J37/3222
    • The present invention is a planar antenna member configured to introduce electromagnetic waves generated by an electromagnetic-wave generating source into a processing vessel of a plasma processing apparatus, the planar antenna member comprising: a base member of a circular plate shape, made of a conductive material; and a plurality of through-holes formed in the base member of a circular plate shape, the through-holes being configured to radiate the electromagnetic waves; wherein: the through-holes include a plurality of first through-holes which are arranged on a circumference of a circle whose center corresponds to a center of the planar antenna member, and a plurality of second through-holes which are arranged concentrically with the circle outside the first through-holes; a ratio L1/r is within a range between 0.35 and 0.5, in which L1 is a distance from the center of the planar antenna member to a center of one of the first through-holes, and r is a radius of the planar antenna member; and a ratio L2/r is within a range between 0.7 and 0.85, in which L2 is a distance from the center of the planar antenna member to a center of one of the second through-holes, and r is the radius of the planar antenna member.
    • 本发明是一种平面天线部件,其被配置为将由电磁波发生源产生的电磁波引入到等离子体处理装置的处理容器中,所述平面天线部件包括:圆形板状的基体部件, 材料; 以及形成在所述基板的圆板形状的多个通孔,所述通孔被配置为辐射所述电磁波; 其中:所述通孔包括多个第一通孔,所述多个第一通孔布置在其中心对应于所述平面天线构件的中心的圆的圆周上,以及多个第二通孔,所述第二通孔与所述圆 第一通孔外; 比率L1 / r在0.35和0.5之间的范围内,其中L1是从平面天线构件的中心到第一通孔中的一个的中心的距离,r是平面天线构件的半径 ; 并且比率L2 / r在0.7和0.85之间的范围内,其中L2是从平面天线构件的中心到第二通孔中的一个的中心的距离,并且r是平面天线的半径 会员。