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    • 93. 发明授权
    • Semiconductor device and method for manufacturing same
    • 半导体装置及其制造方法
    • US09240491B2
    • 2016-01-19
    • US14130844
    • 2012-06-26
    • Kazuatsu ItoHidehito Kitakado
    • Kazuatsu ItoHidehito Kitakado
    • H01L29/10H01L29/66H01L27/12H01L29/786
    • H01L29/7869H01L27/1225H01L29/66969H01L29/78618H01L29/78645H01L29/78696
    • A semiconductor device (100A) has an oxide semiconductor layer (11). The oxide semiconductor layer (11) has a channel region (11c), and a source region (11s) and drain region (11d) positioned on respective sides of the channel region (11c). The source region (11s) has a low-resistance source region (11sx) that has a lower resistance than the channel region (11c), and the drain region (11d) has a low-resistance drain region (11dx) that has a lower resistance than the channel region (11c). The carrier concentrations of the low-resistance source region (11sx) and the low-resistance drain region (11dx) become progressively lower from a connecting portion between a source electrode (17) and the low-resistance source region (11sx) and a connecting portion between a drain electrode (18) and the low-resistance drain region (11dx) towards the channel region (11c).
    • 半导体器件(100A)具有氧化物半导体层(11)。 氧化物半导体层(11)具有沟道区域(11c)以及位于沟道区域(11c)的相应侧面上的源极区域(11s)和漏极区域(11d)。 源极区域(11s)具有比沟道区域(11c)低的电阻的低电阻源极区域(11sx),漏极区域(11d)具有低电阻漏极区域(11dx) 电阻比通道区域(11c)。 低电阻源极区域(11sx)和低电阻漏极区域(11dx)的载流子浓度从源电极(17)和低电阻源极区域(11sx)之间的连接部分逐渐降低,并且连接 漏极电极(18)和低电阻漏极区域(11dx)之间的部分朝向沟道区域(11c)。
    • 95. 发明申请
    • SEMICONDUCTOR DEVICE, ACTIVE MATRIX SUBSTRATE AND DISPLAY DEVICE
    • 半导体器件,有源矩阵衬底和显示器件
    • US20120256184A1
    • 2012-10-11
    • US13515921
    • 2010-11-02
    • Seiji KanekoHidehito Kitakado
    • Seiji KanekoHidehito Kitakado
    • H01L29/786
    • H01L29/78633G02F1/1368H01L29/78621H01L29/78645H01L29/78648
    • A switching element (a semiconductor device) (18) having a top gate electrode (21) and a bottom gate electrode (23) is provided with a silicon layer (a semiconductor layer) (SL) that is arranged between the top gate electrode (21) and the bottom gate electrode (a light-shielding film) (23) and that has a source region (24), a drain region (28), a channel region (26), and low-concentration impurity regions (25, 27). Furthermore, the bottom gate electrode (23) is arranged so as to overlap the channel region (26), a part of the low-concentration impurity region (25), which is adjacent to the source region (24), and a part of the low-concentration impurity region (27), which is adjacent to the drain region (18). The bottom gate electrode (23) is controlled so as to have a prescribed potential.
    • 具有顶栅极(21)和底栅电极(23)的开关元件(半导体器件)(18)设置有硅层(半导体层)(SL),其设置在顶栅电极 21)和底栅极(遮光膜)(23),并且具有源极区(24),漏极区(28),沟道区(26)和低浓度杂质区(25, 27)。 此外,底栅电极(23)被布置成与沟道区(26)重叠,与源区(24)相邻的低浓度杂质区(25)的一部分,和 与漏极区(18)相邻的低浓度杂质区(27)。 底栅极(23)被控制为具有规定的电位。
    • 96. 发明申请
    • SEMICONDUCTOR DEVICE, ACTIVE MATRIX SUBSTRATE, AND DISPLAY DEVICE
    • 半导体器件,有源矩阵衬底和显示器件
    • US20120146038A1
    • 2012-06-14
    • US13392273
    • 2010-08-26
    • Hidehito Kitakado
    • Hidehito Kitakado
    • H01L29/786
    • H01L27/1214G02F1/13454G02F2001/13312H01L29/78624H01L29/78633H01L29/78645H01L29/78648
    • Provided are a semiconductor device that can achieve leakage current reduction irrespective of an ambient temperature, an active matrix substrate in which such a semiconductor device is used, and a display device. In a switching portion (semiconductor device) (18) including a plurality of thin film transistors connected in series, there are provided a plurality of gate electrodes (g1 to g4); channel regions (30) and low-concentration impurity-doped regions (29) that are included in a silicon layer (semiconductor layer) (SL) provided below the plurality of gate electrodes (g1 to g4), and are provided in the plurality of thin film transistors, respectively; and a bottom gate electrode (21) provided below the silicon layer (SL). To the bottom gate electrode (29), a signal in the same phase as that of a signal for the gate electrodes (g1 to g4) is supplied.
    • 提供了能够实现与环境温度无关的漏电流降低的半导体器件,使用这种半导体器件的有源矩阵基板和显示装置。 在包括串联连接的多个薄膜晶体管的开关部(半导体器件)(18)中,设置有多个栅电极(g1〜g4)。 包含在设置在多个栅电极(g1〜g4)的下方的硅层(半导体层)(SL)中的多个沟道区域(30)和低浓度杂质掺杂区域(29) 薄膜晶体管; 以及设置在硅层(SL)下方的底栅电极(21)。 向底栅电极(29)提供与栅电极(g1〜g4)的信号相同相位的信号。
    • 97. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07868398B2
    • 2011-01-11
    • US11542217
    • 2006-10-04
    • Takeshi NodaHidehito KitakadoTakuya Matsuo
    • Takeshi NodaHidehito KitakadoTakuya Matsuo
    • H01L29/76H01L29/94H01L31/062H01L31/113H01L31/119
    • H01L29/66757H01L29/42384H01L29/78603H01L29/78621H01L29/78675
    • A semiconductor device, which can improve the effect of a hydrogenation treatment in case of using a GOLD structure, and a method of manufacturing thereof is provided. A gate insulating film is formed on a semiconductor layer, and a source region, a drain region, and LDD regions are formed in the semiconductor layer. A main gate is formed on the gate insulating film. A sub-gate is formed on the main gate and the gate insulating film so as to cover a part of the main gate and either the LDD regions adjacent to the source region or the drain region. An interlayer insulating film containing hydrogen is formed on the sub-gate, main gate, and gate insulating film. Subsequently, a heat treatment for hydrogenation is performed to terminate a crystal defect of the semiconductor layer with hydrogen.
    • 提供了可以提高在使用GOLD结构的情况下氢化处理的效果的半导体器件及其制造方法。 在半导体层上形成栅极绝缘膜,在半导体层中形成源极区,漏极区,LDD区。 在栅极绝缘膜上形成主栅极。 在主栅极和栅极绝缘膜上形成子栅极,以覆盖主栅极的一部分和与源极区域或漏极区域相邻的LDD区域。 在子栅极,主栅极和栅极绝缘膜上形成含有氢的层间绝缘膜。 随后,进行用于氢化的热处理,以氢终止半导体层的晶体缺陷。
    • 100. 发明授权
    • Semiconductor device and method for manufacturing the same
    • 半导体装置及其制造方法
    • US07528410B2
    • 2009-05-05
    • US11584524
    • 2006-10-23
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • Tatsuya AraoTakeshi NodaTakuya MatsuoHidehito KitakadoMasanori Kyoho
    • H01L29/12H01L29/786
    • H01L27/124H01L27/1214H01L27/1259H01L29/6675H01L29/78621H01L29/78648
    • A semiconductor device that can be manufactured with a reduced cost by decreasing the number of masks is disclosed, and a method for manufacturing the semiconductor device is disclosed. The method for manufacturing the semiconductor device comprises the steps of: forming a semiconductor layer 3 having a source and a drain regions 10, 11, and LDD regions 16, 17; a gate insulating film 5; and a gate electrode 6; forming a first and a second interlayer insulating films 24, 25 over the gate electrode 6 and the gate insulating film 5; forming contact holes 25a, 25c to these interlayer insulating films so as to be located over each of the source region and the drain region; and an opening portion 25b to these interlayer insulating films so as to be located over the gate electrode and the LDD region; forming a second gate electrode 26b by a conductive film in the opening portion so as to cover the gate electrode and the LDD region; and a pixel electrode 26a over the second interlayer insulating film; removing the gate insulating film in the contact hole; and forming wirings 27, 28 connected to each the source region and the drain region.
    • 公开了可以通过减少掩模数而降低成本的半导体器件,并且公开了一种用于制造半导体器件的方法。 制造半导体器件的方法包括以下步骤:形成具有源极和漏极区域10,11以及LDD区域16,17的半导体层3; 栅极绝缘膜5; 和栅电极6; 在栅极电极6和栅极绝缘膜5上形成第一和第二层间绝缘膜24,25; 将这些层间绝缘膜形成接触孔25a,25c,以便位于源极区域和漏极区域的每一个上; 和这些层间绝缘膜的开口部25b,以位于栅电极和LDD区之上; 通过开口部中的导电膜形成第二栅电极26b,以覆盖栅电极和LDD区; 和在第二层间绝缘膜上方的像素电极26a; 去除接触孔中的栅极绝缘膜; 以及形成连接到每个源极区域和漏极区域的布线27,28。