会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 94. 发明授权
    • Multi-bit data converter using data weight averaging
    • 使用数据权重平均的多位数据转换器
    • US07808409B2
    • 2010-10-05
    • US12328550
    • 2008-12-04
    • Sang-Ho Kim
    • Sang-Ho Kim
    • H03M1/00
    • H03M1/0665H03M1/747H03M3/502
    • A method for converting data includes matching dynamic elements by repeatedly selecting a portion of unit elements among N unit elements according to data and a circulation direction. An existence of a tone generation possibility is determined by comparing a present pointer position with a previous pointer position and by comparing present data with previous data. At least one of the present pointer position and the circulation direction is changed based on the existence of the tone generation possibility. The present pointer position and the present data are stored or the changed pointer position and the present data are stored. Unit elements are sequentially selected by the present data from the stored pointer position in the circulation direction or the changed circulation direction. The present pointer position is moved by the present data in the circulation direction or the changed circulation direction.
    • 用于转换数据的方法包括通过根据数据和循环方向重复地选择N个单元中的单位元素的一部分来匹配动态元素。 通过将当前指针位置与先前的指针位置进行比较并通过将当前数据与先前数据进行比较来确定音调生成可能性的存在。 本指针位置和循环方向中的至少一个基于音调生成可能性的存在而改变。 存储当前指针位置和当前数据,或存储改变的指针位置和当前数据。 通过来自循环方向或改变的循环方向上存储的指示器位置的当前数据顺序地选择单位元素。 当前数据在循环方向或改变的循环方向上移动当前指针位置。
    • 95. 发明申请
    • METHODS AND APPARATUS FOR SEMICONDUCTOR ETCHING INCLUDING AN ELECTRO STATIC CHUCK
    • 用于半导体蚀刻的方法和装置,包括电子静态卡盘
    • US20080194113A1
    • 2008-08-14
    • US12106484
    • 2008-04-21
    • Jin-Man KimYun-Sik YangYoung-Min MinSang-Ho Kim
    • Jin-Man KimYun-Sik YangYoung-Min MinSang-Ho Kim
    • H01L21/3065
    • H01L21/6831H01J37/32642H01L21/68735
    • There is provided a semiconductor etching apparatus which removes particles remaining on the upper surface of an electro static chuck (ESC) during an etching process, thereby preventing a chucking force from decreasing and minimizing a leak of helium. To prevent a failure of the etching process due to a wafer chucking failure, by preventing polymers from falling down on the upper part of the ESC when a wafer is dechucked or transferred, the semiconductor etching apparatus comprises: an ESC selectively holding a wafer to be entered and positioned inside a chamber, and including a lower electrode part to which RF power is applied; parts positioned at a stepped portion of the ESC and respectively surrounding a side of the ESC; and a gas flow blocking part blocking a gas flow in a vacuum path formed between the ESC and the parts.
    • 提供了一种半导体蚀刻装置,其在蚀刻过程中除去静电卡盘(ESC)的上表面上残留的颗粒,从而防止夹紧力降低并使氦泄漏最小化。 为了防止由于晶片夹紧故障引起的蚀刻工艺的故障,通过在晶片脱扣或转印时防止聚合物落下于ESC的上部,半导体蚀刻装置包括:选择性地保持晶片的ESC 进入并定位在室内,并且包括施加RF功率的下电极部分; 位于ESC的阶梯部分并分别围绕ESC的一侧的部件; 以及阻塞在ESC和部件之间形成的真空路径中的气流的气流阻塞部。
    • 96. 发明申请
    • Wafer aligning apparatus and related method
    • 晶圆对准装置及相关方法
    • US20070189596A1
    • 2007-08-16
    • US11641870
    • 2006-12-20
    • Heok-Jae LeeSang-Ho KimHyu-Rim ParkDo-In BaeKee-Weone SeoChang-Woo Woo
    • Heok-Jae LeeSang-Ho KimHyu-Rim ParkDo-In BaeKee-Weone SeoChang-Woo Woo
    • G06K9/00
    • H01L21/681G06T7/33G06T7/74G06T2207/30148Y10S414/136
    • Embodiments of the invention provide a wafer aligning apparatus and a wafer aligning method. In one embodiment, the wafer aligning apparatus comprises an imaging unit adapted to take an image of a wafer being transferred from a load lock chamber to a transfer chamber and adapted to convert the image into digital signals, and a signal processing unit adapted to calculate a center alignment correction value for the wafer by comparing the digital signals to a master image stored in the signal processing unit. The wafer aligning apparatus further comprises a robot controller adapted to receive the center alignment correction value from the signal processing unit and adapted to control a transfer robot in accordance with the center alignment correction value to provide the wafer to a process chamber such that the center of the wafer is substantially aligned.
    • 本发明的实施例提供一种晶片对准装置和一种晶圆对准方法。 在一个实施例中,晶片对准装置包括成像单元,其适于将从负载锁定室传送的晶片的图像转移到传送室,并适于将图像转换成数字信号,以及信号处理单元, 通过将数字信号与存储在信号处理单元中的主图像进行比较来获得晶片的中心对准校正值。 晶片对准装置还包括机器人控制器,其适于从信号处理单元接收中心对准校正值,并且适于根据中心对准校正值来控制传送机器人,以将晶片提供给处理室,使得处理室的中心 晶片基本对齐。
    • 97. 发明申请
    • Method of matching dynamic elements and multi-bit data converter
    • 匹配动态元素和多位数据转换器的方法
    • US20070040720A1
    • 2007-02-22
    • US11502664
    • 2006-08-10
    • Sang-Ho Kim
    • Sang-Ho Kim
    • H03M1/66
    • H03M1/0665H03M1/66H03M3/502
    • A method of matching dynamic elements includes sequentially selecting first unit elements corresponding to a value of first digital data among M unit elements in a first direction, the M unit elements being for converting sequentially inputted digital data to an analog signal; checking whether a reference unit element is selected; checking a value of a LSB of the first digital data when the reference unit element is selected; sequentially selecting second unit elements corresponding to a value of second digital data inputted next to the first digital data among the M unit elements in a second direction opposite to the first direction when the value of the LSB of the first digital data is a first value; and sequentially selecting the second unit elements in the first direction when the value of the LSB of the first digital data is a second value.
    • 一种匹配动态元素的方法包括在第一方向上顺次选择与M个单元中的第一数字数据的值对应的第一单元,M单元用于将顺序输入的数字数据转换为模拟信号; 检查参考单元是否被选择; 当选择所述参考单元时,检查所述第一数字数据的LSB的值; 当所述第一数字数据的LSB的值为第一值时,以与所述第一方向相反的第二方向顺序地选择与所述M个单元中的所述第一数字数据之后输入的第二数字数据的值对应的第二单元; 以及当所述第一数字数据的LSB的值是第二值时,沿所述第一方向依次选择所述第二单元。