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91. 发明授权

US06433301B1 Beam shaping and projection imaging with solid state UV Gaussian beam to form vias 有权
标题翻译：光束成像和投影成像与固态紫外高斯光束形成通孔
公开(公告)号：US06433301B1
公开(公告)日：2002-08-13
申请号：US09580396
申请日：2000-05-26
申请人： Corey M. Dunsky , Xinbing Liu , Nicholas J. Croglio , Ho W. Lo , Bryan C. Gundrum , Hisashi Matsumoto
发明人： Corey M. Dunsky , Xinbing Liu , Nicholas J. Croglio , Ho W. Lo , Bryan C. Gundrum , Hisashi Matsumoto
IPC分类号： B23K2638
CPC分类号： B23K26/382 , B23K26/066 , B23K26/073 , B23K26/0732 , B23K26/389 , B23K26/40 , B23K2101/42 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/16 , B23K2103/172 , B23K2103/26 , B23K2103/42 , B23K2103/50 , B23K2103/52 , H01L21/486 , H01L21/76802 , H05K3/0035 , H05K3/0038 , H05K3/427
摘要： A diode-pumped, solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile. A high percentage of the shaped output (94) is focused through an aperture of a mask (98) to provide imaged to provide imaged shaped output (118). The laser system (50) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias (20b) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system (150) employs a pair of beam diverting galvanometer mirrors (152, 154) that directs the Gaussian output around a shaped imaging system (70) that includes a diffractive optical element (90) and a mask (98). Laser system (150) provides a user with the option of using either a Gaussian output or an imaged shaped output (118).
摘要翻译：激光系统（50）的二极管泵浦的固态激光器（52）提供由衍射光学元件（90）转换成具有均匀辐照度分布的成形输出（94）的紫外高斯输出（54）。高百分比的成形输出（94）通过掩模（98）的孔聚焦以提供成像以提供成像的成形输出（118）。激光系统（50）有助于提高通孔钻孔过程的吞吐量超过类似的限幅高斯激光系统可用的方法。该方法对于具有比由高斯激光系统产生的那些具有更好的边缘，底部和锥度特性的盲孔（20b）特别有利。替代的激光系统（150）使用一对光束转向电流计反射镜（152,154），其引导围绕包括衍射光学元件（90）和掩模（98）的成形成像系统（70）的高斯输出。激光系统（150）向用户提供使用高斯输出或成像形状输出（118）的选项。

92. 发明授权

US06347171B1 Method and apparatus for forming a diffraction grating 有权
$Method and apparatus for forming a diffraction grating$
标题翻译：用于形成衍射光栅的方法和装置
公开(公告)号：US06347171B1
公开(公告)日：2002-02-12
申请号：US09281908
申请日：1999-03-31
申请人： Abdelkrim Tatah , Xinbing Liu
发明人： Abdelkrim Tatah , Xinbing Liu
IPC分类号： G02B634
CPC分类号： G02B6/02133 , G02B6/02138
摘要： A method for forming a diffraction grating in an optical fiber. First and second ultrashort laser pulses are generated. The first and second ultrashort laser pulses are directed to intersect and form an interference pattern. The interference pattern includes periodic intensity variations which cause corresponding periodic changes in an index of refraction of the optical fiber. The ultrashort laser pulses and the optical fiber are configured to be self-focused by the cladding and core of the optical fiber.
摘要翻译：一种在光纤中形成衍射光栅的方法。产生第一和第二超短激光脉冲。第一和第二超短激光脉冲指向相交并形成干涉图案。干涉图案包括导致光纤的折射率相应的周期性变化的周期性强度变化。超短激光脉冲和光纤被配置为通过光纤的包层和芯自聚焦。

93. 发明授权

US6081543A Stretcher-compressor assembly having a single grating 失效
标题翻译：具有单个光栅的担架压缩机组件
公开(公告)号：US6081543A
公开(公告)日：2000-06-27
申请号：US79334
申请日：1998-05-14
申请人： Xinbing Liu , Alan Braun , Christopher Horvath
发明人： Xinbing Liu , Alan Braun , Christopher Horvath
IPC分类号： H01S3/00 , H01S3/08
CPC分类号： H01S3/0057
摘要： The invention provides a compact, combined stretcher-compressor assembly which utilizes a single grating element. The single grating element is preferably a holographic transmission grating element. The grating element has first and second surfaces which are opposed major surfaces with a thickness between the surfaces. The grating pattern is patterned in or on the grating element. The grating element is arranged in the assembly to receive a beam for stretching laser pulses in a stretcher beam path, and in the same arrangement, to receive a beam for compressing laser beam pulses in a compressor beam path. The stretcher and compressor beam paths pass through the single grating element. Respective reflecting means are arranged to provide a desired number of passes through the grating element by the stretcher beam path, and through the grating element by the compressor beam path.
摘要翻译：本发明提供了一种使用单个光栅元件的紧凑的组合的拉伸 - 压缩机组件。单个光栅元件优选为全息透射光栅元件。光栅元件具有第一和第二表面，它们是相对的主表面之间的厚度。光栅图案被图案化在光栅元件中或栅格元件上。光栅元件被布置在组件中以接收用于在担架光束路径中拉伸激光脉冲的光束，并且在相同的布置中，接收用于压缩压缩机光束路径中的激光束脉冲的光束。担架和压缩机光束路径通过单个光栅元件。各个反射装置被布置成通过担架射束路径提供期望数量的通过光栅元件的通过，并且通过压缩机光束路径通过光栅元件。

94. 发明授权

US5606588A Method and apparatus for generating laser plasma x-rays 失效
标题翻译：用于产生激光等离子体X射线的方法和装置
公开(公告)号：US5606588A
公开(公告)日：1997-02-25
申请号：US508482
申请日：1995-07-28
申请人： Donald Umstadter , Jonathan Workman , Anatoly Maksimchuk , Xinbing Liu
发明人： Donald Umstadter , Jonathan Workman , Anatoly Maksimchuk , Xinbing Liu
IPC分类号： H05G2/00 , H05H1/22 , H01J35/22
CPC分类号： H05G2/001 , G21B1/23
摘要： The present invention provides a system and an apparatus to produce x-rays from plasmas by focusing an intense, short duration optical pulse from a laser onto a target. The concentrated energy contained in the focused laser beam ionizes the target material, raising it to a temperature at which ions are produced in a chain reaction ionization, and x-rays are emitted when ions become de-excited (their electrons change energy level) or free electrons recombine with the ions in the plasma. The method comprises controlling pulse time duration of x-rays emitted from a plasma-forming target by generating a beam of one or more laser pulses; adjusting the intensity of the laser pulse to obtain a desired intensity incident at a surface of the plasma-forming target matter; directing the laser pulse onto the surface of the plasma-forming matter to generate the x-rays having a pulse duration which changes in proportion to a change in the incident laser pulse intensity. In one embodiment, the x-rays are then directed onto a sample target.
摘要翻译：本发明提供了一种从等离子体产生X射线的系统和装置，其通过将来自激光的强烈的短持续时间的光脉冲聚焦到目标上。聚焦激光束中所含的浓缩能量将目标材料电离，使其升高到在链式反应电离中产生离子的温度，并且当离子被去激发（它们的电子改变能量水平）时发射X射线，或自由电子与等离子体中的离子重新结合。该方法包括通过产生一个或多个激光脉冲的光束来控制从等离子体形成目标发射的x射线的脉冲持续时间; 调整激光脉冲的强度以获得在等离子体形成目标物质的表面入射的所需强度; 将激光脉冲引导到等离子体形成物质的表面上以产生具有与入射激光脉冲强度的变化成比例地变化的脉冲持续时间的x射线。在一个实施例中，x射线然后被引导到样本目标上。

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