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    • 97. 发明授权
    • Powder agitator
    • 粉末搅拌器
    • US5347133A
    • 1994-09-13
    • US82460
    • 1993-06-25
    • Hitoshi TokiYoshihisa YonezawaShigeo Itoh
    • Hitoshi TokiYoshihisa YonezawaShigeo Itoh
    • C23C14/00B01F11/00C23C14/50H01J5/00
    • B01F11/0094
    • A powder agitator used for an ion implantation device or an ionized beam deposition device capable of exhibiting satisfactory powder agitating characteristics and minimizing positive charging on powders. The powder agitator includes a base, a vessel for receiving powders therein, a plurality of supports for supporting the vessel on the base, and a pair of piezoelectric elements arranged on the supports and functioning as a vibration generating section. Application of a voltage to the piezoelectric elements causes the vessel to be oscillated in a direction of rotation of the vessel and a speed of oscillation of the vessel to be varied depending on a direction of oscillation of the vessel, resulting in agitating the powders in the vessel.
    • 用于离子注入装置或电离束沉积装置的粉末搅拌器,其能够表现出令人满意的粉末搅拌特性并使粉末上的正电荷最小化。 粉末搅拌器包括基座,用于容纳粉末的容器,用于将容器支撑在基座上的多个支撑件和布置在支撑件上并用作振动产生部分的一对压电元件。 向压电元件施加电压使得容器在容器的旋转方向上振荡并且容器的振荡速度根据容器的振荡方向而变化,从而使粉末在 船只。